COMPOSITION AND METHOD FOR SELECTIVE OXIDE CMP

Inventors: Brittany JOHNSON, Alexander W. HAINS, Sarah BROSNAN, Steven KRAFT

Applicant: CMC Materials, Inc.

Notice of Allowance Mailed -- Application Received in Office of Publications View Publication ↗

	Code	Description	Pages	PDF
2026-07-23	`NOA`	Notice of Allowance and Fees Due (PTOL-85)	8	View
2026-07-23	`IIFW`	Issue Information including classification, examiner, name, claim, renumbering, etc.	3	View
2026-07-23	`SRFW`	Search information including classification, databases and other search related notes	2	View
2026-07-23	`BIB`	Bibliographic Data Sheet	1	View
2026-07-23	`ANE.I`	Amendment After Final or under 37CFR 1.312, initialed by the examiner.	1	View
2026-07-23	`SRNT`	Examiner's search strategy and results	14	View
2026-07-06	`A.NE`	Response After Final Action	—	View
2026-07-06	`A.NE`	Response After Final Action	1	View
2026-07-06	`CLM`	Claims	5	View
2026-07-06	`REM`	Applicant Arguments/Remarks Made in an Amendment	5	View
2026-07-06	`N417`	Electronic Filing System Acknowledgment Receipt	2	View
2026-07-06	`WFEE`	Fee Worksheet (SB06)	1	View
2026-05-06	`CTFR`	Final Rejection	13	View
2026-05-06	`SRFW`	Search information including classification, databases and other search related notes	2	View
2026-05-06	`SRNT`	Examiner's search strategy and results	10	View
2026-05-06	`1449`	List of References cited by applicant and considered by examiner	5	View
2026-01-30	`FOR`	Foreign Reference	18	View
2026-01-30	`FOR`	Foreign Reference	21	View
2026-01-30	`IDS`	Information Disclosure Statement (IDS) Form (SB08)	5	View
2026-01-30	`N417`	Electronic Filing System Acknowledgment Receipt	2	View
2026-01-30	`N417.PYMT`	Electronic Fee Payment	2	View
2026-01-20	`A...`	Amendment/Request for Reconsideration-After Non-Final Rejection	—	View
2026-01-20	`A...`	Amendment/Request for Reconsideration-After Non-Final Rejection	1	View
2026-01-20	`CLM`	Claims	6	View
2026-01-20	`REM`	Applicant Arguments/Remarks Made in an Amendment	4	View
2026-01-20	`N417`	Electronic Filing System Acknowledgment Receipt	2	View
2025-10-20	`CTNF`	Non-Final Rejection	10	View
2025-10-20	`892`	List of references cited by examiner	1	View
2025-10-20	`SRFW`	Search information including classification, databases and other search related notes	2	View
2025-10-20	`1449`	List of References cited by applicant and considered by examiner	5	View
2025-10-20	`SRNT`	Examiner's search strategy and results	7	View
2025-03-05	`N417`	Electronic Filing System Acknowledgment Receipt	2	View
2025-03-05	`IDS`	Information Disclosure Statement (IDS) Form (SB08)	5	View
2025-03-05	`FOR`	Foreign Reference	24	View
2025-03-05	`FOR`	Foreign Reference	37	View
2025-03-05	`FOR`	Foreign Reference	31	View
2025-03-05	`FOR`	Foreign Reference	17	View
2024-04-29	`RCEX`	Request for Continued Examination (RCE)	3	View
2024-04-29	`N417`	Electronic Filing System Acknowledgment Receipt	2	View
2024-04-29	`N417.PYMT`	Electronic Fee Payment	2	View
2024-04-11	`CTAV`	Advisory Action (PTOL-303)	3	View
2024-04-11	`ANE.I`	Amendment After Final or under 37CFR 1.312, initialed by the examiner.	1	View
2024-04-11	`1449`	List of References cited by applicant and considered by examiner	4	View
2024-03-02	`N417.PYMT`	Electronic Fee Payment	2	View
2024-03-02	`IDS`	Information Disclosure Statement (IDS) Form (SB08)	4	View
2024-03-02	`FOR`	Foreign Reference	46	View
2024-03-02	`N417`	Electronic Filing System Acknowledgment Receipt	2	View
2024-03-01	`A.NE`	Response After Final Action	—	View
2024-03-01	`A.NE`	Response After Final Action	1	View
2024-03-01	`CLM`	Claims	6	View
2024-03-01	`REM`	Applicant Arguments/Remarks Made in an Amendment	3	View
2024-03-01	`N417`	Electronic Filing System Acknowledgment Receipt	2	View
2024-03-01	`WFEE`	Fee Worksheet (SB06)	1	View
2023-12-01	`CTFR`	Final Rejection	15	View
2023-12-01	`SRFW`	Search information including classification, databases and other search related notes	2	View
2023-12-01	`1449`	List of References cited by applicant and considered by examiner	5	View
2023-12-01	`SRNT`	Examiner's search strategy and results	4	View
2023-07-14	`A...`	Amendment/Request for Reconsideration-After Non-Final Rejection	1	View
2023-07-14	`CLM`	Claims	6	View
2023-07-14	`REM`	Applicant Arguments/Remarks Made in an Amendment	3	View
2023-07-14	`WFEE`	Fee Worksheet (SB06)	2	View
2023-07-14	`N417`	Electronic Filing System Acknowledgment Receipt	3	View
2023-06-26	`IDS`	Information Disclosure Statement (IDS) Form (SB08)	5	View
2023-06-26	`FOR`	Foreign Reference	21	View
2023-06-26	`FOR`	Foreign Reference	20	View
