Optoelectronic semiconductor body and method for producing an optoelectronic semiconductor body
The invention relates to an optoelectronic semiconductor element ( 100 ) comprising a semiconductor layer sequence ( 1 ) with a first layer ( 10 ) of a first conductivity type, a second layer ( 12 ) of a second conductivity type, and an active layer ( 11 ) which is arranged between the first layer ( 10 ) and the second layer ( 12 ) and which absorbs or emits electromagnetic radiation when operated as intended. The semiconductor element ( 100 ) is equipped with a plurality of injection regions ( 2 ) which are arranged adjacently to one another in a lateral direction, wherein the semiconductor layer sequence ( 1 ) is doped within each injection region ( 2 ) such that the semiconductor layer sequence ( 1 ) has the same conductivity type as the first layer ( 10 ) within the entire injection region ( 2 ). Each injection region ( 2 ) passes at least partly through the active layer ( 11 ) starting from the first layer ( 10 ). Furthermore, each injection region ( 2 ) is laterally surrounded by a continuous path of the active layer ( 11 ), the active layer ( 11 ) being doped less in the path than in the injection region ( 2 ) or oppositely thereto. During the operation of the semiconductor element ( 100 ), charge carriers reach the injection regions ( 2 ) at least partly from the first layer ( 10 ) and are directly injected into the active layer ( 11 ) from there.
1. An optoelectronic semiconductor body, comprising
a semiconductor layer sequence with a first layer of a first conductivity type, a second layer of a second conductivity type and an active layer, which is arranged between the first layer and the second layer and which absorbs or emits electromagnetic radiation when operated as intended,
a plurality of injection regions, which are arranged adjacent to one another in a lateral direction, being superimposed on the grown semiconductor layer sequence, wherein the semiconductor layer sequence is doped within each injection region such that the semiconductor layer sequence has the same conductivity type as the first layer within the entire injection region, wherein
each injection region passes through the active layer at least partly starting from the first layer and each injection region is surrounded laterally by a continuous track of the active layer, in which the active layer is doped less than in the injection region or oppositely thereto,
during operation, charge carriers reach the injection regions at least partly from the first layer and are directly injected into the active layer from there,
wherein within each entire injection region, a doping concentration of at least 10 18 doping atoms per cm 3 is present and wherein the active layer has a quantum well structure with at least one quantum well layer.
2. The optoelectronic semiconductor body according to claim 1 , wherein
the injection regions pass through the active layer completely and project into the second layer at least partly.
3. The optoelectronic semiconductor body according to claim 1 , wherein
the injection regions are superimposed on the grown semiconductor layer sequence in such a way that, on average, positions of the injection regions are uncorrelated to positions of any crystal imperfections in the semiconductor layer sequence.
4. The optoelectronic semiconductor body according to claim 1 , wherein
the probability of finding a lattice dislocation of the semiconductor layer sequence within an injection region is no more than 50%,
the active layer runs continuously in a planar manner within at least 50% of the injection regions.
5. The optoelectronic semiconductor body according to claim 1 , wherein
the doping concentration within the active layer outside the injection regions is at least two orders of magnitude lower than that in the injection regions or is opposite thereto.
6. The optoelectronic semiconductor body according to claim 1 , wherein
the active layer has a quantum well structure with at least one quantum well layer,
between every two adjacent quantum well layers, at least one barrier layer is arranged,
the band gap between valence band and conduction band is smaller in the region of the quantum well layer than in the region of the barrier layer,
the main extension directions of the barrier layer and the quantum well layer run substantially parallel to a main extension direction of the semiconductor layer sequence.
7. The optoelectronic semiconductor body according to claim 1 , wherein
the injection regions taper in a direction away from the first layer,
the injection regions pass through the active layer completely and project into the second layer,
the injection regions project at least 50 nm and no more than 300 nm into the second layer.
8. The optoelectronic semiconductor body according to claim 1 , wherein
the semiconductor layer sequence is based on a nitride compound semiconductor material,
the first layer and the injection regions are p-doped and comprise holes as the first conductivity type.
9. The optoelectronic semiconductor body according to claim 1 , wherein
in a top view of the active layer the injection regions are arranged at lattice points of a regular lattice.
10. The optoelectronic semiconductor body according to claim 1 , wherein
the injection regions each have a diameter of at least 100 nm and no more than 500 nm in a lateral direction within the active layer.
11. The optoelectronic semiconductor body according to claim 1 , wherein
the surface coverage density of the injection regions is between 0.5% and 30% inclusive along the entire active layer.
12. The optoelectronic semiconductor body according to claim 1 , wherein
the injection regions taper in a direction away from the first layer and are formed in a dome shape,
within the injection regions the doping concentration decreases continuously in a lateral direction from the inside to the outside.
13. The optoelectronic semiconductor body according to claim 1 , wherein
the semiconductor layer sequence is applied on a carrier,
the carrier is applied on a side of the semiconductor layer sequence facing away from or towards the first layer,
the semiconductor body is in the form of a surface emitter or volume emitter.
14. The optoelectronic semiconductor body according to claim 1 , wherein the semiconductor layer sequence is an AlInGaN semiconductor layer sequence and the content of indium within each injection region is increased or decreased with respect to the content of indium in the adjacent semiconductor layer sequence.