Selective liner deposition for via resistance reduction
Methods of forming devices comprise forming a dielectric material on a substrate, the dielectric layer comprising at least one feature defining a gap including sidewalls and a bottom. The methods include passivating a metal material at a bottom of the gap with an alkyl reactant to form a passivation layer on the metal material, the gap defined by the bottom and sidewalls comprising the dielectric material with having a barrier layer thereon. A metal liner is selectively deposited on the barrier layer on the sidewall over the passivation layer on the bottom.
1 . A method of forming a microelectronic device, the method comprising:
passivating a metal material at a bottom of a gap with an alkyl reactant comprising one or more of an alkyl halide or an alkyl pseudohalide to form a passivation layer on the metal material, the gap defined by the bottom and sidewalls comprising a dielectric material having a barrier layer thereon; and
selectively depositing a metal liner on the barrier layer.
2 . The method of claim 1 , wherein the metal material comprises one or more of ruthenium (Ru), molybdenum (Mo), copper (Cu), cobalt (Co), tantalum (Ta), or tungsten (W).
3 . The method of claim 1 , wherein the barrier layer comprises tantalum nitride (TaN).
4 . The method of claim 1 , further comprising:
selectively depositing the barrier layer on the dielectric material over the metal material.
5 . The method of claim 4 , wherein selectively depositing the barrier layer comprises forming a self-assembled monolayer (SAM) on the metal material, depositing the barrier layer on the sidewalls of the gap, and removing the SAM.
6 . The method of claim 1 , wherein the alkyl reactant is the alkyl halide.
7 . The method of claim 6 , wherein the alkyl halide has a general formula RX, wherein R is an alkyl group having 1 to 20 carbon atoms and X is a halogen comprising one or more of F, CI, Br, I, or CF 3 .
8 . The method of claim 1 , wherein the alkyl reactant is the alkyl pseudohalide.
9 . The method of claim 8 , wherein the alkyl pseudohalide has a general formula of Ps-Ps or Ps-X, where Ps is a pseudohalogen group comprising one or more of cyanide (—CN), cyanate (—OCN), carbonyl (—CO), thiocyanate (—SCN), azide (—Ns), isocyanate (—NCO), isothiocyanate (—NCS), selenocyanate (—SeCN), or isoselenocyanate (—NCSe), and X is a halogen comprising one or more of F, CI, Br, I, or CF 3 .
10 . The method of claim 1 , wherein the metal liner comprises one or more of ruthenium (Ru), cobalt (cobalt), molybdenum (Mo), or tantalum (Ta).
11 . The method of claim 10 , wherein the metal liner consists essentially of ruthenium and a selectivity of the metal liner deposition is greater than or equal to 5.
12 . The method of claim 11 , wherein the metal liner is deposited by chemical vapor deposition.
13 . The method of claim 1 , further comprising removing the passivation layer by exposing the microelectronic device to hydrogen (H 2 ).
14 . The method of claim 13 , wherein exposing the microelectronic device to hydrogen (H 2 ) comprises exposing the microelectronic device to a thermal hydrogen (H 2 ) soak.
15 . The method of claim 13 , wherein exposing the microelectronic device to hydrogen (H 2 ) comprises exposing the microelectronic device to a H 2 plasma treatment.
16 . The method of claim 13 , further comprising a gap fill process to fill the gap with one or more of copper (Cu), cobalt (Co), or tungsten (W).
17 . The method of claim 1 , wherein the method reduces a resistance of a via by at least 20% as compared to a resistance of a via in a microelectronic device where a metal liner is not selectively deposited.
18 . A method of forming a microelectronic device, the method comprising:
forming a dielectric material on a substrate, the dielectric material comprising at least one feature defining a gap including sidewalls and a bottom, the bottom comprising a metal material;
selectively depositing a self-assembled monolayer (SAM) on the metal material;
depositing a barrier layer on the sidewalls of the gap;
removing the self-assembled monolayer (SAM) to expose the metal material;
passivating the metal material with one or more of an alkyl halide or an alkyl pseudohalide to form a passivation layer on the metal material; and
selectively depositing a metal liner on the barrier layer.
19 . The method of claim 18 , wherein the alkyl halide has a general formula RX, wherein R is an alkyl group having 1 to 20 carbon atoms and X is a halogen comprising one or more of F, CI, Br, I, CF 3 , and wherein the alkyl pseudohalide has a general formula of Ps-Ps or Ps-X, where Ps is a pseudohalogen group comprising one or more of cyanide (—CN), cyanate (—OCN), carbonyl (—CO), thiocyanate (—SCN), azide (—N 3 ), isocyanate (—NCO), isothiocyanate (—NCS), selenocyanate (—SeCN), or isoselenocyanate (—NCSe), and X is a halogen comprising one or more of F, CI, Br, I, or CF 3 .
20 . The method of claim 18 , wherein the metal liner is deposited with a selectivity of greater than or equal to 5.