Semiconductor memory device and method for manufacturing the same
A semiconductor memory device includes a connecting member including a semiconductor material, a first electrode film, a first insulating film, a stacked body and three or more semiconductor pillars. The stacked body includes second electrode films and second insulating films that alternately stacked. The semiconductor pillars are arrayed along two or more directions, extend in a stacking direction, pierce through the stacked body and the first insulating film, and are connected to the connecting member. The device includes a third insulating film provided between the semiconductor pillars and the stacked body and between the connecting member and the first electrode film. A charge storage layer is provided at least between one of the second electrode films and the third insulating film.
1. A non-volatile memory device comprising:
a substrate;
an insulation film provided above the substrate;
a first conductive layer provided above the insulation film;
an upper interconnect structure including a first interconnection;
first electrode films provided between the first conductive layer and the upper interconnect structure, the first electrode films being arranged in a first direction perpendicular to the first conductive layer;
at least one semiconductor body extending through the first electrode films in the first direction and forming memory cells at crossing portions with the first electrode films, one end of the semiconductor body being electrically connected to the first conductive layer, and the other end of the semiconductor body being electrically connected to the first interconnection; and
an isolating portion embedded in a slit extending through the first electrode films in the first direction and in a second direction orthogonal to the first direction, the slit dividing the first electrode films in a third direction orthogonal to the first direction and the second direction, a lower end portion of the slit being expanded in the third direction.
2. The device according to claim 1 ,
wherein the lower end portion of the slit is located below the first electrode films in the first direction.
3. The device according to claim 1 ,
wherein the isolating portion includes a semiconductor formed of polycrystalline silicon and positioned at a same level in the first direction as the first electrode films.
4. The device according to claim 3 ,
wherein the at least one semiconductor body has a circular shape in a cross section orthogonal to the first direction and an outer diameter of the circular shape semiconductor body is smaller than a width of the semiconductor along the third direction at a same level in the first direction.
5. The device according to claim 1 ,
wherein the at least one semiconductor body includes a first semiconductor body and a second semiconductor body, the first semiconductor body forming first memory cells at crossing portions with the first electrode films and the second semiconductor body forming second memory cells at crossing portions with the first electrode films, and
the first and second semiconductor bodies are arranged in a fourth direction orthogonal to the first direction and oblique to the second direction.
6. The device according to claim 1 ,
wherein each of the first electrode films extends in the second direction.
7. The device according to claim 6 ,
wherein the first interconnection extends in the third direction.
8. The device according to claim 1 ,
wherein each of the first electrode films is a polycrystalline silicon film or a metal film.
9. The device according to claim 1 ,
wherein the first conductive layer functions a source layer.
10. The device according to claim 1 ,
wherein the first conductive layer includes a polycrystalline silicon film.
11. The device according to claim 1 ,
wherein the at least one semiconductor body is provided in a corresponding hole extending through the first electrode films in the first direction and the lower end portion of the slit is terminated at a level higher than a lower end of the hole in the first direction.
12. A non-volatile memory device comprising:
a substrate;
an insulation film provided above the substrate;
a first conductive layer provided above the insulation film;
an upper interconnect structure including a first interconnection;
first electrode films provided between the first conductive layer and the upper interconnect structure, the first electrode films being arranged in a first direction perpendicular to the first conductive layer;
a second electrode film provided between the first conductive layer and the first electrode films in the first direction;
at least one semiconductor body extending through the first electrode films and the second electrode film in the first direction, and forming memory cells at crossing portions with the first electrode films and forming a selection transistor at a crossing portion with the second electrode film, one end of the semiconductor body being electrically connected to the first conductive layer, and the other end of the semiconductor body being electrically connected to the first interconnection; and
an isolating portion extending through the first electrode films and the second electrode film in the first direction and in a second direction orthogonal to the first direction and dividing the first electrode films and the second electrode film in a third direction orthogonal to the first direction and the second direction, the isolating portion including a lower part piercing at least the second electrode film, the lower part of the isolating portion including a semiconductor formed of polycrystalline silicon and an insulator covering side surfaces of the semiconductor in the third direction.
13. The device according to claim 12 ,
wherein the at least one semiconductor body has a circular shape in a cross section orthogonal to the first direction and an outer diameter of the circular shape semiconductor body is smaller than a width of the lower part of the isolating portion along the third direction at a same level in the first direction.
14. The device according to claim 12 ,
wherein the at least one semiconductor body includes a first semiconductor body and a second semiconductor body, the first semiconductor body forming first memory cells at crossing portions with the first electrode films and forming a first selection transistor at a crossing portion with the second electrode film, the second semiconductor body forming second memory cells at crossing portions with the first electrode films and forming a second selection transistor at a crossing portion with the second electrode film, and
the first and second semiconductor bodies are arranged in a fourth direction orthogonal to the first direction and oblique to the second direction.
15. The device according to claim 12 ,
wherein each of the first electrode films extends in the second direction.
16. The device according to claim 15 ,
wherein the first interconnection extends in the third direction.
17. The device according to claim 12 ,
wherein each of the first electrode films is a polycrystalline silicon film or a metal film.
18. The device according to claim 12 ,
wherein the first conductive layer functions a source layer.
19. The device according to claim 12 ,
wherein the first conductive layer includes a polycrystalline silicon film.
20. The device according to claim 12 ,
wherein the isolating portion further includes an upper part piercing the first electrode films and including the semiconductor and the insulator.