2023-06-26	`FOR`	Foreign Reference	115	View
2023-06-26	`FOR`	Foreign Reference	41	View
2023-06-26	`FOR`	Foreign Reference	62	View
2023-06-26	`FOR`	Foreign Reference	56	View
2023-06-26	`FOR`	Foreign Reference	31	View
2023-06-26	`FOR`	Foreign Reference	31	View
2023-06-26	`N417`	Electronic Filing System Acknowledgment Receipt	3	View
2023-03-21	`CTNF`	Non-Final Rejection	13	View
2023-03-21	`SRFW`	Search information including classification, databases and other search related notes	2	View
2023-03-21	`SRNT`	Examiner's search strategy and results	2	View
2022-12-30	`RCEX`	Request for Continued Examination (RCE)	3	View
2022-12-30	`WFEE`	Fee Worksheet (SB06)	2	View
2022-12-30	`N417`	Electronic Filing System Acknowledgment Receipt	2	View
2022-12-30	`CTAV`	Advisory Action (PTOL-303)	5	View
2022-12-30	`ANE.I`	Amendment After Final or under 37CFR 1.312, initialed by the examiner.	1	View
2022-12-30	`WFEE`	Fee Worksheet (SB06)	1	View
2022-11-30	`N417`	Electronic Filing System Acknowledgment Receipt	2	View
2022-11-30	`A.NE`	Response After Final Action	1	View
2022-11-30	`REM`	Applicant Arguments/Remarks Made in an Amendment	4	View
2022-11-30	`CLM`	Claims	6	View
2022-11-30	`WFEE`	Fee Worksheet (SB06)	1	View
2022-11-30	`AMSB`	Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE)	1	View
2022-09-21	`CTFR`	Final Rejection	26	View
2022-09-21	`SRFW`	Search information including classification, databases and other search related notes	2	View
2022-09-21	`SRNT`	Examiner's search strategy and results	6	View
2022-05-13	`N417`	Electronic Filing System Acknowledgment Receipt	2	View
2022-05-13	`A...`	Amendment/Request for Reconsideration-After Non-Final Rejection	1	View
2022-05-13	`CLM`	Claims	6	View
2022-05-13	`REM`	Applicant Arguments/Remarks Made in an Amendment	6	View
2022-05-13	`WFEE`	Fee Worksheet (SB06)	1	View
2022-02-16	`CTNF`	Non-Final Rejection	20	View
2022-02-16	`892`	List of references cited by examiner	1	View
2022-02-16	`SRFW`	Search information including classification, databases and other search related notes	1	View
2022-02-16	`1449`	List of References cited by applicant and considered by examiner	4	View
2022-02-16	`SRNT`	Examiner's search strategy and results	5	View
2022-02-16	`FOR`	Foreign Reference	30	View
2022-02-16	`1449`	List of References cited by applicant and considered by examiner	4	View
2022-02-16	`FOR`	Foreign Reference	30	View
2022-02-16	`FOR`	Foreign Reference	16	View
2022-02-16	`1449`	List of References cited by applicant and considered by examiner	4	View
2022-01-14	`N417`	Electronic Filing System Acknowledgment Receipt	2	View
2022-01-14	`ELC.`	Response to Election / Restriction Filed	1	View
2022-01-14	`REM`	Applicant Arguments/Remarks Made in an Amendment	1	View
2021-11-26	`OA.POSTCARD`	A courtesy postcard sent by USPTO to users who opt-in for e-Office Action	1	View
2021-11-18	`CTRS`	Requirement for Restriction/Election	7	View
2021-11-04	`IDS`	Information Disclosure Statement (IDS) Form (SB08)	4	View
2021-11-04	`N417`	Electronic Filing System Acknowledgment Receipt	2	View
2021-11-04	`TRAN.LET`	Transmittal Letter	2	View
2021-05-27	`IDS`	Information Disclosure Statement (IDS) Form (SB08)	4	View
2021-05-27	`N417`	Electronic Filing System Acknowledgment Receipt	2	View
2021-05-27	`TRAN.LET`	Transmittal Letter	2	View
2021-05-27	`FOR`	Foreign Reference	30	View
2021-05-27	`REF.OTHER`	Other reference-Patent/Application/Search Documents	3	View
2021-05-27	`REF.OTHER`	Other reference-Patent/Application/Search Documents	5	View
2021-04-22	`NTC.PUB`	Notice of Publication	1	View
2021-02-04	`IDS`	Information Disclosure Statement (IDS) Form (SB08)	4	View
2021-02-04	`N417`	Electronic Filing System Acknowledgment Receipt	2	View
2021-02-04	`TRAN.LET`	Transmittal Letter	2	View
2020-11-04	`APP.FILE.REC`	Filing Receipt	4	View
2020-11-04	`WFEE`	Fee Worksheet (SB06)	1	View
2020-10-22	`SCORE`	Placeholder sheet indicating presence of supplemental content in Supplemental Complex Repository for Examiners(SCORE)	1	View
2020-10-22	`PA..`	Power of Attorney	3	View
2020-10-22	`WFEE`	Fee Worksheet (SB06)	2	View
2020-10-22	`N417`	Electronic Filing System Acknowledgment Receipt	3	View
2020-10-22	`TRNA`	Transmittal of New Application	2	View
2020-10-22	`ADS`	Application Data Sheet	5	View
2020-10-22	`SPEC`	Specification	29	View
2020-10-22	`CLM`	Claims	5	View
2020-10-22	`ABST`	Abstract	1	View
2020-10-22	`DRW.NONBW`	Drawings-other than black and white line drawings	3	View
2020-10-22	`OATH`	Oath or Declaration filed	4	View
2020-10-22	`DRW.SUPP`	Drawings-black and white line and/or other drawings	—	View

