Semiconductor device and method of forming B-stage conductive polymer over contact pads of semiconductor die in Fo-WLCSP
View Patent ↗A semiconductor wafer contains a plurality of semiconductor die with bumps formed over contact pads on an active surface of the semiconductor die. A b-stage conductive polymer is deposited over the contact pads on the semiconductor wafer. The semiconductor wafer is singulated to separate the die. An insulating layer is formed over a carrier with openings formed in the insulating layer. The die is mounted to the carrier with the conductive polymer disposed in the openings of the insulating layer. The conductive polymer is heated to a glass transition temperature to liquefy the conductive polymer to an electrically conductive state. An encapsulant is deposited over the die and insulating layer. The carrier is removed to expose the conductive polymer. An interconnect structure is formed over the die, encapsulant, and conductive polymer. The interconnect structure is electrically connected through the conductive polymer to the contact pads on the die.
1. A method of making a semiconductor device, comprising:
providing a semiconductor wafer having a plurality of semiconductor die with contact pads formed on an active surface of the semiconductor die;
depositing a conductive polymer over the contact pads on the semiconductor wafer;
singulating the semiconductor wafer to separate the semiconductor die;
providing a carrier;
forming a first insulating layer over the carrier;
forming a plurality of openings in the first insulating layer;
mounting the semiconductor die to the carrier with the conductive polymer disposed in the openings of the first insulating layer;
heating the conductive polymer to a glass transition temperature;
depositing an encapsulant over the semiconductor die and first insulating layer;
removing the carrier to expose the conductive polymer; and
forming an interconnect structure over the semiconductor die, encapsulant, and conductive polymer, the interconnect structure being electrically connected through the conductive polymer to the contact pads on the semiconductor die.
2. The method of claim 1 , wherein heating the conductive polymer to the glass transition temperature liquefies the conductive polymer to an electrically conductive state.
3. The method of claim 1 , wherein the conductive polymer includes b-stage material.
4. The method of claim 1 , wherein the first insulating layer provides stress relief between the semiconductor die, encapsulant, and interconnect structure.
5. The method of claim 1 , further including removing the first insulating layer prior to forming the interconnect structure.
6. The method of claim 1 , wherein forming the interconnect structure includes:
forming a second insulating layer over the encapsulant and semiconductor die; and
forming a conductive layer over the second insulating layer.
7. A method of making a semiconductor device, comprising:
providing a semiconductor die;
depositing a conductive polymer over contact pads on the semiconductor die;
providing a carrier;
forming a first insulating layer over the carrier;
forming a plurality of openings in the first insulating layer;
mounting the semiconductor die to the carrier with the conductive polymer disposed in the openings of the first insulating layer;
heating the conductive polymer to a glass transition temperature;
depositing an encapsulant over the semiconductor die and first insulating layer;
removing the carrier to expose the conductive polymer; and
forming an interconnect structure over the semiconductor die, encapsulant, and conductive polymer, the interconnect structure being electrically connected through the conductive polymer to the contact pads on the semiconductor die.
8. The method of claim 7 , further including depositing the conductive polymer over the contact pads on the semiconductor die while in wafer form.
9. The method of claim 7 , wherein heating the conductive polymer to the glass transition temperature liquefies the conductive polymer to an electrically conductive state.
10. The method of claim 7 , wherein the conductive polymer includes b-stage material.
11. The method of claim 7 , wherein the first insulating layer provides stress relief between the semiconductor die, encapsulant, and interconnect structure.
12. The method of claim 7 , further including removing the first insulating layer prior to forming the interconnect structure.
13. The method of claim 7 , wherein forming the interconnect structure includes:
forming a second insulating layer over the encapsulant and semiconductor die; and
forming a conductive layer over the second insulating layer.
14. A method of making a semiconductor device, comprising:
providing a semiconductor die;
depositing a conductive polymer over contact pads on the semiconductor die;
heating the conductive polymer to a glass transition temperature;
depositing an encapsulant over the semiconductor die; and
forming an interconnect structure over the semiconductor die, encapsulant, and conductive polymer, the interconnect structure being electrically connected through the conductive polymer to the contact pads on the semiconductor die.
15. The method of claim 14 , further including:
providing a carrier;
forming an insulating layer over the carrier;
forming a plurality of openings in the insulating layer; and
mounting the semiconductor die to the carrier with the conductive polymer disposed in the openings of the insulating layer prior to heating the conductive polymer to the glass transition temperature.
16. The method of claim 15 , further including removing the insulating layer prior to forming the interconnect structure.
17. The method of claim 15 , wherein the insulating layer provides stress relief between the semiconductor die, encapsulant, and interconnect structure.
18. The method of claim 14 , further including depositing the conductive polymer over the contact pads on the semiconductor die while in wafer form.
19. The method of claim 14 , wherein heating the conductive polymer to the glass transition temperature liquefies the conductive polymer to an electrically conductive state.
20. The method of claim 14 , wherein the conductive polymer includes b-stage material.