Surface damage control in diodes
A semiconductor device and a method of forming the same is disclosed. The semiconductor device includes a substrate, a first well region disposed within the substrate, a second well region disposed adjacent to the first well region and within the substrate, and an array of well regions disposed within the first well region. The first well region includes a first type of dopants, the second well region includes a second type of dopants that is different from the first type of dopants, and the array of well regions include the second type of dopants. The semiconductor device further includes a metal silicide layer disposed on the array of well regions and within the substrate, a metal silicide nitride layer disposed on the metal silicide layer and within the substrate, and a contact structure disposed on the metal silicide nitride layer.
1. A method, comprising:
forming a first well region with a first type of dopants in a substrate;
forming an array of well regions with a second type of dopants in the first well region;
forming a metal silicide layer on the array of well regions and in the substrate;
forming a metal silicide nitride layer on the metal silicide layer and in the substrate, wherein an interface between the metal silicide layer and the metal silicide nitride layer is at a plane same as or lower than a top surface of the substrate; and
forming a conductive structure in the metal silicide nitride layer.
2. The method of claim 1 , wherein forming the metal silicide layer comprises depositing a metal layer on the array of well regions.
3. The method of claim 1 , wherein forming the metal silicide layer comprises depositing a capping layer on the array of well regions.
4. The method of claim 1 , wherein forming the metal silicide layer comprises depositing a metal nitride layer with a cubic crystal structure.
5. The method of claim 1 , wherein forming the metal silicide layer comprises performing an anneal process and a surface treatment process at a same time.
6. The method of claim 1 , wherein forming the metal silicide layer comprises:
depositing a metal layer on the array of well regions; and
performing a nitrogen-based surface treatment on the metal layer.
7. The method of claim 1 , wherein forming the metal silicide layer comprises:
depositing a metal nitride layer on the array of well regions; and
exposing the metal nitride layer to a nitrogen-based gas.
8. The method of claim 1 , wherein forming the metal silicide nitride layer comprises depositing, on the array of well regions, a metal nitride layer with a metal to nitrogen concentration ratio of about 1:3 to about 1:4.
9. The method of claim 1 , further comprising forming a doped region with a third type of dopants in the first well region.
10. The method of claim 9 , further comprising:
forming an other metal silicide layer on the doped region; and
forming an other metal silicide nitride layer on the other metal silicide layer.
11. A method, comprising:
forming an array of well regions in a substrate;
depositing a metal layer on the array of well regions;
depositing an oxygen barrier layer on a top surface of the metal layer;
performing, on the oxygen barrier layer, an anneal process and a surface treatment process to form a metal silicide layer on the array of well regions; and
forming a conductive structure on the metal silicide layer.
12. The method of claim 11 , wherein the anneal process and the surface treatment process are performed at a same time.
13. The method of claim 11 , wherein performing the surface treatment comprises exposing the oxygen barrier layer to a nitrogen-based gas.
14. The method of claim 11 , wherein depositing the oxygen barrier layer comprises depositing a metal nitride layer with a cubic crystal structure.
15. The method of claim 11 , wherein depositing the oxygen barrier layer comprises depositing a metal nitride layer with a metal to nitrogen concentration ratio of about 1:3 to about 1:4.
16. The method of claim 11 , further comprising:
forming a doped region in the substrate;
forming an other metal silicide layer on the doped region; and
forming a metal silicide nitride layer on the other metal silicide layer.
17. A method, comprising:
forming first and second well regions in a substrate;
forming a metal silicide layer extending from the first well region to the second well region;
forming a metal silicide nitride layer on the metal silicide layer, wherein an interface between the metal silicide layer and the metal silicide nitride layer is at a plane same as or lower than a top surface of the substrate; and
forming a conductive structure on the metal silicide layer.
18. The method of claim 17 , wherein forming the metal silicide layer comprises:
depositing a metal layer on the first and second well regions; and
depositing a metal nitride layer on the metal layer.
19. The method of claim 18 , wherein forming the metal silicide layer further comprises:
performing a rapid thermal anneal process on the metal nitride layer; and
exposing the metal nitride layer to a nitrogen-based gas.
20. The method of claim 18 , wherein depositing the metal nitride layer comprises depositing the metal nitride layer with a metal to nitrogen concentration ratio of about 1:3 to about 1:4.