Inventors

Brittany JOHNSON Wood Dale, IL

Alexander W. HAINS Aurora, IL

Sarah BROSNAN St. Charles, IL

Steven KRAFT Elgin, IL

Attorneys & Agents of Record

FRANCIS KOSZYK Reg. 56680 Agent

ERIKA SINGLETON Reg. 52368 Attorney · CABOT MICROELECTRONICS LEGAL DEPARTMENT

THOMAS OMHOLT Reg. 37052 Agent · CABOT MICROELECTRONICS CORPORATION

SALIM HASAN Reg. 38175 Attorney · LEYDIG VOIT & MAYER, LTD

CHRISTOPHER STREINZ Reg. 46196 Agent

ASHLEE SZELAG Reg. 65580 Attorney · LEYDIG, VOIT & MAYER

JOHN KILYK Reg. 30763 Attorney · LEYDIG VOIT AND MAYER LTD

BRIAN SZYMANSKI Reg. 39523 Attorney · ENGTEGRIS, INC.

CATHERINE GATES Reg. 51132 Agent · ENTEGRIS

COLIN DURHAM Reg. 52843 Attorney · ENTEGRIS, INC.

NIDHI KISSOON Reg. 69108 Attorney · INTERNATIONAL BUSINESS MACHINES, IBM

ERIC NIELSON Reg. 72825 Attorney · ENTEGRIS

SAMUEL BLIESNER Reg. 81591 Agent · ENTEGRIS, INC.

SOMMER SKEPS Reg. 83192 Attorney · ENTEGRIS INC.

Classification

USPC 51/309

C09G1/02 C01F17/235 C01F17/241 H10P95/062 B24B37/044 C01P2004/03 C01P2004/04 C01P2004/38 C01P2004/51 C01P2004/62 C01P2004/64 C01P2006/12 C09G1/16 C09K3/1409 C09K3/1436 C09K3/1463

Prosecution

Examiner: ABU ALI, SHUANGYI
Art Unit: 1731
Customer No.: 29050
Docket No.: C100759D US
Confirmation No.: 2529

Publication

Pub. No.: US20210115302A1
Pub. Date: 2021-04-22

CMC MATERIALS LLC

from CMC MATERIALS, INC.

CHANGE OF NAME Recorded 2023-11-08

065517/0783 →

TRUIST BANK, AS NOTES COLLATERAL AGENT

from CMC MATERIALS, INC., ENTEGRIS GP, INC., ENTEGRIS, INC., INTERNATIONAL TEST SOLUTIONS, LLC, POCO GRAPHITE, INC., QED TECHNOLOGIES INTERNATIONAL, INC.

SECURITY INTEREST Recorded 2022-07-08

060613/0072 →

MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT

from CMC MATERIALS, INC., INTERNATIONAL TEST SOLUTIONS, LLC, QED TECHNOLOGIES INTERNATIONAL, INC.

SECURITY INTEREST Recorded 2022-07-08

060615/0001 →

CABOT MICROELECTRONICS CORPORATION, QED TECHNOLOGIES INTERNATIONAL, INC., FLOWCHEM LLC, KMG ELECTRONIC CHEMICALS, INC., KMG-BERNUTH, INC., MPOWER SPECIALTY CHEMICALS LLC, SEALWELD (USA), INC., INTERNATIONAL TEST SOLUTIONS, LLC, CMC MATERIALS, INC.

from JPMORGAN CHASE BANK, N.A.

RELEASE OF SECURITY INTEREST Recorded 2022-07-06

060592/0260 →

JPMORGAN CHASE BANK, N.A.

from CMC MATERIALS, INC.

SECURITY AGREEMENT Recorded 2021-07-02

056752/0645 →

CMC MATERIALS, INC.

from BROSNAN, SARAH, JOHNSON, BRITTANY, HAINS, ALEXANDER W., KRAFT, STEVEN

ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded 2021-05-13

056234/0318 →

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