Acoustic wave devices with common ceramic substrate
An acoustic wave component is disclosed. The acoustic wave component can include a bulk acoustic wave resonator and a surface acoustic wave device. The bulk acoustic wave resonator can include a first portion of a ceramic substrate, a first piezoelectric layer positioned on the ceramic substrate, and electrodes positioned on opposing sides of the first piezoelectric layer. The surface acoustic wave device can include a second portion of the ceramic substrate, a second piezoelectric layer positioned on the ceramic substrate, and an interdigital transducer electrode on the second piezoelectric layer.
1. An acoustic wave component comprising:
a bulk acoustic wave resonator including a ceramic substrate, a first piezoelectric layer on the ceramic substrate, electrodes on opposing sides of the first piezoelectric layer, and an air cavity between at least a portion of the ceramic substrate and an electrode of the electrodes; and
a surface acoustic wave device disposed in the air cavity, the surface acoustic wave device including a second piezoelectric layer on the ceramic substrate, and an interdigital transducer electrode on the second piezoelectric layer.
2. The acoustic wave component of claim 1 wherein the ceramic substrate is a spinel substrate.
3. The acoustic wave component of claim 1 wherein the bulk acoustic wave resonator includes a frame structure along an edge of an active region of the bulk acoustic wave resonator.
4. The acoustic wave component of claim 1 wherein the bulk acoustic wave resonator includes a passivation layer between the ceramic substrate and an electrode of the electrodes that is closest to the ceramic substrate.
5. The acoustic wave component of claim 1 wherein the bulk acoustic wave resonator is a film bulk acoustic wave resonator.
6. The acoustic wave component of claim 1 wherein the first piezoelectric layer is at least partially positioned above the surface acoustic wave device.
7. The acoustic wave component of claim 1 further comprising a receive filter and a transmit filter coupled to each other at a common node, the receive filter including the surface acoustic wave device and the transmit filter including the bulk acoustic wave resonator.
8. The acoustic wave component of claim 7 wherein the transmit filter further includes another surface acoustic wave device on the ceramic substrate.
9. The acoustic wave component of claim 7 wherein the transmit filter further includes a loop circuit configured to generate an anti-phase signal to a target signal at a particular frequency, and the loop circuit includes another surface acoustic wave device on the ceramic substrate.
10. The acoustic wave component of claim 7 wherein the receive filter further includes a loop circuit configured to generate an anti-phase signal to a target signal at a particular frequency, and the loop circuit includes another surface acoustic wave resonator on the ceramic substrate.
11. The acoustic wave component of claim 1 wherein the ceramic substrate includes an upper surface over which the first piezoelectric layer is positioned, wherein the air cavity is over the upper surface of the ceramic substrate.
12. A multiplexer comprising:
a first filter including a bulk acoustic wave resonator, the bulk acoustic wave resonator including a ceramic substrate, a first piezoelectric layer on the ceramic substrate, electrodes on opposing sides of the first piezoelectric layer, and an air cavity between at least a portion of the ceramic substrate and an electrode of the electrodes; and
a second filter coupled to the first filter at a common node, the second filter including a surface acoustic wave device disposed in the air cavity, the surface acoustic wave device having a second piezoelectric layer on the ceramic substrate, and an interdigital transducer electrode on the second piezoelectric layer.
13. The multiplexer of claim 12 wherein the ceramic substrate is a spinel substrate.
14. The multiplexer of claim 12 wherein the bulk acoustic wave resonator includes a frame structure along an edge of an active region of the bulk acoustic wave resonator.
15. An acoustic wave component comprising:
a film bulk acoustic wave resonator including a ceramic substrate, a piezoelectric layer on the ceramic substrate, electrodes on opposing sides of the piezoelectric layer, and an air cavity between at least a portion of the ceramic substrate and an electrode of the electrodes; and
another type of acoustic wave resonator disposed in the air cavity.
16. The acoustic wave component of claim 15 wherein the ceramic substrate is a spinel substrate.
17. The acoustic wave component of claim 15 wherein the other type of acoustic wave resonator is a surface acoustic wave resonator.
18. The acoustic wave component of claim 15 wherein the other type of acoustic wave resonator is a solidly mounted resonator.
19. The acoustic wave component of claim 15 wherein at least a portion of the piezoelectric layer is positioned above the ceramic substrate to create the air cavity.
20. The acoustic wave component of claim 15 wherein the first piezoelectric layer caps the other type of acoustic wave resonator.