IP Library Granted Patent US 12,577,657
Granted Patent B2
US 12,577,657 · App. 18/041,190 · Granted Mar 17, 2026

Vibro-thermally assisted chemical vapor infiltration

Inventors: Christopher Timmons (Monroe, WA); Brett Kilcup (Moses Lake, WA); Frank Bruneel (Moses Lake, WA); Michael R. Pittman (North Price, UT); Henry R. Costantino (Woodinville, WA); Aaron M. Feaver (Seattle, WA)
Assignee: Group14 Technologies, Inc.
C23C16/045C23C16/24C23C16/4417C23C16/45557C23C16/52C23C16/56
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Quick Facts
Patent No.
US 12,577,657
App. No.
18/041,190
Granted
Mar 17, 2026
Kind
B2
Abstract

Reactor designs and process steps are provided for accomplishing vibro-thermally assisted chemical vapor infiltration (VTA-CVI). The provided reactors and processes overcome the challenges for manufacturing composite materials from porous scaffolds. Such reactors and processes find utility in various applications, including production of battery materials, including silicon-carbon composites suitable as anode materials for lithium ion batteries.

Claims (33)

1 . A process for preparing silicon-carbon composite particles, the process comprising:

(a) providing a particulate porous carbon;

(b) subjecting the particulate porous carbon to a vibrating surface to traverse the particulate porous carbon through a heated zone of a reactor, wherein the heated zone comprises a retort;

(c) providing a silicon-containing gas within the heated zone of a reactor to impregnate silicon within the particulate porous carbon, wherein the silicon-containing gas comprises silane, disilane, trisilane, tetrasilane, monochlorosilane, dichlorosilane, trichlorosilane, tetrachlorosilane, or any combination thereof; and

(d) discharging the resulting silicon-carbon composite particles from the reactor; and

(e) applying heat to an underside of the retort and a product discharge spout during the discharging of the resulting silicon-carbon composite particles in order to maintain the resulting silicon-carbon composite particles at the same temperature as the heated zone of the reactor, or at a temperature 0° C. to 300° C. lower than the heated zone of the reactor but above ambient.

2 . The process according to claim 1 , wherein the particulate porous carbon comprises a Dv50 between 1 μm and 100 μm.

3 . The process according to claim 1 , wherein the particulate porous carbon comprises greater than 80% micropores, less than 10% mesopores, and less than 10% macropores.

4 . The process according to claim 1 , wherein the heated zone is maintained at a temperature of 300° C. to 600° C.

5 . The process according to claim 1 , wherein the heated zone is maintained at a temperature of 600° C. to 1100° C.

6 . The process according to claim 1 , wherein the elutriation from the reactor is less than 1% per hour.

7 . The process according to claim 1 , wherein the silicon containing gas comprises silane.

8 . The process according to claim 1 , wherein the silicon-containing gas within the reactor further comprises an inert gas selected from the group consisting of hydrogen, nitrogen, argon, and combinations thereof.

9 . The process according to claim 1 , wherein the gas pressure within the reactor is at atmospheric pressure.

10 . The process according to claim 1 , wherein the gas pressure within the reactor is below atmospheric pressure.

11 . The process according to claim 1 , wherein the gas pressure within the reactor is above atmospheric pressure.

12 . The process according to claim 1 , wherein the resulting silicon-carbon composite particles are discharged from the reactor while maintaining the resulting silicon-carbon composite particles at a temperature 0° C. to 100° C. lower than the heated zone of the reactor.

13 . The process according to claim 1 , wherein the vibrating surface comprises a heated air plenum.

14 . The process according to claim 1 , wherein the vibrating surface comprises a heated retort.

15 . The process according to claim 1 , wherein the process is a batch process.

16 . The process according to claim 1 , wherein the process is a continuous process.

17 . The process according to claim 1 , wherein vibrating surface is sloped downwards relative to the travel direction of the particulate porous carbon.

18 . The process of claim 1 , further comprising:

(f) subjecting the silicon-carbon composite particles to a particle size reduction.

19 . The process of claim 18 , wherein:

the particulate porous carbon comprises a Dv50 between 1 μm and 100 μm and also comprises greater than 80% micropores, less than 10% mesopores, and less than 10% macropores;

in step (b), the temperature of the heated zone is maintained at a temperature between 30° and 600° C.;

in step (c), silane gas is provided within the heated zone of the reactor to impregnate silicon within the particulate porous carbon; and

in steps (d) and (e), the resulting silicon-carbon composite particles are discharged from the reactor while maintaining the resulting silicon-carbon composite particles at a temperature of at least 300° C.

20 . The process of claim 1 , wherein in step (b), the temperature of the heated zone is maintained at a temperature between 600 and 1200° C., and the process further comprises:

(b1) providing an activation gas to increase the porosity of the particulate porous carbon obtained in step (b); and

(b2) subjecting the particulate porous carbon obtained in step (b1) to a vibrating surface to traverse the particulate carbon through a heated zone of a reactor, wherein the temperature of the heated zone in maintained at a temperature between 30° and 600° C.; and

wherein in step (c), silane gas is provided within the heated zone of the reactor to impregnate silicon within the particulate porous carbon.

Assignments (2)
SECURITY INTEREST Recorded Jul 1, 2026
From: GROUP14 TECHNOLOGIES, INC.
To: NOMURA STRATEGIC VENTURES FUND 1, LP
Reel/Frame 075876/0771 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 12, 2026
From: TIMMONS, CHRISTOPHER; KILCUP, BRETT; BRUNEEL, FRANK; PITTMAN, MICHAEL; COSTANTINO, HENRY R.; FEAVER, AARON M.
To: GROUP14 TECHNOLOGIES, INC.
Reel/Frame 073775/0576 →
Continuity (2)
Provisional Application 63063822 · Aug 10, 2020
Related Publication 20230304146A1 · Sep 28, 2023
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