Semiconductor device and method of manufacturing
Even when a stiffener is omitted, the semiconductor device which can prevent the generation of twist and distortion of a wiring substrate is obtained. As for a semiconductor device which has a wiring substrate, a semiconductor chip by which the flip chip bond was made to the wiring substrate, and a heat spreader adhered to the back surface of the semiconductor chip, and which omitted the stiffener for reinforcing a wiring substrate and maintaining the surface smoothness of a heat spreader, a wiring substrate has a plurality of insulating substrates in which a through hole whose diameter differs, respectively was formed, and each insulating substrate contains a glass cloth.
1. A method of manufacturing a semiconductor device, comprising:
(a) providing a semiconductor chip having a main surface over which a plurality of pad electrodes are formed,
wherein a plurality of metal bumps are formed on the plurality of pad electrodes, respectively;
(b) positioning the semiconductor over a first main surface of a wiring substrate such that the main surface of the semiconductor chip faces the first main surface of the wiring substrate, and contacting the plurality of metal bumps of the semiconductor chip to a plurality of solders of the wiring substrate without using a flux, respectively and scrubbing the plurality of metal bumps of the semiconductor chip and the plurality of solders of the wiring substrate with each other;
(c) after the step (b), supplying O2 plasma to the semiconductor chip and the wiring substrate; and
(d) after the step (c), injecting under-filling resin between the main surface of the semiconductor chip and the first main surface of the wiring substrate.
2. The method of manufacturing a semiconductor device according to claim 1 ,
wherein an organic resin film is formed over the main surface of the semiconductor chip and first main surface of the wiring substrate.
3. The method of manufacturing a semiconductor device according to claim 1 ,
wherein, in the step (b), the semiconductor chip is heated with a first temperature which is higher than a solder melting point, before scrubbing the plurality of metal bumps of the semiconductor chip and the plurality of solders of the wiring substrate with each other.