IP Library Granted Patent US 6,709,930
Granted Patent Utility
US 6,709,930 · Confirmation No. 1291

THICKER OXIDE FORMATION AT THE TRENCH BOTTOM BY SELECTIVE OXIDE DEPOSITION

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Code Description Pages PDF
2003-12-10 IFEE Issue Fee Payment (PTO-85B) 2 View
2002-06-21 TRNA Transmittal of New Application 1 View
2002-06-21 SPEC Specification 7 View
2002-06-21 CLM Claims 2 View
2002-06-21 ABST Abstract 1 View
2002-06-21 DRW Drawings-only black and white line drawings 6 View
2002-06-21 OATH Oath or Declaration filed 4 View
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Quick Facts
Patent No.
US 6,709,930
App. No.
10/176,570
Filed
2002-06-21
Granted
2004-03-23
Pub. No.
US20030235958A1
Art Unit
2825
PTA
0 days