IP Library › Granted Patent US 12,094,829
Granted Patent B2
US 12,094,829 · App. 17/384,796 · Granted Sep 17, 2024

3D semiconductor device and structure

Inventors: Zvi Or-Bach (Haifa, IL); Brian Cronquist (Klamath Falls, OR)
Assignee: Monolithic 3D Inc.
H01L23/5384H01L23/5386H01L25/0657H01L27/0688
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Quick Facts
Patent No.
US 12,094,829
App. No.
17/384,796
Filed
Jul 25, 2021
Granted
Sep 17, 2024
Kind
B2
Examiner
HO, TU TU V
Art Unit
2818
USPC
257/686
Abstract

A 3D semiconductor device, the device including: a first level, where the first level includes a first layer, the first layer including first transistors, and where the first level includes a second layer, the second layer including first interconnections; a second level overlaying the first level, where the second level includes a third layer, the third layer including second transistors, and where the second level includes a fourth layer, the fourth layer including second interconnections; and a plurality of connection paths, where the plurality of connection paths provides connections from a plurality of the first transistors to a plurality of the second transistors, where the second level is bonded to the first level, where the bonded includes oxide to oxide bond regions, where the bonded includes metal to metal bond regions, and where the second level includes at least one voltage regulator.

Claims (107)

1. A 3D semiconductor device, the device comprising:

a first level,

wherein said first level comprises a first layer, said first layer comprising first transistors, and

wherein said first level comprises a second layer, said second layer comprising first interconnections;

a second level overlaying said first level,

wherein said second level comprises a third layer, said third layer comprising second transistors, and

wherein said second level comprises a fourth layer, said fourth layer comprising second interconnections; and

a plurality of connection paths,

wherein said plurality of connection paths provides connections from a plurality of said first transistors to a plurality of said second transistors,

wherein said second level is bonded to said first level,

wherein said bonded comprises oxide to oxide bond regions,

wherein said bonded additionally comprises metal to metal bond regions made on a same level as the oxide to oxide bonds, and

wherein said second level comprises at least one voltage regulator.

2. The device according to claim 1 ,

wherein said second level comprises at least one PLL circuit.

3. The device according to claim 1 ,

wherein said second level comprises at least one SerDes circuit.

4. The device according to claim 1 ,

wherein said first level comprises at least one control circuit, wherein said second level comprises at least one memory array, and

wherein said control circuit controls data written to said at least one memory array.

5. The device according to claim 1 ,

wherein at least one of said second transistors is a FinFET type transistor.

6. A 3D semiconductor device, the device comprising:

a first level,

wherein said first level comprises a first layer, said first layer comprising first transistors, and

wherein said first level comprises a second layer, said second layer comprising first interconnections;

a second level overlaying said first level,

wherein said second level comprises a third layer, said third layer comprising second transistors, and

wherein said second level comprises a fourth layer, said fourth layer comprising second interconnections; and

a plurality of connection paths,

wherein said plurality of connection paths provides connections from a plurality of said first transistors to a plurality of said second transistors,

wherein said second level is bonded to said first level,

wherein said bonded comprises oxide to oxide bond regions,

wherein said bonded comprises metal to metal bond regions,

wherein said second level comprises at least one voltage regulator,

wherein said first level comprises a first clock tree,

wherein said second level comprises a second clock tree, and

wherein at least one of said connection paths comprises connecting between said first clock tree and said second clock tree.

7. A 3D semiconductor device, the device comprising:

a first level,

wherein said first level comprises a first layer, said first layer comprising first transistors, and

wherein said first level comprises a second layer, said second layer comprising first interconnections;

a second level overlaying said first level,

wherein said second level comprises a third layer, said third layer comprising second transistors, and

wherein said second level comprises a fourth layer, said fourth layer comprising second interconnections; and

a plurality of connection paths,

wherein said plurality of connection paths provides connections from a plurality of said first transistors to a plurality of said second transistors,

wherein said second level is bonded to said first level,

wherein said bonded comprises oxide to oxide bond,

wherein said second level comprises at least one voltage regulator,

wherein said first level comprises a first die area,

wherein said second level comprises a second die area, and

wherein said first die area is larger than said second die area.

