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App. No. 17/077,155 · Confirmation No. 5108

COMPOSITION AND METHOD FOR DIELECTRIC CMP

Inventors: Sarah BROSNAN, Steven KRAFT, Fernando HUNG LOW, Benjamin PETRO, Na ZHANG, Julianne TRUFFA, Sudeep PALLIKKARA KUTTIATOOR

Applicant: CMC Materials, Inc.

On Appeal -- Awaiting Decision by the Board of Appeals View Publication ↗

	Code	Description	Pages	PDF
2026-03-25	`AP_DK_M`	Appeal Docketing Notice	2	View
2026-03-16	`APRB`	Reply Brief Filed	5	View
2026-03-16	`N417.PYMT`	Electronic Fee Payment	2	View
2026-03-16	`N417`	Electronic Filing System Acknowledgment Receipt	2	View
2026-01-16	`APEA`	Examiner's Answer to Appeal Brief	9	View
2025-11-25	`AP.B`	Appeal Brief Filed	12	View
2025-11-25	`N417`	Electronic Filing System Acknowledgment Receipt	2	View
2025-11-25	`N417.PYMT`	Electronic Fee Payment	2	View
2025-07-25	`N417.PYMT`	Electronic Fee Payment	2	View
2025-07-25	`N/AP`	Notice of Appeal Filed	2	View
2025-07-25	`XT/`	Extension of Time	2	View
2025-07-25	`N417`	Electronic Filing System Acknowledgment Receipt	2	View
2025-07-25	`CTAV`	Advisory Action (PTOL-303)	3	View
2025-07-25	`ANE.I`	Amendment After Final or under 37CFR 1.312, initialed by the examiner.	1	View
2025-07-16	`A.NE`	Response After Final Action	—	View
2025-07-16	`A.NE`	Response After Final Action	1	View
2025-07-16	`CLM`	Claims	3	View
2025-07-16	`REM`	Applicant Arguments/Remarks Made in an Amendment	5	View
2025-07-16	`N417`	Electronic Filing System Acknowledgment Receipt	2	View
2025-07-16	`WFEE`	Fee Worksheet (SB06)	1	View
2025-04-16	`CTFR`	Final Rejection	11	View
2025-04-16	`SRFW`	Search information including classification, databases and other search related notes	2	View
2025-04-16	`1449`	List of References cited by applicant and considered by examiner	4	View
2025-04-16	`SRNT`	Examiner's search strategy and results	1	View
2025-04-16	`SRNT`	Examiner's search strategy and results	1	View
2025-02-18	`A...`	Amendment/Request for Reconsideration-After Non-Final Rejection	—	View
2025-02-18	`IDS.SIZEFEE`	Assertion regarding Information Disclosure Statement (IDS) Size Fee (SB/08C)	4	View
2025-02-18	`A...`	Amendment/Request for Reconsideration-After Non-Final Rejection	1	View
2025-02-18	`CLM`	Claims	3	View
2025-02-18	`REM`	Applicant Arguments/Remarks Made in an Amendment	4	View
2025-02-18	`FOR`	Foreign Reference	21	View
2025-02-18	`FOR`	Foreign Reference	28	View
2025-02-18	`IDS`	Information Disclosure Statement (IDS) Form (SB08)	4	View
2025-02-18	`N417`	Electronic Filing System Acknowledgment Receipt	3	View
2025-02-18	`N417.PYMT`	Electronic Fee Payment	2	View
2025-02-18	`FOR`	Foreign Reference	41	View
2025-02-18	`WFEE`	Fee Worksheet (SB06)	1	View
2024-11-18	`CTNF`	Non-Final Rejection	10	View
2024-11-18	`SRFW`	Search information including classification, databases and other search related notes	2	View
2024-11-18	`1449`	List of References cited by applicant and considered by examiner	5	View
