Granted Patent
S1
US 1,110,975 · App. 29/951,119 · Granted Feb 3, 2026
Collimator for a physical vapor deposition (PVD) chamber
Inventors:
Fuhong Zhang (San Jose, CA); Martin Lee Riker (Round Rock, TX); Suhas Bangalore Umesh (Sunnyvale, CA); Madan Kumar Shimoga Mylarappa (Bengaluru, IN)
Assignee:
Applied Materials Inc.
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Claims (1)
The ornamental design for a collimator for a physical vapor deposition (PVD) chamber, as shown and described.
Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded Jul 9, 2024
From: ZHANG, FUHONG; RIKER, MARTIN LEE; BANGALORE UMESH, SUHAS; SHIMOGA MYLARAPPA, MADAN KUMAR
To: APPLIED MATERIALS, INC.
Reel/Frame 067937/0478 →
Continuity (1)
Division
29822866
· Jan 12, 2022
References Cited (222)
US 5320728A
· Tepman
· 1994
[cited by applicant]
US D351450S
· Maryska
· 1994
[cited by applicant]
US 5401675A
· Lee
· 1995
[cited by examiner]
US D363464S
· Fukasawa et al.
· 1995
[cited by applicant]
US 5544771A
· Lee
· 1996
[cited by applicant]
US D376744S
· Eisenblatter
· 1996
[cited by applicant]
US 5624536A
· Wada
· 1997
[cited by examiner]
US D381030S
· Tepman
· 1997
[cited by applicant]
US 5643428A
· Krivokapic et al.
· 1997
[cited by applicant]
US 5702573A
· Biberger et al.
· 1997
[cited by applicant]
US 5705042A
· Leiphart
· 1998
[cited by examiner]
US D395483S
· Maryska
· 1998
[cited by applicant]
US 5770026A
· Lee
· 1998
[cited by applicant]
US 5958193A
· Brugge
· 1999
[cited by examiner]
US D423026S
· Shimazu
· 2000
[cited by applicant]
US D425919S
· Burkhart et al.
· 2000
[cited by applicant]
US 6086725A
· Abburi et al.
· 2000
[cited by applicant]
US 6114216A
· Yieh et al.
· 2000
[cited by applicant]
US D446231S
· Kuraoka et al.
· 2001
[cited by applicant]
US 6362097B1
· Demaray
· 2002
[cited by examiner]
US 6390905B1
· Korovin et al.
· 2002
[cited by applicant]
US 6659850B2
· Korovin et al.
· 2003
[cited by applicant]
US D487254S
· Suenaga
· 2004
[cited by applicant]
US D496951S
· Brasseur et al.
· 2004
[cited by applicant]
US 6815352B1
· Tamura et al.
· 2004
[cited by applicant]
US D503729S
· Leeuw et al.
· 2005
[cited by applicant]
US D553104S
· Oohashi et al.
· 2007
[cited by applicant]
US D557226S
· Uchino
· 2007
[cited by applicant]
US D559066S
· Tano et al.
· 2008
[cited by applicant]
US D559993S
· Nagakubo et al.
· 2008
[cited by applicant]
US D559994S
· Nagakubo et al.
· 2008
[cited by applicant]
US D562856S
· Hawley et al.
· 2008
[cited by applicant]
US D570310S
· Sasaki et al.
· 2008
[cited by applicant]
US D571383S
· Ota et al.
· 2008
[cited by applicant]
US D571831S
· Ota et al.
· 2008
[cited by applicant]
US D571833S
· Ota et al.
· 2008
[cited by applicant]
US D572733S
· Ota et al.
· 2008
[cited by applicant]
US 7402098B2
· Severson et al.
· 2008
[cited by applicant]
US D582949S
· Yamashita
· 2008
[cited by applicant]
US D584591S
· Tano et al.
· 2009
[cited by applicant]
US D592029S
· Tano et al.
· 2009
[cited by applicant]
US D592030S
· Tano et al.
· 2009
[cited by applicant]
US D598717S
· Jalet
· 2009
[cited by examiner]
US D600660S
· Sato
· 2009
[cited by applicant]
US D600989S
· Tano et al.
· 2009
[cited by applicant]
US D613829S
· Griffin
· 2010
[cited by examiner]
US D614593S
· Lee et al.
· 2010
[cited by applicant]
US D616389S
· Takahashi
· 2010
[cited by applicant]
US D616390S
· Sato
· 2010
[cited by applicant]
US D633452S
· Namiki et al.
· 2011
[cited by applicant]
US D649126S
· Takahashi
· 2011
[cited by applicant]
US D660645S
· Zandona
· 2012
[cited by examiner]
US D669509S
· Krink et al.
· 2012
[cited by applicant]
US 8371904B2
· Jindal et al.
· 2013
[cited by applicant]
US D678745S
· Nguyen
· 2013
[cited by applicant]
US 8398833B2
· Lee et al.
