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App. No. 09/921,893 · Confirmation No. 8807

METHOD OF CHEMICALLY GROWING A THIN FILM IN A GAS PHASE ON A SILICON SEMICONDUCTOR SUBSTRATE

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
⬇ PDF
 Code Description Pages PDF
2001-08-06 TRNA Transmittal of New Application 2 View
2001-08-06 A.PE Preliminary Amendment 3 View
2001-08-06 SPEC Specification 16 View
2001-08-06 CLM Claims 1 View
2001-08-06 ABST Abstract 1 View
2001-08-06 DRW Drawings-only black and white line drawings 2 View
2001-08-06 OATH Oath or Declaration filed 2 View
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Quick Facts
App. No.
09/921,893
Filed
2001-08-06
Granted
2003-03-25
Pub. No.
US20020045009A1
Examiner
PHAM, LONG
Art Unit
2897
PTA
0 days