Method and apparatus for plasma dicing a semi-conductor wafer
View Patent ↗The present invention provides a method for plasma dicing a substrate. The method comprising providing a process chamber having a wall; providing a plasma source adjacent to the wall of the process chamber; providing a work piece support within the process chamber; placing the substrate onto a support film on a frame to form a work piece work piece; loading the work piece onto the work piece support; providing a cover ring disposed above the work piece; generating a plasma through the plasma source; and etching the work piece through the generated plasma.
1. A method for plasma dicing a substrate, the method comprising:
providing a process chamber having a wall;
providing a plasma source adjacent to the wall of the process chamber;
providing a work piece support within the process chamber;
providing the substrate having a top surface and a bottom surface, the top surface of the substrate having a plurality of device structures and street areas, the plurality of device structures having a protective material while the street areas remain unprotected, the substrate being mounted on a support film on a frame to form a work piece;
providing an electrostatic chuck within said work piece support;
loading the work piece with the protected plurality of device structures and the unprotected street areas on the top surface of the substrate facing upward onto the work piece support;
generating a plasma through the plasma source;
etching the unprotected street areas on the top surface of the substrate of the work piece through the generated plasma;
providing an RF power source coupled to the work piece support, said RF power source generating an RF frequency to the substrate during the plasma etching step;
varying the RF frequency from 100's of MHz down to a few hundred kHz during the plasma etching step;
electrostatically clamping a portion of the support film that is exposed to the generated plasma during the plasma etching step using said electrostatic chuck;
electrostatically clamping the substrate during the plasma etching step using said electrostatic chuck;
cooling the portion of the support film that is exposed to the generated plasma during the plasma etching step through said electrostatic chuck during the plasma etching step; and
cooling the bottom surface of the substrate through said electrostatic chuck during the plasma etching step.
2. The method according to claim 1 further comprising:
pulsing the RF power at a low frequency as an interface between the substrate and the support film is approached during the plasma etching step.
3. The method according to claim 1 further comprising providing an RF power source coupled to at least one electrode of the electrostatic chuck, said RF power source generating an RF frequency to the substrate during the plasma etching step.
4. The method according to claim 3 further comprising a coupling capacitor.
5. A method for plasma dicing a substrate, the method comprising:
providing a process chamber having a wall;
providing a plasma source adjacent to the wall of the process chamber;
providing a work piece support within the process chamber;
providing the substrate having a top surface and a bottom surface, the top surface of the substrate having a plurality of device structures and street areas, the plurality of device structures having an integrated protective material while the street areas remain unprotected, the substrate; being mounted on a support film on a frame to form a work piece;
providing an electrostatic chuck within said work piece support;
loading the work piece with the protected plurality of device structures and the unprotected street areas on the top surface of the substrate facing upward onto the work piece support;
generating a plasma through the plasma source;
etching the unprotected street areas on the top surface of the substrate of the work piece through the generated plasma;
providing an RF power source coupled to the work piece support, said RF power source generating an RF frequency to the substrate during the plasma etching step;
varying the RF frequency from 100's of MHz down to a few hundred kHz during the plasma etching step;
electrostatically clamping a portion of the support film that is exposed to the generated plasma during the plasma etching step using said electrostatic chuck;
electrostatically clamping the substrate during the plasma etching step using said electrostatic chuck;
cooling the portion of the support film that is exposed to the generated plasma during the plasma etching step through said electrostatic chuck during the plasma etching step; and
cooling the bottom surface of the substrate through said electrostatic chuck during the plasma etching step.
6. The method according to claim 5 further comprising:
pulsing the RF power at a low frequency as an interface between the substrate and the support film is approached during the plasma etching step.
7. The method according to claim 5 further comprising providing an RF power source coupled to at least one electrode of the electrostatic chuck, said RF power source generating an RF frequency to the substrate during the plasma etching step.
8. The method according to claim 7 further comprising a coupling capacitor.
9. A method for plasma dicing a substrate, the method comprising:
providing a process chamber having a wall;
providing a plasma source adjacent to the wall of the process chamber;
providing a work piece support within the process chamber;
providing the substrate having a top surface and a bottom surface, the top surface of the substrate having a plurality of device structures and street areas, the substrate being mounted on a support film on a frame to form a work piece;
providing an electrostatic chuck within said work piece support;
applying photoresist to the plurality of device structures and the street areas on the top surface of the substrate;
patterning the applied photoresist to allow the street areas to be unprotected;
loading the work piece with the protected plurality of device structures and the unprotected street areas on the top surface of the substrate facing upward onto the work piece support;
generating a plasma through the plasma source;
etching the unprotected street areas on the top surface of the substrate of the work piece through the generated plasma;
providing an RF power source coupled to the work piece support, said RF power source generating an RF frequency to the substrate during the plasma etching step;
varying the RF frequency from 100's of MHz down to a few hundred kHz during the plasma etching step;
electrostatically clamping a portion of the support film that is exposed to the generated plasma during the plasma etching step using said electrostatic chuck;
electrostatically clamping the substrate during the plasma etching step using said electrostatic chuck;
cooling the portion of the support film that is exposed to the generated plasma during the plasma etching step through said electrostatic chuck during the plasma etching step; and
cooling the bottom surface of the substrate through said electrostatic chuck during the plasma etching step.
10. The method according to claim 9 further comprising:
pulsing the RF power at a low frequency as an interface between the substrate and the support film is approached during the plasma etching step.
11. The method according to claim 9 further comprising providing an RF power source coupled to at least one electrode of the electrostatic chuck, said RF power source generating an RF frequency to the substrate during the plasma etching step.
12. The method according to claim 11 further comprising a coupling capacitor.