Advanced copper interconnects with hybrid microstructure

1. An integrated circuit comprising:

a narrow-line bamboo microstructure integrated within a metal layer of a semiconductor device, wherein the narrow-line bamboo microstructure comprises nanowires configured to provide a high reliability resistance circuit and wherein the narrow-line bamboo microstructure has a depth, d1; and

a narrow-line polycrystalline microstructure, wherein the narrow-line polycrystalline microstructure has a higher depth in the metal layer as compared to the narrow-line bamboo microstructure and wherein the narrow-line polycrystalline microstructure has a depth, d2, wherein d1 is less than d2;

wherein the narrow-line polycrystalline microstructure is integrated within the same metal layer as the narrow-line bamboo microstructure; and

wherein the narrow-line bamboo microstructure is dispersed in greater than or equal to 1 layer of the semiconductor device and the narrow-line polycrystalline microstructure is dispersed in greater than or equal to 1 layer of the semiconductor device.

2. The integrated circuit of claim 1 , wherein the narrow-line bamboo microstructure and the narrow-line polycrystalline microstructure comprise copper interconnects.

3. The integrated circuit of claim 1 , wherein the narrow-line bamboo microstructure has high electromagnetic resistance as compared to the narrow-line polycrystalline microstructure.

4. The integrated circuit of claim 1 , wherein the narrow-line polycrystalline microstructure has higher conductivity as compared to the narrow-line bamboo microstructure.

5. The integrated circuit of claim 1 , wherein a difference in aspect ratio between the narrow-line bamboo microstructure and the narrow-line polycrystalline microstructure is greater than 0.5.

6. The integrated circuit of claim 1 , wherein the narrow-line bamboo microstructure comprises nanowires configured to provide a high reliability resistance circuit.

7. The integrated circuit of claim 1 , wherein the narrow-line polycrystalline microstructure comprises nanowires configured to provide a high performance circuit.

8. The integrated circuit of claim 1 , further comprising a dielectric layer comprising a liner material plated with copper.

9. The integrated circuit of claim 8 , wherein the liner material comprises tantalum, titanium, tungsten, cobalt, ruthenium, and their nitrides thereof, or a combination comprising at least one of the foregoing.

10. The integrated circuit of claim 9 , wherein the dielectric layer comprises a low-κ dielectric material.

11. The integrated circuit of claim 10 , wherein the dielectric layer comprises silicon dioxide, silsesquixoane, organosilicates, thermosetting polyarylene ethers, or a combination comprising at least one of the foregoing.

12. The integrated circuit of claim 11 , wherein the dielectric layer comprises silicon dioxide.

13. The integrated circuit of claim 1 , wherein the integrated circuit has reduced electromigration as compared to an integrated circuit without a narrow-line bamboo microstructure and a narrow-line polycrystalline microstructure.

14. The integrated circuit of claim 1 , wherein an electromigration resistance of the narrow-line bamboo microstructure is greater than 0.9 electron Volt of electromigration energy.

15. The integrated circuit of claim 1 , wherein the integrated circuit has a conductivity of less than 4 microOhm-centimeters copper resistivity in the narrow-line bamboo microstructure at a thickness of less than 100 nanometers.

16. The integrated circuit of claim 8 , wherein a substrate is attached to the dielectric layer.

17. The integrated circuit of claim 1 , wherein the substrate comprises a semiconducting material, an insulating material, a conductive material or a combination comprising at least one of the foregoing.

18. The integrated circuit of claim 17 , wherein the substrate comprises Si, SiGe, SiGeC, SiC, Ge alloys, GaAs, InAs, InP and other III/V or II/VI compound semiconductors, or a combination comprising at least one of the foregoing.