IP Library Granted Patent US 6,607,925
Granted Patent Utility
US 6,607,925 · Confirmation No. 4521

HARD MASK REMOVAL PROCESS INCLUDING ISOLATION DIELECTRIC REFILL

Patented Case View Patent ↗
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Code Description Pages PDF
2002-06-06 TRNA Transmittal of New Application 2 View
2002-06-06 SPEC Specification 9 View
2002-06-06 CLM Claims 3 View
2002-06-06 ABST Abstract 1 View
2002-06-06 DRW Drawings-only black and white line drawings 7 View
2002-06-06 OATH Oath or Declaration filed 4 View
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Quick Facts
Patent No.
US 6,607,925
App. No.
10/165,837
Filed
2002-06-06
Granted
2003-08-19
Art Unit
2813
PTA
0 days