2024-11-18	`SRNT`	Examiner's search strategy and results	4	View
2024-11-18	`SRNT`	Examiner's search strategy and results	1	View
2024-08-22	`FOR`	Foreign Reference	20	View
2024-08-22	`FOR`	Foreign Reference	68	View
2024-08-22	`N417`	Electronic Filing System Acknowledgment Receipt	3	View
2024-08-22	`IDS`	Information Disclosure Statement (IDS) Form (SB08)	5	View
2024-08-22	`FOR`	Foreign Reference	19	View
2024-08-22	`FOR`	Foreign Reference	84	View
2024-08-22	`FOR`	Foreign Reference	34	View
2024-08-22	`FOR`	Foreign Reference	49	View
2024-08-22	`FOR`	Foreign Reference	22	View
2024-08-19	`AMSB`	Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE)	—	View
2024-08-19	`N417.PYMT`	Electronic Fee Payment	2	View
2024-08-19	`RCEX`	Request for Continued Examination (RCE)	3	View
2024-08-19	`N417`	Electronic Filing System Acknowledgment Receipt	2	View
2024-08-19	`AMSB`	Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE)	1	View
2024-08-19	`CLM`	Claims	3	View
2024-08-19	`REM`	Applicant Arguments/Remarks Made in an Amendment	2	View
2024-08-19	`WFEE`	Fee Worksheet (SB06)	1	View
2024-07-19	`APDA`	Patent Board Decision - Examiner Affirmed	11	View
2023-06-09	`AP_DK_M`	Appeal Docketing Notice	2	View
2023-06-05	`APRB`	Reply Brief Filed	5	View
2023-06-05	`WFEE`	Fee Worksheet (SB06)	2	View
2023-06-05	`N417`	Electronic Filing System Acknowledgment Receipt	2	View
2023-04-04	`APEA`	Examiner's Answer to Appeal Brief	8	View
2022-09-09	`AP.B`	Appeal Brief Filed	12	View
2022-09-09	`N417`	Electronic Filing System Acknowledgment Receipt	2	View
2022-07-11	`N/AP`	Notice of Appeal Filed	2	View
2022-07-11	`WFEE`	Fee Worksheet (SB06)	2	View
2022-07-11	`N417`	Electronic Filing System Acknowledgment Receipt	2	View
2022-06-20	`CTAV`	Advisory Action (PTOL-303)	3	View
2022-06-20	`SRFW`	Search information including classification, databases and other search related notes	1	View
2022-06-20	`ANE.I`	Amendment After Final or under 37CFR 1.312, initialed by the examiner.	1	View
2022-06-20	`SRNT`	Examiner's search strategy and results	2	View
2022-06-10	`WFEE`	Fee Worksheet (SB06)	1	View
2022-06-10	`N417`	Electronic Filing System Acknowledgment Receipt	2	View
2022-06-10	`A.NE`	Response After Final Action	1	View
2022-06-10	`CLM`	Claims	4	View
2022-06-10	`REM`	Applicant Arguments/Remarks Made in an Amendment	4	View
2022-04-11	`CTFR`	Final Rejection	9	View
2022-04-11	`892`	List of references cited by examiner	1	View
2022-04-11	`SRFW`	Search information including classification, databases and other search related notes	1	View
2022-04-11	`SRNT`	Examiner's search strategy and results	1	View
2022-04-11	`1449`	List of References cited by applicant and considered by examiner	4	View
2022-04-11	`SRNT`	Examiner's search strategy and results	2	View
2022-02-14	`N417`	Electronic Filing System Acknowledgment Receipt	2	View
2022-02-14	`A...`	Amendment/Request for Reconsideration-After Non-Final Rejection	1	View
2022-02-14	`CLM`	Claims	4	View
