Selectively raised source/drain transistor
A lower raised source/drain region is formed on a planar source/drain region of a planar field effect transistor or a surface of a portion of semiconductor fin adjoining a channel region of a fin field effect transistor. At least one contact-level dielectric material layer is formed and planarized, and a contact via hole extending to the lower raised source/drain region is formed in the at least one contact-level dielectric material layer. An upper raised source/drain region is formed on a top surface of the lower raised source/drain region. A metal semiconductor alloy portion and a contact via structure are formed within the contact via hole. Formation of the upper raised source/drain region is limited to a bottom portion of the contact via hole, thereby preventing formation of, and increase of parasitic capacitance by, any additional raised structure in source/drain regions that are not contacted.
1. A semiconductor structure including a field effect transistor (FET), said semiconductor structure comprising:
an underlying source/drain region;
a lower raised source/drain region located on said underlying source/drain region;
at least one contact-level dielectric layer overlying said lower raised source/drain region; and
a stack comprising an upper raised source/drain region in contact with said lower raised source/drain region and a contact via structure embedded within said at least one contact-level dielectric layer, wherein said upper raised source/drain region has a same horizontal cross-sectional area as a bottom portion of said contact via structure.
2. The semiconductor structure of claim 1 , wherein said FET further comprises a body region that is in contact with said underlying source/drain region, and an interface between said lower raised source/drain region and said underlying source/drain region is coplanar with a surface of said body region.
3. The semiconductor structure of claim 1 , wherein said FET further comprises:
a body region in contact with said underlying source/drain region;
another underlying source/drain region in contact with said body region; and
another lower raised source/drain region located on said another underlying source/drain region, wherein all surfaces of said another lower raised source/drain region are in contact with said another underlying source/drain region or said at least one contact-level dielectric layer or a shallow trench isolation structure.
4. The semiconductor structure of claim 1 , wherein said stack further comprises a metal semiconductor alloy portion in contact with said upper raised source/drain region and said contact via structure.
5. The semiconductor structure of claim 1 , wherein a bottom surface of said metal semiconductor alloy portion has a same area as a top surface of said upper raised source/drain region.
6. The semiconductor structure of claim 1 , wherein said upper raised source/drain region is epitaxially aligned to said lower raised source/drain region and to said underlying source/drain region.
7. The semiconductor structure of claim 1 , wherein said upper raised source/drain region of said FET further comprises another source/drain region, one of said source/drain region and said another source/drain region is a source region of said FET, and another of said source/drain region and said another source/drain region is a drain region of said FET.
8. The semiconductor structure of claim 1 , wherein said FET is a planar FET, and a surface of said underlying source/drain region is coplanar with an interface between a gate dielectric and a body region of said FET.
9. The semiconductor structure of claim 8 , wherein said underlying source/drain region, said lower raised source/drain region, and said upper raised source/drain region collectively constitute one of a source and a drain of said FET, and another of said source and said drain of said FET does not extend above a plane of an interface between said lower raised source/drain region and said upper raised source/drain region.
10. The semiconductor structure of claim 1 , wherein said FET is a fin FET including at least one semiconductor fin and a gate electrode straddling over said at least one semiconductor fin, and said underlying source/drain region and a body region are located within one of said at least one semiconductor fin.
11. The semiconductor structure of claim 10 , wherein said at least one semiconductor fin is a plurality of semiconductor fins, said upper raised source/drain region is in contact with a plurality of lower raised source/drain regions including said lower raised source/drain region, and said contact via structure overlies said plurality of lower raised source/drain regions.
12. A method of forming a semiconductor structure comprising:
forming a field effect transistor (FET) comprising at least an underlying source/drain region and a lower raised source/drain region on at least one semiconductor portion;
forming at least one contact-level dielectric layer over said field effect transistor;
forming a contact via hole extending to a surface of said lower raised source/drain region through said at least one contact-level dielectric layer; and
forming an upper raised source/drain region at a bottom portion of said contact via hole.
13. The method of claim 12 , wherein said upper raised source/drain region is formed directly on said lower raised source/drain region.
14. The method of claim 12 , wherein said upper raised source/drain region is formed by selective deposition of a semiconductor material, wherein said semiconductor material does not grow on dielectric surfaces during said selective deposition.
15. The method of claim 12 , wherein said upper raised source/drain region is epitaxially aligned to said lower raised source/drain region and said underlying source/drain region.
16. The method of claim 12 , further comprising forming a contact via structure in an upper portion of said contact via hole, wherein said upper raised source/drain region has a same horizontal cross-sectional area as a bottom portion of said contact via structure.
17. The method of claim 12 , further comprising forming a metal semiconductor alloy portion directly on said underlying source/drain region and within said contact via hole.
18. The method of claim 12 , wherein said FET is a planar FET, and a surface of said underlying source/drain region is coplanar with an interface between a gate dielectric and a body region of said FET.
19. The method of claim 12 , wherein said FET is a fin FET including at least one semiconductor fin and a gate electrode straddling over said at least one semiconductor fin, and said underlying source/drain region and a body region of said FET are formed within one of said at least one semiconductor fin.
20. The method of claim 19 , wherein said at least one semiconductor fin is a plurality of semiconductor fins, said upper raised source/drain region is formed directly on a plurality of lower raised source/drain regions including said lower raised source/drain region, and said method further comprises forming a contact via structure over said plurality of lower raised source/drain regions.