IP Library Granted Patent US 7,951,764
Granted Patent B2
US 7,951,764 · App. 11/720,084 · Granted May 31, 2011

Non-aqueous, non-corrosive microelectronic cleaning compositions

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Quick Facts
Patent No.
US 7,951,764
App. No.
11/720,084
Granted
May 31, 2011
Kind
B2
Abstract

Back end photoresist strippers and cleaning compositions of this invention are provided by amino acid-free, non-aqueous cleaning compositions that are essentially non-corrosive toward copper as well as aluminum and that comprise at least one polar organic solvent, at least one hydroxylated organic amine, and at least one corrosion inhibitor compound with multiple hydroxyl functional groups that is a compound of the formula: T 1 -[(CR 1 R 2 ) m —(CR 3 R 4 ) n ] p —(CR 5 R 6 ) q -T 2 where at least one of R 1 and R 2 OH and if one of R 1 and R 2 is not OH, it is selected from H, alkyl or alkoxy, m is a whole integer of 1 or greater, R 3 and R 4 are selected from H, alkyl or alkoxy, n is 0 or a greater whole positive integer, p is a whole integer of 1 or greater; at least one of R 5 and R 6 is OH and if one of R 5 and R 6 is not OH, it is selected from H, alkyl or alkoxy, q is a whole integer of 1 or greater; T 1 and T 2 are selected from H, alkyl, hydroxyalkyl, polyhydroxyalkyl, aminoalkyl, carbonylalkyl or amide groups or T 1 and T 2 may be connected forming a structure selected from an aliphatic cyclic or fused cyclic structure.

Claims (3)

1. An amino acid-free, non-aqueous cleaning composition for cleaning photoresist and residues from microelectronic substrates, the composition consisting of N-methyl pyrrolidone, dimethyl sulfoxide, monoisopropanolamine and D-sorbitol and wherein the N-methyl pyrrolidone and dimethyl sulfoxide components together consist of from about 60% to about 90% by weight of the composition, the monoisopropanolamine component consists of from about 3% to about 12% by weight of the composition and the D-sorbitol component consists of from about 1% to about 12% by weight of the composition.

2. A process for cleaning photoresist or residue from a microelectronic substrate, the process comprising contacting the substrate with a cleaning composition for a time sufficient to clean the photoresist or residue from the substrate, wherein the cleaning composition comprises a composition of claim 1 .

3. A process according to claim 2 wherein the microelectronic substrate to be cleaned is characterized by the presence of copper metallization.