8. A 3D semiconductor device, the device comprising:

a first level,

wherein said first level comprises a first layer, said first layer comprising first transistors, and

wherein said first level comprises a second layer, said second layer comprising first interconnections;

a second level overlaying said first level,

wherein said second level comprises a third layer, said third layer comprising second transistors, and

wherein said second level comprises a fourth layer, said fourth layer comprising second interconnections; and

a plurality of connection paths,

wherein said plurality of connection paths provides connections from a plurality of said first transistors to a plurality of said second transistors,

wherein said second level is bonded to said first level,

wherein said bonded comprises oxide to oxide bond regions,

wherein said bonded additionally comprises metal to metal bond regions made on a same level as the oxide to oxide bonds, and

wherein said second level comprises at least one charge pump circuit.

9. The device according to claim 8 ,

wherein said second level comprises at least one PLL circuit.

10. The device according to claim 8 ,

wherein said second level comprises at least one SerDes circuit.

11. The device according to claim 8 ,

wherein said first level comprises at least one control circuit, wherein said second level comprises at least one memory array, and

wherein said control circuit controls data written to said at least one memory array.

12. The device according to claim 8 ,

wherein at least one of said second transistors is a FinFET type transistor.

13. A 3D semiconductor device, the device comprising:

a first level,

wherein said first level comprises a first layer, said first layer comprising first transistors, and

wherein said first level comprises a second layer, said second layer comprising first interconnections;

a second level overlaying said first level,

wherein said second level comprises a third layer, said third layer comprising second transistors, and

wherein said second level comprises a fourth layer, said fourth layer comprising second interconnections; and

a plurality of connection paths,

wherein said plurality of connection paths provides connections from a plurality of said first transistors to a plurality of said second transistors,

wherein said second level is bonded to said first level,

wherein said bonded comprises oxide to oxide bond regions,

wherein said bonded comprises metal to metal bond regions,

wherein said second level comprises at least one charge pump circuit,

wherein said first level comprises a first clock tree,

wherein said second level comprises a second clock tree, and

wherein at least one of said connection paths comprises connecting between said first clock tree and said second clock tree.

14. A 3D semiconductor device, the device comprising:

a first level,

wherein said first level comprises a first layer, said first layer comprising first transistors, and

wherein said first level comprises a second layer, said second layer comprising first interconnections;

a second level overlaying said first level,

wherein said second level comprises a third layer, said third layer comprising second transistors, and

wherein said second level comprises a fourth layer, said fourth layer comprising second interconnections; and

a plurality of connection paths,

wherein said plurality of connection paths provides connections from a plurality of said first transistors to a plurality of said second transistors,

wherein said second level is bonded to said first level,

wherein said bonded comprises oxide to oxide bond regions,

wherein said bonded comprises metal to metal bond regions,

wherein said second level comprises at least one charge pump circuit,

wherein said first level comprises a first die area,

wherein said second level comprises a second die area, and

wherein said first die area is larger than said second die area.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 26, 2021
From: OR-BACH, ZVI; CRONQUIST, BRIAN
To: MONOLITHIC 3D INC.
Reel/Frame 056972/0236 →
Continuity (15)
Continuation In Part 17246612 · May 1, 2021
Continuation In Part 17169511 · Feb 7, 2021
Continuation In Part 17064504 · Oct 6, 2020
Continuation In Part 16846298 · Apr 11, 2020
Continuation In Part 16252825 · Jan 21, 2019
Continuation In Part 15990626 · May 26, 2018
Continuation In Part 15477106 · Apr 2, 2017
Continuation In Part 14642724 · Mar 9, 2015
Continuation In Part 15482787 · Apr 9, 2017
Continuation In Part 14607077 · Jan 28, 2015
Provisional Application 62042229 · Aug 26, 2014
Provisional Application 62035565 · Aug 11, 2014
Provisional Application 62022498 · Jul 9, 2014
Provisional Application 61932617 · Jan 28, 2014
Related Publication 20210351135A1 · Nov 11, 2021
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