IP Library Granted Patent US 6,695,681
Granted Patent Utility Small
US 6,695,681 · Confirmation No. 4330

ENDPOINT DETECTION SYSTEM FOR WAFER POLISHING

Inventor: Stephan H. Wolf
⬇ PDF
Code Description Pages PDF
2003-12-30 IFEE Issue Fee Payment (PTO-85B) 2 View
2002-11-25 TRNA Transmittal of New Application 1 View
2002-11-25 SPEC Specification 14 View
2002-11-25 CLM Claims 12 View
2002-11-25 ABST Abstract 1 View
2002-11-25 DRW Drawings-only black and white line drawings 5 View
2002-11-25 OATH Oath or Declaration filed 5 View
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Quick Facts
Patent No.
US 6,695,681
App. No.
10/303,621
Filed
2002-11-25
Granted
2004-02-24
Pub. No.
US20030109196A1
Art Unit
3723
PTA
0 days