Method and apparatus for plasma dicing a semi-conductor wafer
View Patent ↗The present invention provides a method for plasma dicing a substrate. The method comprising providing a process chamber having a wall; providing a plasma source adjacent to the wall of the process chamber; providing a work piece support within the process chamber; placing the substrate onto a support film on a frame to form a work piece work piece; loading the work piece onto the work piece support; providing a cover ring disposed above the work piece; generating a plasma through the plasma source; and etching the work piece through the generated plasma.
1. A method for plasma dicing a substrate, the method comprising:
providing the substrate having a top surface and a bottom surface, the top surface having a plurality of device structures and street areas;
applying photoresist to the plurality of device structures and the street areas on the top surface of the substrate;
patterning the applied photoresist to allow the street areas to be unprotected;
placing the bottom surface of the substrate on a carrier support to form a work piece;
loading the work piece into a plasma processing chamber;
exposing the unprotected street areas on the top surface of the substrate of the work piece in the plasma processing chamber to a first plasma time division multiplex process using a first etchant gas;
terminating the first plasma time division multiplex process at a time at which an interface between the bottom surface of the substrate and the carrier support is reached, said time being determined using an endpoint technique; and
exposing the work piece in the plasma processing chamber to a second plasma time division multiplex process using a second etchant gas, said exposure of the work piece to the second plasma time division multiplexed process occurring after the termination of the first plasma time division multiplex process and without breaking vacuum from the termination of the first plasma time division multiplex process, said second etchant gas having a different gas composition from said first etchant gas.
2. The method according to claim 1 further comprising placing the substrate onto a support film on a frame to form the work piece.
3. The method according to claim 1 wherein the first etchant gas is a halogen containing gas and wherein the second etchant gas is a hydrogen containing gas.
4. A method for plasma dicing a substrate, the method comprising:
providing the substrate having a top surface and a bottom surface, the top surface having a plurality of device structures and street areas, the plurality of device structures having an integrated protective material while the street areas remain unprotected;
placing the bottom surface of the substrate on a carrier support to form a work piece;
loading the work piece into a plasma processing chamber;
exposing the unprotected street areas on the top surface of the substrate of the work piece in the plasma processing chamber to a first plasma time division multiplex process using a first etchant gas;
terminating the first plasma time division multiplex process at a time at which an interface between the bottom surface of the substrate and the carrier support is reached, said time being determined using an endpoint technique; and
exposing the work piece in the plasma processing chamber to a second plasma time division multiplex process using a second etchant gas, said exposure of the work piece to the second plasma time division multiplexed process occurring after the termination of the first plasma time division multiplex process and without breaking vacuum from the termination of the first plasma time division multiplex process, said second etchant gas having a different gas composition from said first etchant gas.
5. A method for plasma dicing a substrate, the method comprising:
providing the substrate having a top surface and a bottom surface, the top surface having a plurality of device structures and street areas, the plurality of device structures having a protective material while the street areas remain unprotected;
placing the bottom surface of the substrate on a carrier support to form a work piece;
loading the work piece into a plasma processing chamber;
exposing the unprotected street areas on the top surface of the substrate of the work piece in the plasma processing chamber to a first plasma time division multiplex process using a first etchant gas;
terminating the first plasma time division multiplex process at a time at which an interface between the bottom surface of the substrate and the carrier support is reached, said time being determined using an endpoint technique; and
exposing the work piece in the plasma processing chamber to a second plasma time division multiplex process using a second etchant gas, said exposure of the work piece to the second plasma time division multiplexed process occurring after the termination of the first plasma time division multiplex process and without breaking vacuum from the termination of the first plasma time division multiplex process, said second etchant gas having a different gas composition from said first etchant gas.