Semiconductor device and method of forming conductive layer over substrate with vents to channel bump material and reduce interconnect voids
View Patent ↗A semiconductor device has a semiconductor die with a plurality of bumps formed over a surface of the semiconductor die. A first conductive layer having first and second segments is formed over a surface of the substrate with a first vent separating an end of the first segment and the second segment and a second vent separating an end of the second segment and the first segment. A second conductive layer is formed over the surface of the substrate to electrically connect the first segment and second segment. The thickness of the second conductive layer can be less than a thickness of the first conductive layer to form the first vent and second vent. The semiconductor die is mounted to the substrate with the bumps aligned to the first segment and second segment. Bump material from reflow of the bumps is channeled into the first vent and second vent.
1. A method of making a semiconductor device, comprising:
providing a substrate;
forming a conductive layer on the substrate with the conductive layer including a first segment and a second segment extending along the first segment with a bridge between the first segment and second segment, wherein the first segment terminates within a length of the second segment and the second segment terminates with a length of the first segment and the bridge forms a first vent between the first segment and second segment and a second vent between the first segment and second segment; and
disposing an interconnect structure over the first segment, second segment, and bridge.
2. The method of claim 1 , wherein a portion of the interconnect structure is disposed in the first vent and second vent.
3. The method of claim 1 , wherein a thickness of the bridge is less than a thickness of the first segment of the conductive layer.
4. The method of claim 1 , further including:
forming a patterning layer over the substrate; and
forming an opening in the patterning layer over the first segment and second segment of the conductive layer.
5. The method of claim 4 , wherein the patterning layer covers a portion of the first segment or second segment of the conductive layer.
6. A method of making a semiconductor device, comprising:
providing a substrate;
forming a conductive layer on the substrate with the conductive layer including a first conductive trace and a second conductive trace extending along the first conductive trace, wherein the first conductive trace terminates within a length of the second conductive trace to form a first vent and the second conductive trace terminates within a length of the first conductive trace to form a second vent; and
forming a conductive bridge on the substrate between the first conductive trace and second conductive trace of the conductive layer.
7. The method of claim 6 , further including:
providing a semiconductor die including an interconnect structure formed over a surface of the semiconductor die; and
disposing the semiconductor die over the conductive layer with the interconnect structure disposed over the first conductive trace and second conductive trace of the conductive layer.
8. The method of claim 7 , wherein a portion of the interconnect structure is disposed in the first vent and second vent.
9. The method of claim 6 , wherein a thickness of the conductive bridge is less than a thickness of the conductive layer.
10. The method of claim 6 , further including forming a patterning layer over the substrate and including an opening over the first conductive trace and second conductive trace of the conductive layer.
11. The method of claim 10 , wherein the patterning layer covers a portion of the first conductive trace or second conductive trace of the conductive layer.
12. A method of making a semiconductor device, comprising:
providing a conductive layer including a first segment and a second segment extending along the first segment, wherein the first segment terminates within a length of the second segment to form a first vent and the second segment terminates within a length of the first segment to form a second vent; and
forming a conductive bridge between the first segment and second segment on the conductive layer; and
disposing an interconnect structure over the first segment and second segment.
13. The method of claim 12 , wherein a portion of the interconnect structure is disposed in the first vent and second vent.
14. The method of claim 12 , wherein a thickness of the conductive bridge is less than a thickness of the first segment.
15. The method of claim 12 , wherein the interconnect structure includes a fusible portion and non-fusible portion.
16. The method of claim 12 , further including:
forming an insulating layer over the conductive layer; and
forming an opening in the insulating layer over the first and second segments of the conductive layer.
17. The method of claim 12 , wherein the first vent extends from the conductive bridge to an end of the first segment.
18. A method of making a semiconductor device, comprising:
providing a substrate; and
forming a conductive layer over the substrate with the conductive layer including a first segment, second segment, and conductive bridge connecting the first segment and second segment, wherein the first segment terminates within a length of the second segment and the second segment terminates with a length of the first segment and the conductive bridge forms a first vent between the first segment and second segment and a second vent between the first segment and second segment.
19. The method of claim 18 , wherein a thickness of the conductive bridge is less than a thickness of the first and second segments.
20. The method of claim 18 , further including disposing an interconnect structure over the conductive layer with a portion of the interconnect structure disposed between the first and second segments.
21. The method of claim 18 , further including:
forming a patterning layer over the substrate; and
forming an opening in the patterning layer over the conductive layer.