Semiconductor device
A semiconductor device may include contact plug structures on a substrate, and an insulation structure filling a space between the contact plug structures to insulate the contact plug structures from each other. The contact plug structures may be spaced apart from each other in a first direction. The insulation structure may include a first insulation pattern and a second insulation pattern. The second insulation pattern may include an insulation material having an etch selectivity with respect to silicon oxide. The first insulation pattern may contact a portion of sidewalls of the second insulation pattern and a portion of sidewalls of the contact plug structure. The first insulation pattern may include a material having a band gap higher than a band gap of the second insulation pattern.
1. A semiconductor device, comprising:
contact plug structures on a substrate, the contact plug structures being spaced apart from each other in a first direction; and
an insulation structure filling a space between the contact plug structures to insulate the contact plug structures from each other, the insulation structure including a first insulation pattern and a second insulation pattern,
wherein the second insulation pattern includes an insulation material having an etch selectivity with respect to silicon oxide, and
wherein the first insulation pattern contacts sidewalls of the second insulation pattern and sidewalls of the contact plug structure, and the first insulation pattern includes a material having a band gap higher than a band gap of the second insulation pattern.
2. The semiconductor device of claim 1 , wherein the first insulation pattern includes a material having a band gap higher than a band gap of a silicon nitride.
3. The semiconductor device of claim 1 , wherein the first insulation pattern includes aluminum nitride, silicon oxide, aluminum oxide, aluminum oxynitride, silicon oxynitride or BN.
4. The semiconductor device of claim 1 , wherein the first insulation pattern includes aluminum-doped silicon nitride or aluminum-doped silicon oxynitride.
5. The semiconductor device of claim 1 , wherein the second insulation pattern includes silicon nitride, SiOCN, BN or SiOC.
6. The semiconductor device of claim 1 , wherein the insulation structure is formed in an opening between the contact plug structures, and
the first insulation pattern is formed along sidewalls and bottom of the opening, and the second insulation pattern is formed on the first insulation pattern to fill the opening.
7. The semiconductor device of claim 1 , wherein the first insulation pattern surrounds sidewalls and a bottom of the second insulation pattern.
8. The semiconductor device of claim 1 , wherein the first insulation pattern contacts at least sidewalls in the first direction of the second insulation pattern.
9. The semiconductor device of claim 1 , wherein the first insulation pattern surrounds sidewalls of the contact plug structure.
10. The semiconductor device of claim 1 , further comprising bit line structures extending in the first direction and spaced apart from each other in a second direction perpendicular to the first direction on the substrate, and
the contact plug structures and insulation structures are disposed between the bit line structures.
11. A semiconductor device, comprising:
bit line structures on a substrate, the bit line structures extending in a first direction and spaced apart from each other in a second direction perpendicular to the first direction;
contact plug structures on the substrate between the bit line structures, the contact plug structures being spaced apart from each other in the first direction; and
an insulation structure filling an opening between the contact plug structures to insulate the contact plug structures from each other, the insulation structure including a first insulation pattern and a second insulation pattern,
wherein the second insulation pattern includes an insulation material having an etch selectivity with respect to silicon oxide,
wherein the first insulation pattern surrounds sidewalls and a bottom of the second insulation pattern, and the first insulation pattern includes a material having a band gap higher than a band gap of the second insulation pattern.
12. The semiconductor device of claim 11 , wherein the first insulation pattern includes a material having a band gap higher than that of silicon nitride.
13. The semiconductor device of claim 11 , wherein the first insulation pattern includes aluminum nitride, silicon oxide, aluminum oxide, aluminum oxynitride, silicon oxynitride or BN.
14. The semiconductor device of claim 11 , wherein the first insulation pattern includes aluminum-doped silicon nitride or aluminum-doped silicon oxynitride.
15. The semiconductor device of claim 11 , wherein the second insulation pattern includes silicon nitride, SiOCN, BN or SiOC.
16. The semiconductor device of claim 11 , further comprising a spacer structure formed on a sidewall of each of the bit line structures,
wherein the first insulation pattern contacts the spacer structure.
17. A semiconductor device, comprising:
an active pattern on a substrate;
gate structures buried in an upper portion of the active pattern, the gate structures being spaced apart from each other in a first direction, and the gate structures extending in a second direction perpendicular to the first direction;
bit line structures on the substrate, the bit line structures extending in the first direction and spaced apart from each other in the second direction;
a spacer structure on a sidewall of each of the bit line structures;
contact plug structures formed in an opening between the bit line structures on the substrate, the contact plug structures being spaced apart from each other in the first direction; and
a fence insulation structure filling a region between the bit line structures and between the contact plug structures to insulate the contact plug structures from each other, the fence insulation structure including a first insulation pattern and a second insulation pattern,
wherein the second insulation pattern includes silicon nitride, and
wherein the first insulation pattern contacts a portion of sidewalls of the second insulation pattern and a portion of sidewalls of the contact plug structure, and the first insulation pattern includes a material having a band gap higher than a band gap of the second insulation pattern.
18. The semiconductor device of claim 17 , wherein the fence insulation structure is disposed to face the gate structures in a vertical direction.
19. The semiconductor device of claim 17 , wherein the first insulation pattern surrounds sidewalls and a bottom of the second insulation pattern.
20. The semiconductor device of claim 17 , wherein the first insulation pattern includes aluminum nitride, silicon oxide, aluminum oxide, aluminum oxynitride, silicon oxynitride or BN.