Semiconductor device and method of forming discontinuous ESD protection layers between semiconductor die
View Patent ↗A semiconductor wafer has a plurality of semiconductor die separated by a saw street. The wafer is mounted to dicing tape. The wafer is singulated through the saw street to expose side surfaces of the semiconductor die. An ESD protection layer is formed over the semiconductor die and around the exposed side surfaces of the semiconductor die. The ESD protection layer can be a metal layer, encapsulant film, conductive polymer, conductive ink, or insulating layer covered by a metal layer. The ESD protection layer is singulated between the semiconductor die. The semiconductor die covered by the ESD protection layer are mounted to a temporary carrier. An encapsulant is deposited over the ESD protection layer covering the semiconductor die. The carrier is removed. An interconnect structure is formed over the semiconductor die and encapsulant. The ESD protection layer is electrically connected to the interconnect structure to provide an ESD path.
1. A method of making a semiconductor device, comprising:
providing a semiconductor die;
forming an electrostatic discharge (ESD) protection layer over the semiconductor die including a side surface of the semiconductor die;
singulating the ESD protection layer; and
depositing an encapsulant over the ESD protection layer to completely enclose the ESD protection layer on the side surface of the semiconductor die.
2. The method of claim 1 , further including forming an insulating layer over the semiconductor die prior to forming the ESD protection layer.
3. The method of claim 1 , further including forming a conductive via through the encapsulant.
4. The method of claim 1 , further including forming an interconnect structure over the encapsulant and semiconductor die.
5. The method of claim 4 , further including stacking a plurality of the semiconductor devices electrically connected through the interconnect structure.
6. The method of claim 1 , wherein the ESD protection layer includes an encapsulant film, conductive polymer, or conductive ink.
7. A method of making a semiconductor device, comprising:
providing a semiconductor wafer including a first semiconductor die;
forming an electrostatic discharge (ESD) protection layer over the semiconductor wafer; and
depositing an encapsulant around the ESD protection layer.
8. The method of claim 7 , further including forming an insulating layer over the first semiconductor die prior to forming the ESD protection layer.
9. The method of claim 7 , further including singulating the ESD protection layer prior to depositing the encapsulant.
10. The method of claim 7 , further including forming a first interconnect structure over a first surface of the first semiconductor die.
11. The method of claim 10 , further including forming a second interconnect structure over a second surface of the first semiconductor die opposite the first surface.
12. The method of claim 7 , further including disposing a second semiconductor die over the first semiconductor die.
13. The method of claim 7 , further including forming a conductive via through the encapsulant.
14. A semiconductor device, comprising:
a first semiconductor die;
an electrostatic discharge (ESD) protection layer disposed over a first surface of the first semiconductor die and a second surface of the first semiconductor die adjacent to the first surface; and
an encapsulant deposited around the first semiconductor die to enclose the ESD protection layer over the first surface of the first semiconductor die and the second surface of the first semiconductor die.
15. The semiconductor device of claim 14 , further including an interconnect structure formed over the encapsulant and the first semiconductor die.
16. The semiconductor device of claim 15 , wherein the ESD protection layer is electrically connected to the interconnect structure to provide an ESD path.
17. The semiconductor device of claim 14 , wherein the ESD protection layer includes:
an insulating layer formed over the first semiconductor die; and
a conductive layer formed over the insulating layer.
18. The semiconductor device of claim 14 , wherein the ESD protection layer includes an encapsulant film, conductive polymer, or conductive ink.
19. The semiconductor device of claim 14 , further including a second semiconductor die disposed adjacent to or disposed over the first semiconductor die.
20. A semiconductor device, comprising:
a semiconductor die; and
an electrostatic discharge (ESD) protection layer disposed over the semiconductor die, the ESD protection layer terminating at a side surface of the semiconductor die.
21. The semiconductor device of claim 20 , further including an encapsulant formed over the ESD protection layer.
22. The semiconductor device of claim 21 , further including a conductive via formed through the encapsulant.
23. The semiconductor device of claim 21 , further including an interconnect structure formed over the encapsulant and semiconductor die.
24. The semiconductor device of claim 23 wherein the ESD protection layer is electrically connected to the interconnect structure to provide an ESD path.
25. The semiconductor device of claim 20 , wherein the ESD protection layer includes:
an insulating layer formed over the semiconductor die; and
a conductive layer formed over the insulating layer.