Wiring substrate and display device including the same
A display device includes a display area and a pad area on a side of the display area, a plurality of conductive layers on a first substrate in the display area and the pad area and comprising a wiring and a conductive pattern, a via layer on the plurality of conductive layers, a plurality of electrodes on the via layer in the display area and spaced apart from each other, and a light emitting element on at least one of the plurality of electrodes. At least one of the conductive layers includes a first metal layer, a second metal layer on the first metal layer, and a third metal layer on the second metal layer. The second metal layer includes copper (Cu), the third metal layer includes a copper alloy, and a grain size of the third metal layer is smaller than a grain size of the second metal layer.
1 . A display device comprising:
a display area and a pad area disposed on a side of the display area;
a plurality of conductive layers disposed on a first substrate in the display area and the pad area and comprising a wiring and a conductive pattern;
a via layer disposed on the plurality of conductive layers;
a plurality of electrodes disposed on the via layer in the display area and spaced apart from each other; and
a light emitting element disposed on at least one of the plurality of electrodes, wherein
at least one of the plurality of conductive layers comprises:
a first metal layer;
a second metal layer disposed on the first metal layer; and
a third metal layer disposed on the second metal layer,
the second metal layer comprises copper (Cu),
the third metal layer comprises a copper alloy, and
a grain size of the third metal layer is smaller than a grain size of the second metal layer.
2 . The display device of claim 1 , wherein the third metal layer comprises:
a main component comprising copper; and
an impurity metal comprising at least one of silver (Ag), magnesium (Mg), aluminum (Al), indium (In), niobium (Nb), and boron (B).
3 . The display device of claim 2 , wherein
the first metal layer comprises titanium (Ti), and
the second metal layer comprises pure copper (Cu).
4 . The display device of claim 1 , wherein the grain size of the third metal layer is a quarter or less of the grain size of the second metal layer.
5 . The display device of claim 1 , wherein a thickness of the third metal layer is smaller than a thickness of the second metal layer.
6 . The display device of claim 5 , wherein the thickness of the third metal layer is about 100 Å or more.
7 . The display device of claim 5 , wherein
a thickness of the first metal layer is in a range of about 200 Å to about 500 Å, and
the thickness of the second metal layer is in a range of about 3000 Å to about 17000 Å.
8 . The display device of claim 1 , wherein
each of the wiring and the conductive pattern comprises the first metal layer, the second metal layer, and the third metal layer, and
a line edge roughness (LER) value of each of the wiring and the conductive pattern is about 0.195 μm or less.
9 . The display device of claim 1 , wherein
the plurality of conductive layers comprise:
a first conductive layer comprising a bottom metal layer disposed in the display area and a first pad wiring disposed in the pad area;
a second conductive layer disposed on the first conductive layer and comprising a plurality of gate electrodes disposed in the display area and a second pad wiring disposed in the pad area; and
a third conductive layer disposed on the second conductive layer and comprising a first conductive pattern disposed in the display area and a pad electrode lower layer disposed in the pad area,
the via layer is disposed on the third conductive layer in the display area, and
the display device further comprising:
a pad electrode upper layer disposed on the pad electrode lower layer in the pad area; and
a pad electrode capping layer disposed on the pad electrode upper layer.
10 . The display device of claim 9 , further comprising:
a gate insulating layer disposed between the first conductive layer and the second conductive layer;
a first interlayer insulating layer disposed between the second conductive layer and the third conductive layer; and
a first passivation layer disposed on the third conductive layer,
wherein each of the gate insulating layer, the first interlayer insulating layer, and the first passivation layer comprises an inorganic insulating material.
11 . The display device of claim 10 , wherein
the plurality of conductive layers further comprise a fourth conductive layer disposed on the third conductive layer and comprising a first voltage wiring and a second voltage wiring, and
the display device further comprises:
a second interlayer insulating layer disposed on the first passivation layer; and
a second passivation layer disposed on the fourth conductive layer.
12 . The display device of claim 11 , wherein
the via layer comprises a trench portion exposing a portion of an upper surface of the second passivation layer,
the plurality of electrodes comprise a first electrode and a second electrode spaced apart from the first electrode,
at least a portion of each of the first electrode and the second electrode is directly disposed on the second passivation layer in the trench portion, and
the light emitting element is disposed in the trench portion.
13 . The display device of claim 9 , wherein
the plurality of electrodes comprise a first electrode and a second electrode spaced apart from the first electrode, and
the display device further comprises:
a first insulating layer disposed on the first electrode and the second electrode;
a first connection electrode disposed on the first electrode and electrically contacting the light emitting element; and
a second connection electrode disposed on the second electrode and electrically contacting the light emitting element.
14 . The display device of claim 13 , wherein
the pad electrode upper layer, the first electrode, and the second electrode comprise a same material, and
the pad electrode capping layer, the first connection electrode, and the second connection electrode comprise a same material.
15 . The display device of claim 13 , wherein the light emitting element is disposed on the first insulating layer.
16 . A wiring substrate comprising:
a plurality of conductive layers disposed on a substrate and comprising a wiring and a conductive pattern; and
at least one insulating layer disposed between adjacent ones of the plurality of conductive layers, wherein
at least one of the plurality of conductive layers comprises:
a first metal layer;
a second metal layer disposed on the first metal layer; and
a third metal layer disposed on the second metal layer,
the second metal layer comprises pure copper (Cu),
the third metal layer comprises a copper alloy, and
a grain size of the third metal layer is smaller than a grain size of the second metal layer.
17 . The wiring substrate of claim 16 , wherein
the first metal layer comprises titanium (Ti), and
the third metal layer comprises:
a main component comprising copper; and
an impurity metal comprising at least one of silver (Ag), magnesium (Mg), aluminum (Al), indium (In), niobium (Nb), and boron (B).
18 . The wiring substrate of claim 16 , wherein the grain size of the third metal layer is a quarter or less of the grain size of the second metal layer.
19 . The wiring substrate of claim 16 , wherein
the first metal layer has a thickness in a range of about 200 Å to about 500 Å,
the second metal layer has a thickness in a range of about 3000 Å to about 17000 Å, and
the third metal layer has a thickness of about 100 Å or more.
20 . The wiring substrate of claim 16 , wherein
each of the wiring and the conductive pattern comprises the first metal layer, the second metal layer, and the third metal layer, and
a line edge roughness (LER) value of each of the wiring and the conductive pattern is about 0.195 μm or less.
21 . The wiring substrate of claim 16 , further comprising:
a display area and a pad area disposed adjacent to the display area,
wherein the plurality of conductive layers comprise:
a first conductive layer comprising a bottom metal layer disposed in the display area and a first pad wiring disposed in the pad area;
a second conductive layer disposed on the first conductive layer and comprising a plurality of gate electrodes disposed in the display area and a second pad wiring disposed in the pad area; and
a third conductive layer disposed on the second conductive layer and comprising a first conductive pattern disposed in the display area and a pad electrode lower layer disposed in the pad area.
22 . The wiring substrate of claim 21 , further comprising:
a buffer layer disposed on the first conductive layer;
a gate insulating layer disposed between the buffer layer and the second conductive layer in the display area;
an interlayer insulating layer disposed between the second conductive layer and the third conductive layer; and
a first passivation layer disposed on the third conductive layer, wherein
each of the gate insulating layer, the interlayer insulating layer, and the first passivation layer comprises an inorganic insulating material, and
the second pad wiring is directly disposed on the buffer layer.