IP Library Granted Patent US 6,573,993
Granted Patent Utility
US 6,573,993 · Confirmation No. 9245

APPARATUS AND METHOD FOR FEATURE EDGE DETECTION IN SEMICONDUCTOR PROCESSING

Inventor: Joseph R. Little
⬇ PDF
Code Description Pages PDF
2009-02-25 LET. Miscellaneous Incoming Letter 1 View
2009-02-25 N417 Electronic Filing System Acknowledgment Receipt 2 View
2007-05-29 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2002-07-29 TRNA Transmittal of New Application 2 View
2002-07-29 A.PE Preliminary Amendment 2 View
2002-07-29 SPEC Specification 17 View
2002-07-29 CLM Claims 16 View
2002-07-29 ABST Abstract 1 View
2002-07-29 DRW Drawings-only black and white line drawings 11 View
2002-07-29 OATH Oath or Declaration filed 6 View
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Quick Facts
Patent No.
US 6,573,993
App. No.
10/206,042
Filed
2002-07-29
Granted
2003-06-03
Pub. No.
US20020186374A1
Art Unit
2877
PTA
-113 days