EMBEDDED ATTENUATED PHASE SHIFT MASK AND METHOD OF MAKING EMBEDDED ATTENUATED PHASE SHIFT MASK

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⬇ PDF	Date ▼	Code	Description	Pages	PDF
	2022-06-28	OATH	Oath or Declaration filed	18	View
	2021-11-23	OATH	Oath or Declaration filed	15	View
	2021-11-23	OATH	Oath or Declaration filed	15	View
	2020-05-15	OATH	Oath or Declaration filed	14	View
	2020-05-15	OATH	Oath or Declaration filed	14	View
	2016-09-13	OATH	Oath or Declaration filed	13	View
	2015-07-30	OATH	Oath or Declaration filed	9	View
	2015-04-28	OATH	Oath or Declaration filed	9	View
	2013-06-12	N570	Communication - Re: Power of Attorney (PTOL-308)	1	View
	2013-06-12	N570	Communication - Re: Power of Attorney (PTOL-308)	1	View
	2013-04-29	PA..	Power of Attorney	1	View
	2013-04-29	R3.73	Assignee showing of ownership per 37 CFR 3.73	1	View
	2013-04-29	N417	Electronic Filing System Acknowledgment Receipt	2	View
	2013-04-03	PET.AUTO	ePetition Request Form	3	View
	2013-04-03	WFEE	Fee Worksheet (SB06)	2	View
	2013-04-03	PET.DEC.AUTO	ePetition Grant Letter	1	View
	2013-04-03	N417	Electronic Filing System Acknowledgment Receipt	2	View
	2001-11-30	TRNA	Transmittal of New Application	2	View
	2001-11-30	ADS	Application Data Sheet	4	View
	2001-11-30	SPEC	Specification	14	View
	2001-11-30	CLM	Claims	6	View
	2001-11-30	ABST	Abstract	1	View
	2001-11-30	DRW	Drawings-only black and white line drawings	5	View
	2001-11-30	OATH	Oath or Declaration filed	4	View

Parent Claims priority from a provisional application

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App. 60/250,351

Filed 2000-12-01 · Provisional Application Expired