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Patent Application Utility PCT National Stage
App. No. 11/995,490 · Confirmation No. 8205

Method and Apparatus for Producing Controlled Stresses and Stress Gradients in Sputtered Films

Abandoned -- Failure to Respond to an Office Action View Publication ↗
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2008-01-11 FRPR Certified Copy of Foreign Priority Application 43 View
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Quick Facts
App. No.
11/995,490
Filed
2008-12-05
Effective Filing
2008-01-11
Pub. No.
US20090090617A1
Art Unit
1756