Granted Patent B2

US 12,568,809 · App. 18/076,210 · Granted Mar 3, 2026

Inventors: Ankur Aggarwal (Pleasanton, CA); Jeremy Matthew Plunkett (San Jose, CA)

Assignee: Celestial AI Inc.

H01L24/02H01L21/76805H01L21/76831H01L21/76877H01L21/76895H01L21/76898H01L23/481H01L23/5226H01L24/05H01L24/13H01L2224/02313H01L2224/02331H01L2224/02372H01L2224/02381H01L2224/05008H01L2224/05018H01L2224/05025H01L2224/05082H01L2224/05548H01L2224/05559H01L2224/05569H01L2224/05644H01L2224/05655H01L2224/13021H01L2224/13024H01L2224/13144H01L2224/13147H01L2224/13155

Abstract

Claims (27)

1 . A method comprising:

creating a partial through-substrate via (TSV) plug in a front side of a wafer, the wafer comprising an insulating layer and a substrate, the partial TSV plug having a front side and a back side, the back side of the partial TSV plug extending toward a front side of the substrate;

etching a cavity in a back side of the wafer that exposes a portion of the back side of the insulating layer near the back side of the partial TSV plug;

applying an insulator to the etched back side of the wafer, wherein the insulator covers the portion of the back side of the insulating layer near the back side of the partial TSV plug, and wherein a thickness of the insulator at a back side of the substrate is greater than a thickness of the insulator covering the portion of the back side of the insulating layer;

exposing a portion of the back side of the partial TSV plug by removing a portion of the insulator; and

depositing a conductive material to connect the exposed portion of the back side of the partial TSV plug to a surface on the back side of the wafer.

2 . The method of claim 1 , further comprising attaching adding a protective insulation layer to the conductive material, the protective insulation layer having a connection region formed therein.

3 . The method of claim 2 , further comprising attaching a conductive connection to the connection region.

4 . The method of claim 3 , wherein the conductive connection is selected from the group consisting of an aluminum pad, a Ni—Au pad, a solder ball, a copper pillar, and any other interconnection technique.

5 . The method of claim 1 , wherein the partial TSV plug has a vertical dimension and a horizontal dimension, and wherein a ratio between the vertical dimension and the horizontal dimension is in a range between 1:4 and 7:1.

6 . The method of claim 1 , wherein creating the partial TSV plug in the front side of the wafer further comprises, applying a plasma to the back side of the substrate to create a void.

7 . The method of claim 6 , further comprising lining or filling the void with a second conductive material.

8 . The method of claim 7 , wherein the second conductive material is selected from the group consisting of Copper, Aluminum, Tungsten, a solder, Tin/Silver, alloys thereof, a conductive ceramic, a conductive polymer, and combinations thereof.

9 . The method of claim 1 , wherein the back side of the partial TSV plug extends into one or more of the insulating layer, a routing layer, and an SOI layer.

10 . The method of claim 1 , wherein the back side of the partial TSV plug extends through a routing layer and an SOI layer and into the insulating layer but not into or through a bulk of the substrate.

11 . The method of claim 1 , wherein the thickness at a back side of the substrate where the insulator is applied is greater than the thickness of the insulator at the etched portion of the substrate and the exposed back side portion of the partial TSV plug.

12 . The method of claim 1 , wherein exposing the back side of the partial TSV plug by removing the portion of the insulator further comprises applying a directional etch to the etched back side of the substrate with the insulator.

13 . The method of claim 1 , wherein the partial TSV plug has a vertical dimension and a horizontal dimension, and wherein a ratio between the vertical dimension and the horizontal dimension is approximately one.

14 . The method of claim 1 , wherein the insulating layer is made from a first insulating material, and wherein the insulator is made from a second insulating material different from the first material.

15 . The method of claim 1 , wherein the insulating layer and the insulator are made from a same insulating material.

16 . A method comprising:

creating a partial through-substrate via (TSV) plug in a front side of a wafer, the wafer comprising an insulating layer and a substrate, the partial TSV plug having a front side and a back side, the back side of the partial TSV plug extending toward a front side of the substrate through a portion of the insulating layer without passing into the substrate;

etching a cavity in a back side of the wafer that exposes a portion of the back side of the insulating layer near the back side of the partial TSV plug;

applying an insulator to the etched back side of the wafer, wherein the insulator covers the portion of the back side of the insulating layer; back portion of the partial TSV plug;

exposing a portion of the back side of the partial TSV plug by removing a portion of the insulator; and

depositing a conductive material to connect the exposed portion of the back side of the partial TSV plug to a surface on the back side of the wafer.

17 . The method of claim 16 , wherein the back side of the partial TSV plug extends through a routing layer and an SOI layer and into the insulating layer but not into or through a bulk of the substrate.

Assignments (2)

Continuity (2)

References Cited (397)