Semiconductor device and method of forming patterned repassivation openings between RDL and UBM to reduce adverse effects of electro-migration
View Patent ↗A semiconductor device has a semiconductor wafer with a first conductive layer formed over a surface of the semiconductor wafer. A first insulating layer is formed over the surface of the semiconductor wafer and first conductive layer. A second conductive layer is formed over the first insulating layer and first conductive layer. A second insulating layer is formed over the first insulating layer and second conductive layer. A plurality of openings is formed in the second insulating layer in a bump formation area of the semiconductor wafer to expose the second conductive layer and reduce adverse effects of electro-migration. The openings are separated by portions of the second insulating layer. A UBM layer is formed over the openings in the second insulating layer in the bump formation area electrically connected to the second conductive layer. A bump is formed over the UBM layer.
1. A method of making a semiconductor device, comprising:
providing a semiconductor die;
forming a first conductive layer over the semiconductor die;
forming an insulating layer over the first conductive layer;
forming a first opening and a second opening in the insulating layer over the first conductive layer; and
forming a first bump over the first and second openings in the insulating layer.
2. The method of claim 1 , further including forming the first bump over an interconnect site of the first conductive layer, wherein an interconnect site is an area of the first conductive layer directly below the first and second openings, wherein further the first and second openings occupy 60 percent or less of the interconnect site.
3. The method of claim 1 , further including:
forming a contact pad over the semiconductor die; and
forming the first conductive layer over the contact pad.
4. The method of claim 1 , further including:
forming a second conductive layer over the first and second openings in the insulating layer; and
forming the first bump over the second conductive layer.
5. The method of claim 1 , wherein the first and second openings in the insulating layer are separated by a continuous portion of the insulating layer.
6. The method of claim 1 , wherein the first and second openings in the insulating layer reduce electro-migration under the first bump.
7. A method of making a semiconductor device, comprising:
providing a semiconductor die;
forming an insulating layer over the semiconductor die;
forming a first opening and a second opening in the insulating layer; and
forming an interconnect structure over the first and second openings in the insulating layer.
8. The method of claim 7 , wherein the interconnect structure is a bump.
9. The method of claim 7 , further including:
forming a conductive layer including an interconnect site over the semiconductor die, wherein the interconnect site is an area of the conductive layer directly below the first and second openings; and
forming the insulating layer over the conductive layer.
10. The method of claim 9 , further including forming the first and second openings in the insulating layer over the interconnect site, wherein the first and second openings over the interconnect site expose less than an entire area of the interconnect site.
11. The method of claim 9 , further including forming the first and second openings in the insulating layer over the interconnect site, wherein the first and second openings over the interconnect site occupy about 60 percent of the interconnect site.
12. The method of claim 7 , wherein the first and second openings are separated by a continuous portion of the insulating layer.
13. The method of claim 7 , wherein the first and second openings in the insulating layer reduce adverse effects of electro-migration.
14. A semiconductor device, comprising:
a semiconductor die;
a first conductive layer including an interconnect site formed over the semiconductor die;
an insulating layer including a first opening and a second opening formed over the interconnect site of the first conductive layer; and
an interconnect structure formed directly over the first and second openings and directly over the interconnect site, wherein the interconnect site is an area of the first conductive layer directly below the first and second openings.
15. The semiconductor device of claim 14 , wherein the first and second openings expose less than an entire area of the interconnect site.
16. The semiconductor device of claim 14 , wherein a portion of the insulating layer is disposed over a central region of the interconnect site.
17. The semiconductor device of claim 14 , further including a second conductive layer formed over the interconnect site of the first conductive layer.
18. The semiconductor device of claim 14 , wherein the first and second openings are separated by a portion of the insulating layer.
19. The semiconductor device of claim 17 , further including the interconnect structure formed over the second conductive layer.
20. The semiconductor device of claim 14 , wherein the interconnect structure includes a bump.
21. A semiconductor device, comprising:
a substrate;
a first conductive layer formed over the substrate;
an insulating layer including a plurality of openings formed over the first conductive layer; and
a discrete interconnect structure formed over and on top of the plurality of openings.
22. The semiconductor device of claim 21 , further including the discrete interconnect structure formed over an interconnect site of the first conductive layer, wherein the openings occupy less than an entire area of the interconnect site, wherein further the interconnect site is an area of the first conductive layer directly below all of the plurality openings.
23. The semiconductor device of claim 21 , further including a second conductive layer formed over the openings.
24. The semiconductor device of claim 21 , wherein the substrate includes a semiconductor die or a semiconductor wafer.
25. The semiconductor device of claim 21 , further including at least two openings formed in the insulating layer, the at least two openings separated by a portion of the insulating layer.