Integrated circuit packaging system with package-on-package stacking and method of manufacture thereof
View Patent ↗A method of manufacture of an integrated circuit packaging system including: forming a top package including: providing a through silicon via interposer having a through silicon via; coupling a stacked integrated circuit die to the through silicon via, and testing a top package; forming a base package including: providing a substrate, coupling a base integrated circuit die to the substrate, and testing a base package; and coupling a stacked interconnect between the top package and the base package.
1. A method of manufacture of an integrated circuit packaging system comprising:
forming a top package including:
providing a through silicon via interposer having a through silicon via,
coupling a stacked integrated circuit die to the through silicon via, and
forming a top package body on the stacked integrated circuit die and the through silicon via interposer with a back side of the through silicon via interposer exposed from the top package body;
attaching a stacked interconnect directly on and between the through silicon via and a substrate; and
forming a base package including:
coupling a base integrated circuit die to the substrate, and
forming a molded base package body encapsulating the stacked interconnect, a top portion of the stacked interconnect exposed and protruding from the molded base package body.
2. The method as claimed in claim 1 wherein forming the top package body includes molding an epoxy molding compound on the stacked integrated circuit die and the through silicon via interposer.
3. The method as claimed in claim 1 further comprising:
forming a stacked integrated package containing the stacked integrated circuit die; and
coupling an electrical interconnect between the stacked integrated package and the through silicon via interposer.
4. The method as claimed in claim 1 wherein forming the top package includes:
coupling an additional through silicon via interposer to the through silicon via interposer by an interposer interconnect.
5. The method as claimed in claim 1 wherein coupling the stacked interconnect between the top package and the base package includes forming an electrical connection among the stacked integrated circuit die, the through silicon via interposer, the base integrated circuit die, or a combination thereof.
6. A method of manufacture of an integrated circuit packaging system comprising:
forming a top package including:
providing a through silicon via interposer having a through silicon via including providing integrated circuits on the through silicon via interposer,
coupling a stacked integrated circuit die to the through silicon via, and
forming a top package body on the stacked integrated circuit die and the through silicon via interposer with a back side of the through silicon via interposer exposed from the top package body;
attaching a stacked interconnect directly on and between the through silicon via and a substrate; and
forming a base package including:
coupling a base integrated circuit die to a component side of the substrate including coupling a contact on the component side to the base integrated circuit die, and
forming a molded base package body encapsulating the stacked interconnect, a top portion of the stacked interconnect exposed and protruding from the molded base package body.
7. The method as claimed in claim 6 wherein forming the molded base package body includes forming the molded base package body on the base integrated circuit die and the substrate.
8. The method as claimed in claim 6 further comprising:
forming a stacked integrated package containing the stacked integrated circuit die including molding an integrated package body enclosing the stacked integrated circuit die; and
coupling an electrical interconnect between the stacked integrated package and the through silicon via interposer.
9. The method as claimed in claim 6 wherein forming the top package includes:
coupling an additional through silicon via interposer to the through silicon via interposer by an interposer interconnect including forming a through silicon via interposer stack; and
forming a molding compound on the through silicon via interposer, the additional through silicon via interposer, and the interposer interconnect including leaving a back side of the through silicon via interposer exposed.
10. The method as claimed in claim 6 wherein coupling the stacked interconnect between the top package and the base package includes forming an electrical connection among the stacked integrated circuit die, the through silicon via interposer, the base integrated circuit die, a system interconnect or a combination thereof.
11. An integrated circuit packaging system comprising:
a top package including:
a through silicon via interposer having a through silicon via,
a stacked integrated circuit die coupled to the through silicon via, and
a top package body on the stacked integrated circuit die and the through silicon via interposer with a back side of the through silicon via interposer exposed from the top package body;
a stacked interconnect attached directly on and between the through silicon via and a substrate; and
a base package including:
a base integrated circuit die coupled to the substrate, and
a molded base package body encapsulating the stacked interconnect, a top portion of the stacked interconnect exposed and protruding from the molded base package body.
12. The system as claimed in claim 11 wherein the top package body includes an epoxy molding compound molded on the stacked integrated circuit die and the through silicon via interposer.
13. The system as claimed in claim 11 further comprising:
a stacked integrated package contains the stacked integrated circuit die; and
an electrical interconnect between the stacked integrated package and the through silicon via interposer.
14. The system as claimed in claim 11 wherein the top package includes:
an additional through silicon via interposer coupled to the through silicon via interposer by an interposer interconnect.
15. The system as claimed in claim 11 wherein the stacked interconnect between the top package and the base package includes an electrical connection among the stacked integrated circuit die, the through silicon via interposer, the base integrated circuit die, or a combination thereof.
16. The system as claimed in claim 11 further comprising:
an integrated circuit on an active side of the through silicon via interposer;
a contact on a component side of the substrate coupled to the base integrated circuit die; and
solder balls, solder columns, or stud bumps coupled between the through silicon via and the contact on the component side.
17. The system as claimed in claim 16 wherein the molded base package body is on the base integrated circuit die and the substrate.
18. The system as claimed in claim 16 further comprising:
a stacked integrated package contains the stacked integrated circuit die includes the stacked integrated circuit die enclosed by an integrated package body; and
an electrical interconnect between the stacked integrated package and the through silicon via interposer.
19. The system as claimed in claim 16 wherein the top package includes:
an additional through silicon via interposer coupled to the through silicon via interposer by an interposer interconnect includes a through silicon via interposer stack formed; and
a molding compound on the through silicon via interposer, the additional through silicon via interposer, and the interposer interconnect includes a back side of the through silicon via interposer exposed.
20. The system as claimed in claim 16 wherein the stacked interconnect between the top package and the base package includes an electrical connection among the stacked integrated circuit die, the through silicon via interposer, the base integrated circuit die, a system interconnect or a combination thereof.