Semiconductor device, display device including the semiconductor device, display module including the display device, and electronic device including the semicondutor device, the display device, and the display module
To provide a semiconductor device including a planar transistor having an oxide semiconductor and a capacitor. In a semiconductor device, a transistor includes an oxide semiconductor film, a gate insulating film over the oxide semiconductor film, a gate electrode over the gate insulating film, a second insulating film over the gate electrode, a third insulating film over the second insulating film, and a source and a drain electrodes over the third insulating film; the source and the drain electrodes are electrically connected to the oxide semiconductor film; a capacitor includes a first and a second conductive films and the second insulating film; the first conductive film and the gate electrode are provided over the same surface; the second conductive film and the source and the drain electrodes are provided over the same surface; and the second insulating film is provided between the first and the second conductive films.
1. A semiconductor device comprising:
a first transistor, a second transistor, a third transistor, a fourth transistor, a capacitor, a light-emitting element, a first wiring, a second wiring, a third wiring, a fourth wiring, and a fifth wiring,
wherein a gate of the first transistor is electrically connected to one of a source and a drain of the second transistor, one of a source and a drain of the third transistor, and one terminal of the capacitor,
wherein one of a source and a drain of the first transistor is electrically connected to one of a source and a drain of the fourth transistor, the other terminal of the capacitor, and the light-emitting element,
wherein the other of the source and the drain of the first transistor is electrically connected to the first wiring,
wherein the other of the source and the drain of the second transistor is electrically connected to the second wiring,
wherein a gate of the second transistor is electrically connected to the third wiring,
wherein the other of the source and the drain of the third transistor is electrically connected to the fourth wiring,
wherein the other of the source and the drain of the fourth transistor is electrically connected to the fifth wiring,
wherein the first transistor comprises:
a semiconductor film over a first insulating film;
a second insulating film over the semiconductor film;
a gate electrode over the second insulating film;
a third insulating film over the gate electrode; and
a conductive film over the third insulating film, the conductive film electrically connected to the semiconductor film,
wherein an electrode of the light-emitting element is electrically connected to the conductive film through an opening portion of a fourth insulating film,
wherein the second insulating film comprises a first region and a second region,
wherein the first region overlaps with the semiconductor film,
wherein the second region does not overlap with the gate electrode, and does not overlap with the conductive film,
wherein a film thickness of the second insulating film in the second region is smaller than a film thickness of the second insulating film in the first region.
2. The semiconductor device according to claim 1 , wherein the semiconductor film comprises an oxide semiconductor.
3. A semiconductor device comprising:
a first transistor, a second transistor, a third transistor, a fourth transistor, a capacitor, a light-emitting element, a first wiring, a second wiring, a third wiring, a fourth wiring, and a fifth wiring,
wherein a gate of the first transistor is electrically connected to one of a source and a drain of the second transistor, one of a source and a drain of the third transistor, and one terminal of the capacitor,
wherein one of a source and a drain of the first transistor is electrically connected to one of a source and a drain of the fourth transistor, the other terminal of the capacitor, and the light-emitting element,
wherein the other of the source and the drain of the first transistor is electrically connected to the first wiring,
wherein the other of the source and the drain of the second transistor is electrically connected to the second wiring,
wherein a gate of the second transistor is electrically connected to the third wiring,
wherein the other of the source and the drain of the third transistor is electrically connected to the fourth wiring,
wherein the other of the source and the drain of the fourth transistor is electrically connected to the fifth wiring,
wherein the first transistor comprises:
a semiconductor film over a first insulating film;
a second insulating film over the semiconductor film;
a gate electrode over and in contact with the second insulating film;
a third insulating film over the gate electrode; and
a conductive film over the third insulating film, the conductive film electrically connected to the semiconductor film,
wherein an electrode of the light-emitting element is electrically connected to the conductive film through an opening portion of a fourth insulating film,
wherein the capacitor comprises:
a first electrode over and in contact with the second insulating film; and
a second electrode over and in contact with the third insulating film,
wherein the gate electrode and the first electrode comprises a same material,
wherein the conductive film and the second electrode comprises a same material,
wherein the second insulating film comprises a first region and a second region,
wherein the first region overlaps with the semiconductor film,
wherein the second region does not overlap with the gate electrode, and does not overlap with the conductive film,
wherein a film thickness of the second insulating film in the second region is smaller than a film thickness of the second insulating film in the first region.
4. The semiconductor device according to claim 3 , wherein the semiconductor film comprises an oxide semiconductor.
5. A semiconductor device comprising:
a first transistor, a second transistor, a third transistor, a fourth transistor, a capacitor, a light-emitting element, a first wiring, a second wiring, a third wiring, a fourth wiring, a fifth wiring, and a sixth wiring,
wherein a gate of the first transistor is electrically connected to one of a source and a drain of the second transistor, one of a source and a drain of the third transistor, and one terminal of the capacitor,
wherein one of a source and a drain of the first transistor is electrically connected to one of a source and a drain of the fourth transistor, the other terminal of the capacitor, and the light-emitting element,
wherein the other of the source and the drain of the first transistor is electrically connected to the first wiring,
wherein the other of the source and the drain of the second transistor is electrically connected to the second wiring,
wherein a gate of the second transistor is electrically connected to the third wiring,
wherein the other of the source and the drain of the third transistor is electrically connected to the fourth wiring,
wherein the other of the source and the drain of the fourth transistor is electrically connected to the fifth wiring,
wherein a gate of the fourth transistor is electrically connected to the sixth wiring,
wherein the first transistor comprises:
a semiconductor film over a first insulating film;
a second insulating film over the semiconductor film;
a gate electrode over the second insulating film;
a third insulating film over the gate electrode; and
a conductive film over the third insulating film, the conductive film electrically connected to the semiconductor film,
wherein an electrode of the light-emitting element is electrically connected to the conductive film through an opening portion of a fourth insulating film,
wherein the second insulating film comprises a first region and a second region,
wherein the first region overlaps with the semiconductor film,
wherein the second region does not overlap with the gate electrode, and does not overlap with the conductive film,
wherein a film thickness of the second insulating film in the second region is smaller than a film thickness of the second insulating film in the first region.
6. The semiconductor device according to claim 5 , wherein the semiconductor film comprises an oxide semiconductor.