Display device having transparent conductive film and metal film
It is an object of the present invention to form a pixel electrode and a metal film using one resist mask in manufacturing a stacked structure by forming the metal film over the pixel electrode. A conductive film to be a pixel electrode and a metal film are stacked. A resist pattern having a thick region and a region thinner than the thick region is formed over the metal film using an exposure mask having a semi light-transmitting portion. The pixel electrode, and the metal film formed over part of the pixel electrode to be in contact therewith are formed using the resist pattern. Accordingly, a pixel electrode and a metal film can be formed using one resist mask.
1. A display device comprising:
a gate electrode over a first substrate;
a gate insulating film over the gate electrode;
a semiconductor film over the gate insulating film;
a source electrode over the semiconductor film;
a drain electrode over the semiconductor film;
an interlayer insulating film over the source electrode and the drain electrode;
a transparent conductive film over the interlayer insulating film;
a metal film over the transparent conductive film;
a layer containing liquid crystal over the metal film;
a light-blocking film over the layer containing liquid crystal; and
a second substrate over the light-blocking film,
wherein the transparent conductive film comprises a first region which is in contact with the metal film and a second region which is not in contact with the metal film,
wherein the first region of the transparent conductive film is in contact with an entire region of one of the source electrode and the drain electrode which is exposed in a contact hole provided in the interlayer insulating film,
wherein the second region of the transparent conductive film is a pixel electrode,
wherein the light-blocking film overlaps with the first region of the transparent conductive film, and
wherein an entire outer perimeter of the metal film is receded from and within an outer perimeter of the transparent conductive film when seen from a direction perpendicular to a surface of the first substrate.
2. The display device according to claim 1 ,
wherein an area of the metal film is smaller than an area of the transparent conductive film.
3. The display device according to claim 1 ,
wherein the entire outer perimeter of the metal film is receded from the outer perimeter of the transparent conductive film to expose a top surface portion of the transparent conductive film, and
wherein the exposed top surface portion of the transparent conductive film overlaps with the one of the source electrode and the drain electrode.
4. The display device according to claim 1 , further comprising a transistor,
wherein the transistor comprises the semiconductor film.
5. The display device according to claim 1 ,
wherein the metal film has a stacked structure of a first layer and a second layer,
wherein a side at an end of the first layer and a side at an end of the second layer are each inclined with respect to the first substrate, and
wherein an inclined angle of the side at the end of the first layer and an inclined angle of the side at the end of the second layer are different from each other.
6. A portable phone comprising:
the display device according to claim 1 ;
a speaker;
a microphone; and
a switch.
7. The display device according to claim 1 ,
wherein an entire region of a bottom surface of the metal film is in contact with the transparent conductive film in a bottom of the contact hole.
8. A display device comprising:
a gate electrode over a first substrate;
a gate insulating film over the gate electrode;
a semiconductor film over the gate insulating film;
a source electrode over the semiconductor film;
a drain electrode over the semiconductor film;
an interlayer insulating film over the source electrode and the drain electrode;
a transparent conductive film over the interlayer insulating film;
a metal film over the transparent conductive film;
a layer containing liquid crystal over the metal film;
a light-blocking film over the layer containing liquid crystal; and
a second substrate over the light-blocking film,
wherein the transparent conductive film comprises a first region which is in contact with the metal film and a second region which is not in contact with the metal film,
wherein the first region of the transparent conductive film is in contact with an entire region of one of the source electrode and the drain electrode which is exposed in a contact hole provided in the interlayer insulating film,
wherein the second region of the transparent conductive film is a pixel electrode,
wherein the light-blocking film overlaps with the first region of the transparent conductive film,
wherein the interlayer insulating film comprises an organic resin film,
wherein the second region of the transparent conductive film is provided on a flat surface of the interlayer insulating film, and
wherein an entire outer perimeter of the metal film is receded from and within an outer perimeter of the transparent conductive film when seen from a direction perpendicular to a surface of the first substrate.
9. The display device according to claim 8 ,
wherein an area of the metal film is smaller than an area of the transparent conductive film.
10. The display device according to claim 8 ,
wherein the entire outer perimeter of the metal film is receded from the outer perimeter of the transparent conductive film to expose a top surface portion of the transparent conductive film, and
wherein the exposed top surface portion of the transparent conductive film overlaps with the one of the source electrode and the drain electrode.
11. The display device according to claim 8 , further comprising a transistor,
wherein the transistor comprises the semiconductor film.
12. The display device according to claim 8 ,
wherein the metal film has a stacked structure of a first layer and a second layer,
wherein a side at an end of the first layer and a side at an end of the second layer are each inclined with respect to the first substrate, and
wherein an inclined angle of the side at the end of the first layer and an inclined angle of the side at the end of the second layer are different from each other.
13. A portable phone comprising:
the display device according to claim 8 ;
a speaker;
a microphone; and
a switch.
14. The display device according to claim 8 ,
wherein an entire region of a bottom surface of the metal film is in contact with the transparent conductive film in a bottom of the contact hole.