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App. No. 09/681,160 · Confirmation No. 7794

METHOD AND APPARATUS TO PLACE WAFERS INTO AND OUT OF MACHINE

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗
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2014-01-30 OATH Oath or Declaration filed 65 View
2013-12-26 OATH Oath or Declaration filed 29 View
2013-12-26 OATH Oath or Declaration filed 42 View
2008-05-30 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2008-05-30 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2008-05-21 PA.. Power of Attorney 3 View
2008-05-21 N417 Electronic Filing System Acknowledgment Receipt 2 View
2001-02-02 TRNA Transmittal of New Application 11 View
2001-02-02 ADS Application Data Sheet 3 View
2001-02-02 SPEC Specification 15 View
2001-02-02 CLM Claims 6 View
2001-02-02 ABST Abstract 2 View
2001-02-02 DRW Drawings-only black and white line drawings 6 View
2001-02-02 TRNA Transmittal of New Application 11 View
2001-02-02 ADS Application Data Sheet 3 View
2001-02-02 SPEC Specification 15 View
2001-02-02 CLM Claims 6 View
2001-02-02 ABST Abstract 2 View
2001-02-02 DRW Drawings-only black and white line drawings 6 View
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Quick Facts
App. No.
09/681,160
Filed
2001-02-02
Granted
2002-06-04
Art Unit
3723
PTA
-65 days