IP Library Granted Patent US 11,711,928
Granted Patent B2
US 11,711,928 · App. 18/105,856 · Granted Jul 25, 2023

3D memory devices and structures with control circuits

Inventors: Zvi Or-Bach (Haifa, IL); Jin-Woo Han (San Jose, CA); Brian Cronquist (Klamath Falls, OR)
Assignee: Monolithic 3D Inc.
H10B80/00H01L23/544H01L24/08H01L24/80H01L25/0657H01L25/18H01L25/50H01L2224/08145
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Quick Facts
Patent No.
US 11,711,928
App. No.
18/105,856
Granted
Jul 25, 2023
Kind
B2
Abstract

A semiconductor device, the device including: a first level including control circuits, where the control circuits include a plurality of first transistors and a plurality of metal layers; and a memory level disposed on top of the first level, where the memory level includes an array of memory cells, where each of the memory cells includes at least one second transistor, where the control circuits control access to the array of memory cells, where the first level is bonded to the memory level, where the bonded includes oxide to oxide bonding regions and a plurality of metal to metal bonding regions, and where at least a portion of the array of memory cells is disposed directly above at least one of the plurality of metal to metal bonding regions.

Claims (75)

1. A semiconductor device, the device comprising:

a first level comprising control circuits,

wherein said control circuits comprise a plurality of first transistors and a plurality of metal layers;

a memory level disposed on top of said first level,

wherein said memory level comprises an array of memory cells,

wherein each of said memory cells comprises at least one second transistor,

wherein said control circuits control access to said array of memory cells,

wherein said first level is bonded to said memory level,

wherein said bonded comprises oxide to oxide bonding regions and a plurality of metal to metal bonding regions,

wherein at least a portion of said array of memory cells is disposed directly above at least one of said plurality of metal to metal bonding regions,

wherein said memory level comprises at least one redundancy memory array, and

wherein said control circuits control access is switchable to access or not access said at least one redundancy memory array.

2. The device according to claim 1 ,

wherein said memory level comprises a single crystal silicon layer having a thickness of less than 30 microns and greater than 0.1 microns.

3. The device according to claim 1 ,

wherein said array of memory cells comprises DRAM memory.

4. The device according to claim 1 ,

wherein said array of memory cells comprises 3D NAND memory.

5. The device according to claim 1 ,

wherein said memory level comprises a plurality of memory layers.

6. The device according to claim 1 ,

wherein said array of memory cells comprises at least four sub-arrays, and

wherein said control circuits independently control access to each of said sub-arrays.

7. The device according to claim 1 ,

wherein said array of memory cells comprises a plurality of word-lines (“WL”), and

wherein at least one of said plurality of word-lines is directly connected to at least one of said plurality metal to metal bonding regions.

8. A semiconductor device, the device comprising:

a first level comprising control circuits,

wherein said control circuits comprise a plurality of first transistors and a plurality of metal layers;

a memory level disposed on top of said first level,

wherein said memory level comprises an array of memory cells,

wherein each of said memory cells comprises at least one second transistor,

wherein said control circuits control access to said array of memory cells,

wherein said first level is bonded to said memory level,

wherein said bonded comprises oxide to oxide bonding regions and a plurality of metal to metal bonding regions,

wherein said array of memory cells comprises a plurality of memory control-lines, and

wherein at least one of said plurality of memory control-lines is directly connected to at least one of said metal to metal bonding regions: and

a redundancy memory array, and

wherein said memory control-lines are connectable to control said redundancy memory array.

9. The device according to claim 8 ,

wherein said first level comprises a single crystal silicon layer having a thickness of less than 30 microns and greater than 0.1 microns.

10. The device according to claim 8 ,

wherein said array of memory cells comprises DRAM memory.

11. The device according to claim 8 ,

wherein said array of memory cells comprises 3D NAND memory.

12. The device according to claim 8 ,

wherein said first memory level comprises a plurality of memory layers.

13. The device according to claim 8 ,

wherein said array of memory cells comprises at least four sub-arrays, and

wherein said control circuits independently control each of said sub-arrays.

14. The device according to claim 8 ,

wherein at least one of said memory cells is disposed directly above at least one of said metal to metal bonding regions.

15. A semiconductor device, the device comprising:

a first level comprising control circuits,

wherein said control circuits comprise a plurality of first transistors and a plurality of metal layers; and

a memory level disposed on top of said first level,

wherein said memory level comprises an array of memory cells,

wherein each of said memory cells comprises at least one second transistor,

wherein said control circuits control access to said array of memory cells,

wherein said first level is bonded to said memory level,

wherein said bonded comprises oxide to oxide bonding regions and a plurality of metal to metal bonding regions,

wherein said array of memory cells comprises at least four sub-arrays,

wherein said control circuits independently control access to each of said sub-arrays, and

wherein said first level has been processed by a more advanced node than a node used for said memory level.

16. The device according to claim 15 ,

wherein said memory array comprises a plurality of word-lines (“WL”), and

wherein at least one of said word-lines is directly connected to at least one of said metal to metal bonding regions.

17. The device according to claim 15 ,

wherein said array of memory cells comprises DRAM memory.

18. The device according to claim 15 ,

wherein said array of memory cells comprises 3D NAND memory.

19. The device according to claim 15 ,

wherein said memory level comprises a plurality of memory layers.

20. The device according to claim 15 ,

wherein at least one of said memory cells is disposed directly above at least one of said metal to metal bonding regions.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 17, 2023
From: OR-BACH, ZVI; CRONQUIST, BRIAN; HAN, JIN-WOO
To: MONOLITHIC 3D INC.
Reel/Frame 063674/0576 →
Continuity (12)
Continuation In Part 17949988 · Sep 21, 2022
Continuation In Part 17712875 · Apr 4, 2022
Continuation In Part 17567049 · Dec 31, 2021
Continuation In Part 17485504 · Sep 27, 2021
Continuation In Part 17372476 · Jul 11, 2021
Continuation In Part 17214883 · Mar 28, 2021
Continuation In Part 16337665
Provisional Application 62517152 · Jun 8, 2017
Provisional Application 62471963 · Mar 16, 2017
Provisional Application 62440720 · Dec 30, 2016
Provisional Application 62406376 · Oct 10, 2016
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