Butted body contact for SOI transistor and amplifier circuit
Systems, methods, and apparatus for an improved body tie construction are described. The improved body tie construction is configured to have a lower resistance body tie exists when the transistor is “off” (Vg approximately 0 volts). When the transistor is “on” (Vg>Vt), the resistance to the body tie is much higher, reducing the loss of performance associated with presence of body tie. Space efficient Body tie constructions adapted for cascode configurations are also described.
1. A semiconductor structure, comprising:
a) a first transistor and a second transistor, each transistor of the first and second transistors comprising:
a drain region having a first conductivity type;
a source region having the first conductivity type;
a body region having a second conductivity type;
wherein the source region of the first transistor and the drain region of the second transistor are formed in a common source/drain region;
b) at least one body contact region of the second conductivity type contained within the common source/drain region;
c) an isolation region configured to electrically isolate the at least one body contact region from the common source/drain region; and
d) at least one body tab of the second conductivity type configured to electrically connect the at least one body contact region to the body region of the first transistor.
2. The semiconductor structure according to claim 1 , wherein:
the at least one body tab comprises a first end that contacts the body region of the first transistor and a second end that contacts the at least one body contact region.
3. The semiconductor structure according to claim 1 , wherein:
the isolation region is of the second conductivity type.
4. The semiconductor structure according to claim 1 , wherein:
the isolation region is electrically connected to the body region of the first transistor.
5. The semiconductor structure according to claim 1 , wherein:
the isolation region is electrically connected to the body region of the first transistor through the at least one body tab.
6. The semiconductor structure according to claim 1 , wherein:
the at least one body contact region is fully contained within the common source/drain region.
7. The semiconductor structure according to claim 1 , wherein:
the at least one body contact region is fully surrounded by regions of the second conductivity type.
8. The semiconductor structure according to claim 1 , wherein:
the isolation region and the at least one body tab region are contiguous.
9. The semiconductor structure according to claim 1 , further comprising:
an additional body contact region of the second conductivity type contained within the source region of the second transistor; and
an additional body tab of the second conductivity type in contact with the body region of the second transistor and the additional body contact region.
10. The semiconductor structure according to claim 9 , wherein:
the additional body tab is configured to electrically connect the additional body contact region to the body region of the second transistor.
11. The semiconductor structure according to claim 9 , further comprising:
a last body contact region of the second conductivity type fully contained within a region that abuts the source region of the second transistor; and
a last body tab of the second conductivity type in contact with the body region of the second transistor and the last body contact region, the last body tab configured to electrically connect the last body contact region to the body region of the second transistor.
12. The semiconductor structure according to claim 1 , further comprising:
an additional one or more body tabs of the second conductivity type in contact with the body region of the first transistor and the at least one body contact region.
13. The semiconductor structure according to claim 12 , wherein:
the at least one body contact region comprises two or more body contact regions.
14. The semiconductor structure according to claim 1 , further comprising:
a conductive contact atop a portion of the at least one body contact region.
15. The semiconductor structure according to claim 1 , wherein:
the at least one body contact region is partially contained within the common source/drain region.
16. The semiconductor structure according to claim 1 , wherein:
the semiconductor structure further comprises a non-conductive isolation region formed in the common source/drain region, the non-conductive isolation region configured to form an interruption in a region of the body region of the second transistor to divide the body region into separate body regions.
17. The semiconductor structure according to claim 16 , wherein:
the non-conductive isolation region is further configured to extend the interruption into the source region of the second transistor.
18. The semiconductor structure according to claim 16 , wherein:
the at least one body contact region abuts the non-conductive isolation region.
19. The semiconductor structure according to claim 16 , wherein:
the interruption divides the source region of the second transistor into separate source regions.
20. The semiconductor structure according to claim 1 , wherein:
each transistor of the first and second transistors is a silicon-on-insulator (SOI) transistor, fabricated using a silicon-on-insulator (SOI) technology.
21. The semiconductor structure according to claim 20 , wherein:
a silicon layer of the SOI transistor is a thin-film silicon layer.
22. The semiconductor structure according to claim 20 , further comprising:
an insulating layer; and
a silicon layer overlying the insulating layer,
wherein the drain region, the source region and the body region of each transistor of the first and second transistors, the at least one body contact region, and the at least one body tab are formed in the silicon layer and extend through the silicon layer to reach the insulating layer.
23. The semiconductor structure according to claim 1 , further comprising:
at least one polysilicon tab configured to define the at least one body tab.
24. An amplifier circuit comprising the semiconductor structure according to claim 1 .