Patent Assignment
Reel/Frame 022555/0623
Assignment of Assignor's Interest
Recorded: 2009-04-16
Pages: 14
Assignors
FARLEY, MARVIN
Executed: 2009-03-06
POLNER, DONALD
Executed: 2009-03-24
RYDING, GEOFFREY
Executed: 2008-12-19
SMICK, THEODORE
Executed: 2008-12-16
SAKASE, TAKAO
Executed: 2009-03-06
HORNER, RONALD
Executed: 2008-12-12
EISNER, EDWARD
Executed: 2009-03-05
EIDE, PAUL
Executed: 2008-12-16
FREER, BRIAN
Executed: 2008-12-22
LAMBERT, MARK
Executed: 2009-03-18
BECKEL, DONOVAN
Executed: 2009-01-21
Assignee
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915-1053
Covered Property
(1)
Ion Beam Angle Calibration and Emittance Measurement System for Ribbon Beams
Related Assignments
(5)
Other recorded transfers of the patent in this record — the chain of ownership.
Consent and License Agreement
Apr 17, 2009
From: AXCELIS TECHNOLOGIES, INC.
To: SEN CORPORATION
Reel/Frame 022562/0758 →
Security Agreement
Apr 8, 2010
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK
Reel/Frame 024202/0494 →
First Amendment to Security Agreement
May 10, 2011
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK
Reel/Frame 026250/0524 →
Security Interest
Jul 31, 2020
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK, AS ADMINISTRATIVE AGENT
Reel/Frame 053375/0055 →
Release of Security Interest
Apr 7, 2023
From: SILICON VALLEY BANK A DIVISION OF FIRST-CITIZENS BANK & TRUST COMPANY
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 063270/0277 →