2022-02-14	`REM`	Applicant Arguments/Remarks Made in an Amendment	4	View
2022-02-14	`WFEE`	Fee Worksheet (SB06)	1	View
2021-11-15	`CTNF`	Non-Final Rejection	8	View
2021-11-15	`892`	List of references cited by examiner	1	View
2021-11-15	`SRFW`	Search information including classification, databases and other search related notes	1	View
2021-11-15	`1449`	List of References cited by applicant and considered by examiner	4	View
2021-11-15	`SRNT`	Examiner's search strategy and results	4	View
2021-11-15	`SRNT`	Examiner's search strategy and results	1	View
2021-11-15	`1449`	List of References cited by applicant and considered by examiner	4	View
2021-11-15	`BIB`	Bibliographic Data Sheet	1	View
2021-11-04	`IDS`	Information Disclosure Statement (IDS) Form (SB08)	4	View
2021-11-04	`N417`	Electronic Filing System Acknowledgment Receipt	2	View
2021-11-04	`TRAN.LET`	Transmittal Letter	2	View
2021-11-04	`FOR`	Foreign Reference	16	View
2021-09-20	`N417`	Electronic Filing System Acknowledgment Receipt	2	View
2021-09-20	`ELC.`	Response to Election / Restriction Filed	1	View
2021-09-20	`REM`	Applicant Arguments/Remarks Made in an Amendment	1	View
2021-07-29	`OA.POSTCARD`	A courtesy postcard sent by USPTO to users who opt-in for e-Office Action	1	View
2021-07-21	`IDS`	Information Disclosure Statement (IDS) Form (SB08)	4	View
2021-07-21	`FOR`	Foreign Reference	40	View
2021-07-21	`FOR`	Foreign Reference	41	View
2021-07-21	`FOR`	Foreign Reference	59	View
2021-07-21	`FOR`	Foreign Reference	18	View
2021-07-21	`FOR`	Foreign Reference	18	View
2021-07-21	`REF.OTHER`	Other reference-Patent/Application/Search Documents	5	View
2021-07-21	`REF.OTHER`	Other reference-Patent/Application/Search Documents	5	View
2021-07-21	`N417`	Electronic Filing System Acknowledgment Receipt	3	View
2021-07-21	`TRAN.LET`	Transmittal Letter	2	View
2021-07-21	`CTRS`	Requirement for Restriction/Election	7	View
2021-04-22	`NTC.PUB`	Notice of Publication	1	View
2021-02-04	`IDS`	Information Disclosure Statement (IDS) Form (SB08)	4	View
2021-02-04	`N417`	Electronic Filing System Acknowledgment Receipt	2	View
2021-02-04	`TRAN.LET`	Transmittal Letter	2	View
2020-11-16	`APP.FILE.REC`	Filing Receipt	4	View
2020-11-16	`WFEE`	Fee Worksheet (SB06)	1	View
2020-10-22	`SCORE`	Placeholder sheet indicating presence of supplemental content in Supplemental Complex Repository for Examiners(SCORE)	1	View
2020-10-22	`PA..`	Power of Attorney	3	View
2020-10-22	`TRNA`	Transmittal of New Application	2	View
2020-10-22	`WFEE`	Fee Worksheet (SB06)	2	View
2020-10-22	`N417`	Electronic Filing System Acknowledgment Receipt	3	View
2020-10-22	`ADS`	Application Data Sheet	6	View
2020-10-22	`SPEC`	Specification	53	View
2020-10-22	`CLM`	Claims	4	View
2020-10-22	`ABST`	Abstract	1	View
2020-10-22	`DRW.NONBW`	Drawings-other than black and white line drawings	3	View
2020-10-22	`OATH`	Oath or Declaration filed	7	View
2020-10-22	`DRW.SUPP`	Drawings-black and white line and/or other drawings	—	View

