Granted Patent B2

US 8,785,332 · App. 13/764,142 · Granted Jul 22, 2014

Abstract

Claims (12)

1. A method for plasma dicing a substrate, the method comprising:

providing a transfer arm;

providing a process chamber having a wall;

providing a plasma source adjacent to the wall of the process chamber;

providing a work piece support within the process chamber;

providing a lifting mechanism within the work piece support;

placing the substrate onto a support film on a frame to form the work piece, the frame of the work piece having an exposed lower surface, the lifting mechanism only touching a portion of the work piece overlapped by the frame;

loading the work piece onto the transfer arm;

transferring the work piece into the process chamber onto the lifting mechanism using the transfer arm, the transferring of the work piece into the process chamber being performed under vacuum, the transfer arm maintaining the frame coplanar to the substrate during the transferring step, the transfer arm does not contact the substrate;

generating a plasma through the plasma source; and

etching the work piece through the generated plasma.

2. The method according to claim 1 further comprising aligning the work piece in the transfer arm using an alignment fixture.

Assignments (21)