IP Library Granted Patent US 9,508,635
Granted Patent B2
US 9,508,635 · App. 13/929,775 · Granted Nov 29, 2016

Methods of forming conductive jumper traces

Inventors: HanGil Shin (Gyeonggi-do, KR); HeeJo Chi (Kyoungki-do, KR); NamJu Cho (Gyeonggi-do, KR)
Assignee: STATS ChipPAC Pte. Ltd.
H01L23/49838H01L21/4867H01L24/49H05K3/1283H05K3/4685H01L21/561H01L23/49894H01L24/48H01L2224/05553H01L2224/2919H01L2224/32225H01L2224/48229H01L2224/4917H01L2224/49173H01L2224/49176H01L2224/49179H01L2224/73265H01L2924/00014H01L2924/01322H01L2924/12041H01L2924/12042H01L2924/13091H01L2924/181H05K1/092H05K3/125H05K2201/026H05K2201/0323H05K2203/095H05K2203/1194
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Quick Facts
Patent No.
US 9,508,635
App. No.
13/929,775
Granted
Nov 29, 2016
Kind
B2
Abstract

Methods of forming conductive jumper traces for semiconductor devices and packages. Substrate is provided having first, second and third trace lines formed thereon, where the first trace line is between the second and third trace lines. The first trace line can be isolated with a covering layer. A conductive layer can be formed between the second and third trace lines and over the first trace line by a depositing process followed by a heating process to alter the chemical properties of the conductive layer. The resulting conductive layer is able to conform to the covering layer and serve to provide electrical connection between the second and third trace lines.

Claims (60)

1. A method of making a semiconductor device, comprising:

providing a substrate;

disposing a semiconductor die on the substrate;

forming a first conductive trace and second conductive trace on the substrate adjacent to the semiconductor die;

forming a third conductive trace on the substrate between the first conductive trace and second conductive trace;

forming a first insulating layer over the third conductive trace;

forming a first conductive layer over the first insulating layer and electrically connected to the first conductive trace and second conductive trace;

forming a bond wire extending from the semiconductor die to the first conductive trace, wherein the semiconductor die is electrically coupled to the second conductive trace by the bond wire, first conductive trace, and first conductive layer; and

depositing an encapsulant over and around the semiconductor die, bond wire, first conductive trace, second conductive trace, third conductive trace, and first conductive layer.

2. The method of claim 1 , further including forming the first conductive layer by inkjet printing, screen printing, or electro-hydro dynamic dispensing.

3. The method of claim 1 , further including:

forming a second insulating layer over the first conductive layer; and

forming a second conductive layer over the second insulating layer.

4. The method of claim 1 , further including:

forming a first opening in the first insulating layer extending to the first conductive trace;

forming a second opening in the first insulating layer extending to the second conductive trace; and

forming the first conductive layer in the first opening and second opening.

5. The method of claim 1 , further including treating the first insulating layer with a hydrophilic plasma before forming the first conductive layer.

6. A method of making a semiconductor device, comprising:

providing a substrate;

forming a first conductive trace and second conductive trace over the substrate;

forming a bond wire extending to the first conductive trace;

forming a first insulating layer between the first conductive trace and second conductive trace;

forming a first conductive layer over the first insulating layer and coupled between the first conductive trace and second conductive trace; and

depositing an encapsulant contacting the first conductive trace, second conductive trace and first conductive layer.

7. The method of claim 6 , further including:

disposing a semiconductor die over the substrate; and

forming the bond wire extending from the semiconductor die to the first conductive trace.

8. The method of claim 6 , further including forming the first conductive layer by inkjet printing, screen printing, or electro-hydro dynamic dispensing.

9. The method of claim 6 , further including forming the first conductive layer to contact a first end of the first conductive trace and a second end of the second conductive trace.

10. The method of claim 6 , further including:

forming a second insulating layer over the first conductive layer; and

forming a second conductive layer over the second insulating layer.

11. The method of claim 10 , further including:

forming a third conductive trace electrically connected to the second conductive layer; and

forming a fourth conductive trace electrically connected to the second conductive layer.

12. The method of claim 6 , further including treating the first insulating layer with a hydrophilic plasma before forming the first conductive layer.

13. A method of making a semiconductor device, comprising:

providing a substrate;

forming a first conductive trace over the substrate;

forming a bond wire extending to the first conductive trace;

forming a first insulating layer over the first conductive trace opposite the substrate; and

forming a first jumper trace extending to the first conductive trace and directly over the first insulating layer opposite the substrate.

14. The method of claim 13 , further including:

forming a second conductive trace coupled to the first jumper trace; and

forming a third conductive trace between the first conductive trace and second conductive trace.

15. The method of claim 13 , further including forming a second jumper trace over the first jumper trace.

16. The method of claim 13 , further including forming the first jumper trace through an opening in the first insulating layer.

17. The method of claim 13 , further including disposing a semiconductor die over the substrate with the bond wire extending to the semiconductor die.

18. The method of claim 13 , further including forming the first jumper trace by inkjet printing, screen printing, or electro-hydro dynamic dispensing.

19. A method of making a semiconductor device, comprising:

providing a substrate;

forming a conductive trace over the substrate;

forming an insulating layer over the substrate and conductive trace and including a first opening and second opening in the insulating layer;

forming a first jumper trace coupled to the conductive trace through the first opening and extending to the second opening; and

depositing an encapsulant over and around the conductive trace and jumper trace.

20. The method of claim 19 , further including forming a second jumper trace over the first jumper trace.

21. The method of claim 19 , further including disposing a semiconductor die over the substrate.

22. The method of claim 19 , further including treating the insulating layer with a hydrophilic plasma before forming the first jumper trace.

23. The method of claim 19 , further including forming a bond wire extending to the conductive trace.

Assignments (6)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 3, 2025
From: STATS CHIPPAC PTE. LTD.
To: STATS CHIPPAC MANAGEMENT PTE. LTD.
Reel/Frame 072788/0917 →
THIS SUBMISSION IS TO CORRECT A TYPOGRAPHICAL ERROR IN THE COVER SHEET PREVIOUSLY RECORDED ON REEL: 038378 FRAME: 0382 TO CORRECT THE SPELLING OF ASSIGNEE'S NAME FROM "STATS CHIPPAC PTE. LTE." TO "STATS CHIPPAC PTE. LTD." Recorded Sep 6, 2023
From: STATS CHIPPAC LTD.
To: STATS CHIPPAC PTE. LTD.
Reel/Frame 064869/0363 →
RELEASE OF SECURITY INTEREST Recorded Jun 16, 2020
From: CITICORP INTERNATIONAL LIMITED, AS COMMON SECURITY AGENT
To: STATS CHIPPAC, INC.; STATS CHIPPAC PTE. LTD. FORMERLY KNOWN AS STATS CHIPPAC LTD.
Reel/Frame 052963/0546 →
CHANGE OF NAME Recorded Apr 7, 2016
From: STATS CHIPPAC LTD.
To: STATS CHIPPAC PTE. LTE.
Reel/Frame 038378/0382 →
SECURITY INTEREST Recorded Aug 6, 2015
From: STATS CHIPPAC, INC.; STATS CHIPPAC LTD.
To: CITICORP INTERNATIONAL LIMITED, AS COMMON SECURITY AGENT
Reel/Frame 036288/0748 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 28, 2013
From: SHIN, HANGIL; CHI, HEEJO; CHO, NAMJU
To: STATS CHIPPAC, LTD.
Reel/Frame 030709/0984 →
Continuity (1)
Related Publication 20150004748A1 · Jan 1, 2015