Solid-state imaging device and electronic apparatus
A solid-state imaging device includes a plurality of pixels each of which includes a photoelectric conversion unit that generates charges by photoelectrically converting light, and a transistor that reads a pixel signal of a level corresponding to the charges generated in the photoelectric conversion unit. A phase difference pixel which is at least a part of the plurality of pixels is configured in such a manner that the photoelectric conversion unit is divided into a plurality of photoelectric conversion units and an insulated light shielding film is embedded in a region for separating the plurality of photoelectric conversion units, which are divided, from each other.
1. A light detection device, comprising:
first, second, and third photoelectric conversion regions disposed in a substrate, wherein the second photoelectric conversion region is disposed adjacent to the first photoelectric conversion region the third photoelectric conversion region, and wherein the first, second, and third photoelectric conversion regions are disposed along a first direction;
a first on-chip lens disposed above the first and second photoelectric conversion regions;
a second on-chip lens disposed above the third photoelectric conversion region;
a light shield, wherein at least a part of the light shield is disposed between the first photoelectric conversion region and the second photoelectric conversion region.
2. The light detecting device of claim 1 , wherein the second on-chip lens is configured to focus incident light on a single photoelectric conversion region that corresponds to the third photoelectric conversion region.
3. The light detecting device of claim 1 , wherein the light shield comprises a metal material.
4. The light detecting device of claim 1 , further comprising:
a first color filter disposed on the substrate between the first on-chip lens and the first and second photoelectric conversion regions; and
a second color filter disposed on the substrate between the second on-chip lens and the third photoelectric conversion region.
5. The light detecting device of claim 4 , wherein the first color filter corresponds to a white color filter, and wherein the second color filter corresponds to a red, blue, or green color filter.
6. The light detecting device of claim 1 , further comprising:
a trench in the substrate, wherein the light shield is disposed in the trench.
7. The light detecting device of claim 6 , further comprising:
a first film disposed on a light-receiving surface of the substrate and on sidewalls of the trench, wherein the light shield is disposed on sidewalls of the first film.
8. The light detecting device of claim 7 , further comprising:
a second film disposed over the light-receiving surface of the substrate and on the first film.
9. The light detecting device of claim 8 , wherein the first film and the second film are insulating films.
10. The light detecting device of claim 8 , wherein the second film contacts a surface of the light shield.
11. An electronic apparatus, comprising:
a signal processing circuit; and
a light detecting device, including:
first, second, and third photoelectric conversion regions disposed in a substrate, wherein the second photoelectric conversion region is disposed adjacent to the first photoelectric conversion region the third photoelectric conversion region, and wherein the first, second, and third photoelectric conversion regions are disposed along a first direction;
a first on-chip lens disposed above the first and second photoelectric conversion regions;
a second on-chip lens disposed above the third photoelectric conversion region;
a light shield, wherein at least a part of the light shield is disposed between the first photoelectric conversion region and the second photoelectric conversion region.
12. The electronic apparatus of claim 11 , wherein the second on-chip lens is configured to focus incident light on a single photoelectric conversion region that corresponds to the third photoelectric conversion region.
13. The electronic apparatus of claim 11 , wherein the light shield comprises a metal material.
14. The electronic apparatus of claim 11 , wherein the light detecting device further comprises:
a first color filter disposed on the substrate between the first on-chip lens and the first and second photoelectric conversion regions; and
a second color filter disposed on the substrate between the second on-chip lens and the third photoelectric conversion region.
15. The electronic apparatus of claim 14 , wherein the first color filter corresponds to a white color filter, and wherein the second color filter corresponds to a red, blue, or green color filter.
16. The electronic apparatus of claim 11 , the light detecting device further comprises:
a trench in the substrate, wherein the light shield is disposed in the trench.
17. The electronic apparatus of claim 16 , the light detecting device further comprises:
a first film disposed on a light-receiving surface of the substrate and on sidewalls of the trench, wherein the light shield is disposed on sidewalls of the first film.
18. The electronic apparatus of claim 17 , the light detecting device further comprises:
a second film disposed over the light-receiving surface of the substrate and on the first film.
19. The electronic apparatus of claim 18 , wherein the first film and the second film are insulating films.
20. The electronic apparatus of claim 18 , wherein the second film contacts a surface of the light shield.