Inventors

Sarah BROSNAN St. Charles, IL

Steven KRAFT Elgin, IL

Fernando HUNG LOW Naperville, IL

Benjamin PETRO St. Charles, IL

Na ZHANG Naperville, IL

Julianne TRUFFA New Lenox, IL

Sudeep PALLIKKARA KUTTIATOOR Naperville, IL

Attorneys & Agents of Record

FRANCIS KOSZYK Reg. 56680 Agent

ERIKA SINGLETON Reg. 52368 Attorney · CABOT MICROELECTRONICS LEGAL DEPARTMENT

THOMAS OMHOLT Reg. 37052 Agent · CABOT MICROELECTRONICS CORPORATION

SALIM HASAN Reg. 38175 Attorney · LEYDIG VOIT & MAYER, LTD

CHRISTOPHER STREINZ Reg. 46196 Agent

ASHLEE SZELAG Reg. 65580 Attorney · LEYDIG, VOIT & MAYER

JOHN KILYK Reg. 30763 Attorney · LEYDIG VOIT AND MAYER LTD

BRIAN SZYMANSKI Reg. 39523 Attorney · ENGTEGRIS, INC.

CATHERINE GATES Reg. 51132 Agent · ENTEGRIS

COLIN DURHAM Reg. 52843 Attorney · ENTEGRIS, INC.

NIDHI KISSOON Reg. 69108 Attorney · INTERNATIONAL BUSINESS MACHINES, IBM

ERIC NIELSON Reg. 72825 Attorney · ENTEGRIS

SAMUEL BLIESNER Reg. 81591 Agent · ENTEGRIS, INC.

SOMMER SKEPS Reg. 83192 Attorney · ENTEGRIS INC.

Classification

USPC 252/79.1

B24B37/044 C09G1/02 C01F17/235 C01F17/229 H10P52/402 H10P95/062 C01P2002/54 C01P2004/38 C01P2004/51 C01P2004/62 C01P2004/64 C01P2006/12 C01P2006/90 C09G1/16 C09K3/1409 C09K3/1436 C09K3/1463

Prosecution

Examiner: AHMED, SHAMIM
Art Unit: 1713
Customer No.: 29050
Docket No.: C100759A2 US
Confirmation No.: 5108

Publication

Pub. No.: US20210115299A1
Pub. Date: 2021-04-22

CMC MATERIALS LLC

from CMC MATERIALS, INC.

CHANGE OF NAME Recorded 2023-11-08

065517/0783 →

TRUIST BANK, AS NOTES COLLATERAL AGENT

from CMC MATERIALS, INC., ENTEGRIS GP, INC., ENTEGRIS, INC., INTERNATIONAL TEST SOLUTIONS, LLC, POCO GRAPHITE, INC., QED TECHNOLOGIES INTERNATIONAL, INC.

SECURITY INTEREST Recorded 2022-07-08

060613/0072 →

MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT

from CMC MATERIALS, INC., INTERNATIONAL TEST SOLUTIONS, LLC, QED TECHNOLOGIES INTERNATIONAL, INC.

SECURITY INTEREST Recorded 2022-07-08

060615/0001 →

CABOT MICROELECTRONICS CORPORATION, QED TECHNOLOGIES INTERNATIONAL, INC., FLOWCHEM LLC, KMG ELECTRONIC CHEMICALS, INC., KMG-BERNUTH, INC., MPOWER SPECIALTY CHEMICALS LLC, SEALWELD (USA), INC., INTERNATIONAL TEST SOLUTIONS, LLC, CMC MATERIALS, INC.

from JPMORGAN CHASE BANK, N.A.

RELEASE OF SECURITY INTEREST Recorded 2022-07-06

060592/0260 →

JPMORGAN CHASE BANK, N.A.

from CMC MATERIALS, INC.

SECURITY AGREEMENT Recorded 2021-07-02

056752/0645 →

CMC MATERIALS, INC.

from BROSNAN, SARAH, HUNG LOW, FERNANDO, KRAFT, STEVEN, PALLIKKARA KUTTIATOOR, SUDEEP, PETRO, BENJAMIN, TRUFFA, JULIANNE, ZHANG, NA

ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded 2021-02-11

055237/0062 →

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