Bottom-electrode interface structure for memory
View Patent ↗1 . Various embodiments of the present disclosure are directed towards a ferroelectric random-access memory (FeRAM) cell or some other suitable type of memory cell comprising a bottom-electrode interface structure. The memory cell further comprises a bottom electrode, a switching layer over the bottom electrode, and a top electrode over the switching layer. The bottom-electrode interface structure separates the bottom electrode and the switching layer from each other. Further, the interface structure is dielectric and is configured to block or otherwise resist metal atoms and/or impurities in the bottom electrode from diffusing to the switching layer. By blocking or otherwise resisting such diffusion, leakage current may be decreased. Further, endurance of the memory cell may be increased.
1. An integrated circuit (IC) chip comprising a memory cell, wherein the memory cell comprises:
a bottom electrode;
a switching layer over the bottom electrode;
a top electrode over the switching layer; and
an interface structure separating the bottom electrode and the switching layer from each other, wherein the interface structure is dielectric;
wherein the bottom electrode comprises a metal nitride, wherein the interface structure comprises a metal oxynitride at a first interface with the bottom electrode, and wherein chlorine ions are at the interface structure and decrease in concentration from the switching layer to the bottom electrode.
2. The IC chip according to claim 1 , wherein the switching layer overlies and directly contacts the interface structure at a second interface, and wherein the interface structure comprises the metal oxynitride at the second interface.
3. The IC chip according to claim 1 , wherein the interface structure is more amorphous than the bottom electrode.
4. The IC chip according to claim 1 , wherein the bottom electrode and the interface structure share a common metal element.
5. The IC chip according to claim 1 , wherein the interface structure is configured to block metal atoms and/or impurities in the bottom electrode from diffusing to the switching layer.
6. The IC chip according to claim 1 , further comprising:
a wire underlying the bottom electrode; and
a barrier layer separating the wire from the bottom electrode and configured to block material of the wire from diffusing to the bottom electrode;
wherein the barrier layer comprises active metal atoms having a diffusion coefficient more than about 10 −13 squared centimeters per second (cm 2 s −1 ), and wherein the bottom electrode is configured to block diffusion of the active metal atoms.
7. The IC chip according to claim 1 , further comprising:
a wire underlying the bottom electrode; and
a barrier layer separating the wire from the bottom electrode and configured to block material of the wire from diffusing to the bottom electrode;
wherein the barrier layer comprises tantalum, and wherein the bottom electrode comprises titanium nitride or tungsten nitride.
8. The IC chip according to claim 1 , wherein the interface structure is between and contacts the bottom electrode and the switching layer, wherein the switching layer is between and contacts the interface structure and the top electrode, and wherein the switching layer is a single ferroelectric material from the interface structure to the top electrode.
9. An integrated circuit (IC) chip comprising a ferroelectric random-access memory (FeRAM) cell, wherein the FeRAM cell comprises:
a bottom electrode;
a ferroelectric switching layer over the bottom electrode;
a top electrode over the ferroelectric switching layer; and
an interface structure separating the bottom electrode and the ferroelectric switching layer from each other, wherein the interface structure is dielectric and consists essentially of a metal element and a non-metal element, wherein the metal element is common to the interface structure and the bottom electrode, and wherein the non-metal element is oxygen and decreases in concentration from a top of the interface structure to a bottom of the interface structure.
10. The IC chip according to claim 9 , wherein the bottom electrode is devoid of the non-metal element.
11. The IC chip according to claim 9 , wherein the concentration discretely changes from the top of the interface structure to the bottom of the interface structure.
12. The IC chip according to claim 9 , wherein the top of the interface structure directly contacts the ferroelectric switching layer, and wherein the bottom of the interface structure directly contacts the bottom electrode.
13. The IC chip according to claim 9 , further comprising:
an additional interface structure separating the top electrode and the ferroelectric switching layer from each other, wherein the additional interface structure is dielectric and is configured to block metal atoms and/or impurities in the top electrode from diffusing to the ferroelectric switching layer.
14. The IC chip according to claim 9 , further comprising:
a wire underlying and directly contacting the bottom electrode;
wherein the wire and the bottom electrode comprise active metal atoms having a diffusion coefficient more than about 10 −13 squared centimeters per second (cm 2 s −1 ), and wherein the interface structure is configured to block diffusion of the active metal atoms to the ferroelectric switching layer.
15. An integrated circuit (IC) chip, comprising:
a wire; and
a memory cell overlying the wire and comprising:
a bottom electrode;
a metal oxide layer overlying the bottom electrode;
a top electrode overlying the metal oxide layer; and
an interface structure separating the bottom electrode and the metal oxide layer from each other, and further comprising a non-metal element;
wherein the bottom electrode is a single material, which comprises a metal element and extends from the wire to the interface structure, and wherein the metal element has a diffusion coefficient greater than an active-metal value of 10 −13 squared centimeters per second (cm 2 s −1 ).
16. The IC chip according to claim 15 , wherein the bottom electrode defines a via protruding towards the wire at a bottom of the bottom electrode.
17. The IC chip according to claim 16 , wherein the metal oxide layer overlies and directly contacts the interface structure.
18. The IC chip according to claim 15 , wherein the metal element is copper or tantalum.
19. The IC chip according to claim 15 , wherein the single material consists essentially of the metal element, and wherein the interface structure consists essentially of a metal oxide, which comprises the metal element.
20. The IC chip according to claim 9 , further comprising:
an additional interface structure between and contacting the top electrode and the ferroelectric switching layer, wherein the interface structure is between and contacts the bottom electrode and the ferroelectric switching layer, and wherein the ferroelectric switching layer is a single ferroelectric material from the interface structure to the additional interface structure.