Method for evaluating efficacy of prevention maintenance for a tool
View Patent ↗A method for evaluating efficacy of prevention maintenance for a tool includes the steps of: choosing a tool which has been maintained preventively and choosing a productive parameter of the tool; collecting values of the productive parameter generated from the tool during a time range for building a varying curve of the productive parameter versus time, modifying the varying curve with a moving average method; transforming the varying curve into a Cumulative Sum chart; and judging whether the values of the productive parameter generated from the tool after the prevention maintenance are more stable, compared with the values of the productive parameter generated from the tool before the prevention maintenance, according to the Cumulative Sum chart. Thereby, if the varying of the values of the productive parameter after the prevention maintenance isn't stable, then the efficacy of this prevention maintenance for the tool is judged not good.
1. A method for evaluating efficacy of prevention maintenance for a tool, comprising the steps of:
(a). choosing a tool which has been maintained preventively and choosing a productive parameter of the tool;
(b). collecting values of the productive parameter generated from the tool during a time range for building a varying curve of the productive parameter versus time, wherein a starting point of the time range is a first predetermined number of days before the prevention maintenance for the tool and an ending point of the time range is a second predetermined number of days after the prevention maintenance for the tool;
(c). modifying the varying curve of the productive parameter versus time with a moving average method;
(d). transforming the varying curve of the productive parameter versus time into a Cumulative Sum chart; and
(e). judging whether the values of the productive parameter generated from the tool after the prevention maintenance are more stable, compared with the values of the productive parameter generated from the tool before the prevention maintenance, according to the Cumulative Sum chart.
2. The method as claimed in claim 1 , wherein the first predetermined number of days is equal to the second predetermined number of days.
3. The method as claimed in claim 2 , wherein the first predetermined number of days and the second predetermined number of days are defined as three days.
4. The method as claimed in claim 1 , wherein after the step (b), there further are the steps of:
computing an average value of the values of the productive parameter before the prevention maintenance for the tool on the first predetermined number of days;
computing an average value of the values of the productive parameter after the prevention maintenance for the tool on the second predetermined number of days; and
judging whether a difference between the two average values is greater than or equal to a gap threshold.
5. The method as claimed in claim 4 , wherein after the step (b), there further are the steps of:
computing a total number of the values of the productive parameter generated from the tool during the time range; and
judging whether the total number of the values of the productive parameter is greater than or equal to a count threshold.
6. The method as claimed in claim 1 , wherein after the step (b), there further are the steps of:
computing a total number of the values of the productive parameter generated from the tool during the time range; and
judging whether the total number of the values of the productive parameter is greater than or equal to a count threshold.
7. The method as claimed in claim 6 , wherein after the step (b), there further are the steps of:
computing an average value of the values of the productive parameter before the prevention maintenance for the tool on the first predetermined number of days;
computing an average value of the values of the productive parameter after the prevention maintenance for the tool on the second predetermined number of days; and
judging whether a difference between the two average values is greater than or equal to a gap threshold.
8. The method as claimed in claim 1 , wherein the tool is a tool for processing wafers.
9. The method as claimed in claim 8 , wherein the tool is a lithograph tool.
10. The method as claimed in claim 9 , wherein the productive parameter is a horizontal offset value.
11. The method as claimed in claim 9 , wherein the productive parameter is a vertical offset value.
12. A program product for performing the method for evaluating efficacy of prevention maintenance for a tool as claimed in claim 1 , comprising: a plurality of program codes.
13. The program product as claimed in claim 12 , being stored in a storage medium of an electronic product, wherein when the program product is loaded in a processor of the electronic product, the program product executes the method for evaluating efficacy of prevention maintenance.