IP Library › Granted Patent US 12,317,508
Granted Patent B2
US 12,317,508 · App. 17/450,691 · Granted May 27, 2025

Tuning perpendicular magnetic anisotropy of Heusler compound in MRAM devices

Inventors: Mahesh Samant (San Jose, CA); Panagiotis Charilaos Filippou (Fremont, CA); Yari Ferrante (San Jose, CA); Chirag Garg (San Jose, CA); Jaewoo Jeong (San Jose, CA); . Ikhtiar (San Jose, CA)
Assignees: International Business Machines Corporation; SAMSUNG ELECTRONICS CO., LTD
H10B61/00H10N50/80H10N50/85
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Quick Facts
Patent No.
US 12,317,508
App. No.
17/450,691
Granted
May 27, 2025
Kind
B2
Abstract

A device is provided. The device includes a multi-layered structure that is non-magnetic at room temperature, the multi-layered structure comprising alternating layers of Co and E, wherein E comprises at least one other element selected from the group consisting of Ge, Ga, Sn and Al, wherein a composition of the multi-layered structure is represented by Co 1−x E x , with x being in a range from 0.42 to 0.55. The device also includes a combined layer provided in contact with the multi-layered structure, the combined layer including an insertion layer comprising Co or Fe or Mn or Al in contact with a Heusler compound.

Claims (31)

1. A device, comprising:

a multi-layered structure that is non-magnetic at room temperature, the multi-layered structure comprising alternating layers of Co and E, wherein E comprises at least one other element selected from the group consisting of Ge, Ga, Sn and Al, wherein a composition of the multi-layered structure is represented by Co 1−x E x , with x being in a range from 0.42 to 0.55; and

a combined layer in contact with the multi-layered structure, the combined layer including an insertion layer in contact with a Heusler compound, the insertion layer consisting of an element selected from the group consisting of Co, Fe, Mn and Al.

2. The device of claim 1 , wherein the combined layer is a first magnetic layer that forms part of a magnetic tunnel junction.

3. The device of claim 2 , wherein a magnetic moment of the first magnetic layer is substantially perpendicular to an interface between the multi-layered structure and the first magnetic layer.

4. The device of claim 2 , wherein the first magnetic layer has a thickness of less than 5 nm.

5. The device of claim 1 , wherein the insertion layer has a thickness of less than or equal to 3 Å.

6. The device of claim 1 , wherein the Heusler compound is a binary Heusler.

7. The device of claim 6 , wherein the Heusler compound includes one or more of Mn 3.3−x Ge, Mn 3.3−x Sn, and Mn 3.3−y Sb, with x being in a range from 0 to 0.8 for Mn 3.3−x Ge and Mn 3.3−x Sn and with y being in a range from 0 to 1.3 for Mn 3.3−y Sb.

8. The device of claim 1 , wherein Co within the multi-layered structure is replaced by a CoIr alloy and/or E includes an alloy selected from the group consisting of AlSn, AlGa, AlGe, AlGaGe, AlGaSn, AlGeSn, and AlGaGeSn.

9. The device of claim 1 , further comprising a substrate underlying the multi-layered structure.

10. The device of claim 9 , wherein a Mn x N or VN layer is interposed between the substrate and the multi-layered structure.

11. The device of claim 2 , further comprising a tunnel barrier layer overlying the first magnetic layer, thereby permitting current to pass through both the tunnel barrier layer and the first magnetic layer.

12. The device of claim 11 , comprising a second magnetic layer provided in contact with the tunnel barrier layer.

13. The device of claim 11 , wherein the tunnel barrier layer comprises MgO.

14. The device of claim 11 , wherein the tunnel barrier layer comprises Mg 1−z Al 2+(2/3)z O 4 , wherein −0.5<z<0.5.

15. A method, comprising:

using a device as a memory element, the device including:

a multi-layered structure that is non-magnetic at room temperature, the multi-layered structure comprising alternating layers of Co and E, wherein E comprises at least one other element selected from the group consisting of Ge, Ga, Sn and Al, wherein a composition of the multi-layered structure is represented by Co 1−x Ex, with x being in a range from 0.45 to 0.55; and

a combined layer in contact with the multi-layered structure, the combined layer including an insertion layer in contact with a Heusler compound, the insertion layer consisting of an element selected from the group consisting of Co, Fe, Mn and Al.

16. The method of claim 15 , wherein the memory element is a racetrack memory device.

17. A magnetic tunnel junction device, comprising:

a substrate;

a multi-layered structure that is non-magnetic at room temperature, the multi-layered structure comprising alternating layers of Co and E, wherein E comprises at least one other element selected from the group consisting of Ge, Ga, Sn and Al, wherein a composition of the multi-layered structure is represented by Co 1−x E x , with x being in a range from 0.42 to 0.55; and

a first magnetic layer in contact with the multi-layered structure, the first magnetic layer including an insertion layer in contact with a Heusler compound, consisting of an element selected from the group consisting of Co, Fe, Mn and Al;

a tunnel barrier layer on the first magnetic layer; and

a second magnetic layer on the tunnel barrier layer.

18. The magnetic tunnel junction device of claim 17 , further comprising a synthetic anti-ferromagnetic layer on the second magnetic layer.

19. The magnetic tunnel junction device of claim 18 , wherein the first magnetic layer has a magnetic moment that is switchable, and the second magnetic layer has a magnetic moment that is fixed.

20. The magnetic tunnel junction device of claim 18 , wherein the first magnetic layer has a magnetic moment that is fixed, and the second magnetic layer has a magnetic moment that is switchable.

21. The magnetic tunnel junction device of claim 17 , wherein the Heusler compound includes one or more of Mn 3.3−x Ge, Mn 3.3−x Sn, and Mn 3.3−y Sb, with x being in a range from 0 to 0.8 for Mn 3.3−x Ge and Mn 3.3−x Sn and with y being in a range from 0 to 1.3 for Mn 3.3−y Sb.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 14, 2021
From: JEONG, JAEWOO; IKHTIAR, .
To: SAMSUNG ELECTRONICS CO., LTD.
Reel/Frame 057799/0677 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 13, 2021
From: SAMANT, MAHESH; FILIPPOU, PANAGIOTIS CHARILAOS; FERRANTE, YARI; GARG, CHIRAG
To: INTERNATIONAL BUSINESS MACHINES CORPORATION
Reel/Frame 057771/0799 →
Continuity (1)
Related Publication 20230116592A1 · Apr 13, 2023
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