Integrated circuit packaging system with embedded component and method of manufacture thereof
View Patent ↗An integrated circuit packaging system, and a method of manufacture of an integrated circuit packaging system thereof, including: an embedding material on a component; a mask layer on the embedding material; a buried pattern in the mask layer, the outer surface of the buried pattern coplanar with the outer surface of the mask layer, the buried pattern electrically connected to the component; a patterned dielectric on a portion of the buried pattern; and an integrated circuit die on the buried pattern.
1. A method of manufacture of an integrated circuit packaging system comprising:
forming an embedding material on a component;
depositing a mask layer on the embedding material;
patterning the mask layer;
depositing a buried pattern in the mask layer, the outer surface of the buried pattern coplanar with the outer surface of the mask layer, the buried pattern electrically connected to the component;
forming a patterned dielectric on a portion of the buried pattern; and
mounting an integrated circuit die on the buried pattern.
2. The method as claimed in claim 1 wherein the embedding material is a pre-impregnated material.
3. The method as claimed in claim 1 wherein:
depositing the buried pattern includes depositing the buried pattern having buried contact pads; and
forming the patterned dielectric includes forming the patterned dielectric leaving the buried contact pads exposed.
4. The method as claimed in claim 1 further comprising forming a conductive pattern on the embedding material, the conductive pattern electrically connected to the component on a side of the component opposite the buried pattern.
5. The method as claimed in claim 1 further comprising forming embedded component vias for electrically connecting the buried pattern to the component.
6. A method of manufacture of an integrated circuit packaging system comprising:
forming an embedding material on a component;
depositing a mask layer on the embedding material;
patterning the mask layer;
depositing a buried pattern having buried contact pads in the mask layer, the outer surface of the buried pattern coplanar with the outer surface of the mask layer;
forming embedded component vias for electrically connecting the buried pattern to the component;
forming a layered conductive pattern on the embedding material, the layered conductive pattern having an inner layer and an outer layer, the layered conductive pattern electrically connected to the component on a side of the component opposite the buried pattern;
forming a patterned dielectric on a portion of the buried pattern and the outer layer of the layered conductive pattern, the buried contact pads exposed through the patterned dielectric; and
mounting an integrated circuit die on the buried contact pads.
7. The method as claimed in claim 6 further comprising forming internal vias for connecting the inner layer and the outer layer of the layered conductive pattern.
8. The method as claimed in claim 6 wherein forming the layered conductive pattern includes forming the layered conductive pattern having the outer layer having outer layer contact pads.
9. The method as claimed in claim 6 wherein forming the embedded component vias includes using laser drilling.
10. The method as claimed in claim 6 wherein forming the patterned dielectric includes depositing and patterning solder resist.
11. An integrated circuit packaging system comprising:
an embedding material on a component;
a mask layer on the embedding material;
a buried pattern in the mask layer, the outer surface of the buried pattern coplanar with the outer surface of the mask layer, the buried pattern electrically connected to the component;
a patterned dielectric on a portion of the buried pattern; and
an integrated circuit die on the buried pattern.
12. The system as claimed in claim 11 wherein the embedding material is a pre-impregnated material.
13. The system as claimed in claim 11 wherein the buried pattern has buried contact pads exposed through the patterned dielectric.
14. The system as claimed in claim 11 further comprising a conductive pattern on the embedding material, the conductive pattern electrically connected to the component on a side of the component opposite the buried pattern.
15. The system as claimed in claim 11 further comprising embedded component vias electrically connecting the buried pattern to the component.
16. The system as claimed in claim 11 further comprising:
a layered conductive pattern on the embedding material, the layered conductive pattern electrically connected to the component on a side of the component opposite the buried pattern;
embedded component vias electrically connecting the buried pattern to the component; and
wherein:
the buried pattern has buried contact pads exposed through the patterned dielectric.
17. The system as claimed in claim 16 further comprising internal vias connecting the inner layer and the outer layer of the layered conductive pattern.
18. The system as claimed in claim 16 wherein the layered conductive pattern has the outer layer having outer layer contact pads.
19. The system as claimed in claim 16 wherein the embedded component vias have a tapered shape.
20. The system as claimed in claim 16 wherein the patterned dielectric is solder resist.