Assignments (21)
TERMINATION AND RELEASE OF SECURITY INTEREST IN PATENTS Recorded Nov 16, 2020
From: THE BANK OF NEW YORK MELLON TRUST COMPANY, N.A.
To: AVANTOR PERFORMANCE MATERIALS, LLC; NUSIL TECHNOLOGY LLC; APPLIED SILICONE COMPANY LLC; RELIABLE BIOPHARMACEUTICAL, LLC; THERAPAK, LLC
Reel/Frame 054440/0877 →
SECURITY AGREEMENT (NOTES) Recorded Nov 6, 2020
From: AVANTOR FLUID HANDLING, LLC; AVANTOR PERFORMANCE MATERIALS, LLC; NUSIL TECHNOLOGY LLC; RELIABLE BIOPHARMACEUTICAL, LLC; THERAPAK, LLC
To: THE BANK OF NEW YORK MELLON TRUST COMPANY, N.A., AS NOTES COLLATERAL AGENT
Reel/Frame 054343/0414 →
SECURITY AGREEMENT Recorded Nov 29, 2017
From: AVANTOR PERFORMANCE MATERIALS, LLC; NUSIL TECHNOLOGY LLC; APPLIED SILICONE COMPANY LLC; RELIABLE BIOPHARMACEUTICAL, LLC; THERAPAK, LLC
To: THE BANK OF NEW YORK MELLON TRUST COMPANY, N.A., AS NOTES COLLATERAL AGENT
Reel/Frame 044528/0960 →
SECURITY AGREEMENT Recorded Nov 28, 2017
From: AVANTOR PERFORMANCE MATERIALS, LLC; NUSIL TECHNOLOGY LLC; APPLIED SILICONE COMPANY LLC; RELIABLE BIOPHARMACEUTICAL, LLC; THERAPAK, LLC
To: GOLDMAN SACHS BANK USA, AS COLLATERAL AGENT
Reel/Frame 044811/0400 →
RELEASE (REEL 041966 / FRAME 0247) Recorded Nov 27, 2017
From: JEFFERIES FINANCE LLC
To: NUSIL TECHNOLOGY, LLC; APPLIED SILICONE COMPANY LLC; AVANTOR PERFORMANCE MATERIALS, LLC (FORMERLY AVANTOR PERFORMANCE MATERIALS, INC.)
Reel/Frame 044810/0154 →
RELEASE (REEL 041966 / FRAME 0211) Recorded Nov 27, 2017
From: JEFFERIES FINANCE LLC
To: NUSIL TECHNOLOGY, LLC; APPLIED SILICONE COMPANY, LLC; AVANTOR PERFORMANCE MATERIALS, LLC (FORMERLY AVANTOR PERFORMANCE MATERIALS, INC.)
Reel/Frame 044810/0207 →
RELEASE OF SECURITY INTEREST Recorded Mar 10, 2017
From: CREDIT SUISSE AG, CAYMAN ISLANDS BRANCH
To: AVANTOR PERFORMANCE MATERIALS, LLC (FORMERLY KNOWN AS AVANTOR PERFORMANCE MATERIALS, INC.); NUSIL TECHNOLOGY LLC; APPLIED SILICONE COMPANY LLC
Reel/Frame 041966/0313 →
SECURITY INTEREST Recorded Mar 10, 2017
From: NUSIL TECHNOLOGY LLC; APPLIED SILICONE COMPANY LLC; AVANTOR PERFORMANCE MATERIALS, LLC (FORMERLY KNOWN AS AVANTOR PERFORMANCE MATERIALS, INC.)
To: JEFFERIES FINANCE LLC
Reel/Frame 041966/0211 →
SECURITY INTEREST Recorded Mar 10, 2017
From: NUSIL TECHNOLOGY LLC; APPLIED SILICONE COMPANY LLC; AVANTOR PERFORMANCE MATERIALS, LLC (FORMERLY KNOWN AS AVANTOR PERFORMANCE MATERIALS, INC.)
To: JEFFERIES FINANCE LLC
Reel/Frame 041966/0247 →
CHANGE OF NAME Recorded Mar 2, 2017
From: AVANTOR PERFORMANCE MATERIALS, INC.
To: AVANTOR PERFORMANCE MATERIALS, LLC
Reel/Frame 041442/0976 →
MERGER Recorded Oct 3, 2016
From: AVANTOR PERFORMANCE MATERIALS, INC.
To: AVANTOR PERFORMANCE MATERIALS, LLC
Reel/Frame 039924/0311 →
SECURITY INTEREST Recorded Sep 30, 2016
From: NUSIL TECHNOLOGY LLC; APPLIED SILICONE COMPANY LLC; AVANTOR PERFORMANCE MATERIALS, LLC (FORMERLY KNOWN AS AVANTOR PERFORMANCE MATERIALS, INC.)
To: CREDIT SUISSE AG, CAYMAN ISLANDS BRANCH
Reel/Frame 040192/0613 →
RELEASE OF SECURITY INTEREST Recorded Sep 30, 2016
From: CREDIT SUISSE AG, CAYMAN ISLANDS BRANCH
To: AVANTOR PERFORMANCE MATERIALS, LLC (FORMERLY KNOWN AS AVANTOR PERFORMANCE MATERIALS, INC.)
Reel/Frame 039915/0035 →
SECURITY INTEREST Recorded Jun 21, 2016
From: AVANTOR PERFORMANCE MATERIALS, INC.
To: CREDIT SUISSE, AG, CAYMAN ISLANDS BRANCH
Reel/Frame 038976/0610 →
RELEASE OF SECURITY INTEREST Recorded Jun 21, 2016
From: CREDIT SUISSE, AG, CAYMAN ISLANDS BRANCH
To: AVANTOR PERFORMANCE MATERIALS, INC.
Reel/Frame 038975/0807 →
SECURITY INTEREST Recorded Jun 21, 2016
From: AVANTOR PERFORMANCE MATERIALS, INC.
To: CREDIT SUISSE, AG, CAYMAN ISLANDS BRANCH
Reel/Frame 038976/0478 →
RELEASE OF SECURITY INTEREST Recorded Jun 21, 2016
From: CREDIT SUISSE, AG, CAYMAN ISLANDS BRANCH
To: AVANTOR PERFORMANCE MATERIALS, INC.
Reel/Frame 039111/0908 →
PATENT SECURITY AGREEMENT Recorded Jun 24, 2011
From: AVANTOR PERFORMANCE MATERIALS, INC.
To: CREDIT SUISSE AG, CAYMAN ISLANDS BRANCH
Reel/Frame 026499/0256 →
CHANGE OF NAME Recorded Nov 1, 2010
From: MALLINCKRODT BAKER, INC.
To: AVANTOR PERFORMANCE MATERIALS, INC.
Reel/Frame 025227/0551 →
PATENT SECURITY AGREEMENT Recorded Oct 8, 2010
From: AVANTOR PERFORMANCE MATERIALS, INC.
To: CREDIT SUISSE AG, CAYMAN ISLAND BRANCH
Reel/Frame 025114/0208 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 24, 2007
From: INAOKA, SEIJI
To: MALLINCKRODT BAKER, INC.
Reel/Frame 019337/0139 →