Semiconductor device utilizing an adhesive to attach an upper package to a lower die
An electronic device and a method of making an electronic device. As non-limiting examples, various aspects of this disclosure provide various methods of manufacturing electronic devices, and electronic devices manufactured thereby, that comprise utilizing an adhesive layer to attach an upper electronic package to a lower die and/or utilizing metal pillars for electrically connecting the upper electronic package to a lower substrate, wherein the metal pillars have a smaller height above the lower substrate than the lower die.
1. An electronic device comprising:
a substrate comprising a top substrate side, a bottom substrate side, and lateral substrate sides between the top and bottom substrate sides;
a semiconductor die comprising a top die side, a bottom die side, and lateral die sides between the top and bottom die sides, wherein the bottom die side is coupled to the top substrate side;
a first conductive interconnection structure between the semiconductor die and the substrate and electrically connecting the semiconductor die to the substrate;
an adhesive layer comprising a top adhesive layer side, a bottom adhesive layer side, and lateral adhesive layer sides between the top and bottom adhesive layer sides, wherein the bottom adhesive layer side is adhered to the top die side;
an upper semiconductor package comprising a top upper package side, a bottom upper package side, and lateral upper package sides between the top and bottom upper package sides, wherein the bottom upper package side is adhered to the top adhesive layer side, and wherein the upper semiconductor package comprises:
an upper package substrate; and
an upper package semiconductor die coupled to a top side of the upper package substrate;
a first encapsulating material that covers at least the top substrate side, the lateral upper package sides, lateral sides of the upper package substrate, a bottom side of the upper package substrate, the lateral die sides, and the lateral adhesive sides, wherein a top surface of the first encapsulating material is higher than a top side of the upper package semiconductor die; and
an upper package encapsulating material that covers a top side of the upper package semiconductor die.
2. The electronic device of claim 1 , wherein the adhesive layer covers the entire top die side.
3. The electronic device of claim 2 , wherein the first encapsulating material covers the lateral adhesive layer sides, and covers a portion of the bottom adhesive layer side.
4. The electronic device of claim 3 , wherein the portion of the bottom adhesive layer side covered by the first encapsulating material comprises a peripheral ring of the bottom adhesive layer side around the top die side.
5. The electronic device of claim 1 , comprising an underfill layer between the semiconductor die and the substrate, and wherein lateral sides of the underfill are covered by the first encapsulating material.
6. The electronic device of claim 5 , wherein the adhesive layer is less than half as thick as the underfill layer.
7. The electronic device of claim 1 , wherein the upper package encapsulating material comprises a top surface that is coplanar with the top surface of the first encapsulating material.
8. The electronic device of claim 7 , wherein the top surface of the first encapsulating material and the top surface of the upper package encapsulating material are top surfaces of the electronic device.
9. The electronic device of claim 1 , comprising:
a metal pillar on the top substrate side; and
a conductive bump on the metal pillar,
wherein the metal pillar and the conductive bump electrically connect the upper semiconductor package to the substrate, and
wherein the first encapsulating material directly contacts and surrounds a lateral surface of the metal pillar and a lateral surface of the conductive bump.
10. The electronic device of claim 9 , wherein:
the substrate comprises an interconnect pad at the top substrate side; and
at least a portion of the metal pillar is plated on the interconnect pad.
11. The electronic device of claim 9 , wherein:
a top side of the metal pillar, relative to the top substrate side, is lower than the top die side; and
the top side of the metal pillar, relative to the top substrate side, is higher than the bottom die side.
12. An electronic device comprising:
a substrate comprising a top substrate side, a bottom substrate side, and lateral substrate sides between the top and bottom substrate sides;
a semiconductor die comprising a top die side, a bottom die side, and lateral die sides between the top and bottom die sides, wherein the bottom die side is coupled to the top substrate side;
a first conductive interconnection structure between the semiconductor die and the substrate and electrically connecting the semiconductor die to the substrate;
an adhesive layer comprising a top adhesive layer side, a bottom adhesive layer side, and lateral adhesive layer sides between the top and bottom adhesive layer sides, wherein the bottom adhesive layer side is adhered to the top die side;
an upper semiconductor package comprising a top upper package side, a bottom upper package side, and lateral upper package sides between the top and bottom upper package sides, wherein the bottom upper package side is adhered to the top adhesive layer side; and
a first encapsulating material of a single continuous material that covers the top substrate side, the lateral die sides, and the lateral adhesive layer sides,
wherein the first encapsulating material covers a portion of the bottom adhesive layer side,
and wherein the first encapsulating material comprises a first surface that is coplanar with the top adhesive layer side and at a vertical height above the substrate that is lower than an uppermost surface of the first encapsulating material.
13. The electronic device of claim 12 , wherein the adhesive layer is the only layer of material between the top die side and the bottom upper package side.
14. The electronic device of claim 12 , wherein the portion of the bottom adhesive layer side covered by the first encapsulating material comprises a peripheral ring of the bottom adhesive layer side around the top die side.
15. The electronic device of claim 12 , wherein the uppermost surface of the first encapsulating material is at least as high as the top upper package side.
16. The electronic device of claim 12 , comprising:
an upper package conductive bump extending downward from the bottom upper package side; and
a conductive pillar on the top substrate side and that is directly connected to the upper package conductive bump, wherein the conductive pillar comprises a column-shaped continuous metal layer that comprises:
a top column side that is no higher than the top adhesive layer side;
a bottom column side that is at least as low, relative to the top substrate side, as the bottom die side; and
a lateral column side that extends vertically between the top column side and the bottom column side.