· 2013
[cited by applicant]
US D683806S
· Dueck
· 2013
[cited by applicant]
US D687790S
· Krishnan et al.
· 2013
[cited by applicant]
US D687791S
· Krishnan et al.
· 2013
[cited by applicant]
US D691974S
· Osada
· 2013
[cited by applicant]
US D694790S
· Matsumoto et al.
· 2013
[cited by applicant]
US D703162S
· Tamaso
· 2014
[cited by applicant]
US D716742S
· Jang et al.
· 2014
[cited by applicant]
US D721417S
· Sawchuk
· 2015
[cited by examiner]
US D722298S
· Saito et al.
· 2015
[cited by applicant]
US D724553S
· Choi et al.
· 2015
[cited by applicant]
US D732094S
· Jussel et al.
· 2015
[cited by applicant]
US D741823S
· Tateno et al.
· 2015
[cited by applicant]
US D741921S
· Jarvius et al.
· 2015
[cited by applicant]
US D746647S
· Roaks
· 2016
[cited by examiner]
US D750728S
· Kremer
· 2016
[cited by applicant]
US D753449S
· Liebowitz
· 2016
[cited by examiner]
US D754468S
· Nason
· 2016
[cited by applicant]
US D759603S
· Saito et al.
· 2016
[cited by applicant]
US D760180S
· Dempster
· 2016
[cited by examiner]
US D767234S
· Kirkland et al.
· 2016
[cited by applicant]
US D769200S
· Fukushima et al.
· 2016
[cited by applicant]
US 9475996B2
· Mandle
· 2016
[cited by applicant]
US D770992S
· Tauchi et al.
· 2016
[cited by applicant]
US 9543126B2
· Riker
· 2017
[cited by applicant]
US D790039S
· Hawrylchak et al.
· 2017
[cited by applicant]
US D790041S
· Jang et al.
· 2017
[cited by applicant]
US D793572S
· Kozuka et al.
· 2017
[cited by applicant]
US D794753S
· Miller
· 2017
[cited by applicant]
US D795208S
· Sasakl et al.
· 2017
[cited by applicant]
US D796458S
· Jang et al.
· 2017
[cited by applicant]
US D797067S
· Zhang et al.
· 2017
[cited by applicant]
US D797691S
· Joubert et al.
· 2017
[cited by applicant]
US D798248S
· Hanson et al.
· 2017
[cited by applicant]
US D801942S
· Riker et al.
· 2017
[cited by applicant]
US D804230S
· Allan et al.
· 2017
[cited by applicant]
US D808349S
· Fukushima et al.
· 2018
[cited by applicant]
US D810705S
· Krishnan et al.
· 2018
[cited by applicant]
US 9892890B2
· Bluck et al.
· 2018
[cited by applicant]
US D813181S
· Okajima et al.
· 2018
[cited by applicant]
US D818015S
· Karol
· 2018
[cited by examiner]
US 9960024B2
· Riker et al.
· 2018
[cited by applicant]
US D819580S
· Krishnan et al.
· 2018
[cited by applicant]
US D821039S
· Owens, III
· 2018
[cited by applicant]
US D821140S
· Mirchandani
· 2018
[cited by examiner]
US D824971S
· Karol
· 2018
[cited by examiner]
US D825504S
· Zhang et al.
· 2018
[cited by applicant]
US D825505S
· Hanson et al.
· 2018
[cited by applicant]
US D830435S
· Wakisaka et al.
· 2018
[cited by applicant]
US D830981S
· Jeong et al.
· 2018
[cited by applicant]
US D836572S
· Riker et al.
· 2018
[cited by applicant]
US D837755S
· Riker et al.
· 2019
[cited by applicant]
US D839224S
· Yamaki et al.
· 2019
[cited by applicant]
US D846514S
· Yoshida et al.
· 2019
[cited by applicant]
US D851613S
· Johanson et al.
· 2019
[cited by applicant]
US D858468S
· Riker et al.
· 2019
[cited by applicant]
US D859333S
· Riker et al.
· 2019
[cited by applicant]
US D860279S
· Karol
· 2019
[cited by examiner]
US D868124S
· Riker et al.
· 2019
[cited by applicant]
US D869409S
· Riker et al.
· 2019
[cited by applicant]
US D877101S
· Johanson et al.
· 2020
[cited by applicant]
US D877220S
· Karol
· 2020
[cited by examiner]
US D888903S
· Gunther et al.
· 2020
[cited by applicant]
US D891382S
· Koppa et al.
· 2020
[cited by applicant]
US D893441S
· Rao et al.
· 2020
[cited by applicant]
US D894137S
· Johanson et al.
· 2020
[cited by applicant]
US D902165S
· Johanson et al.
· 2020
[cited by applicant]
US D908645S
· Savandaiah et al.
· 2021
[cited by applicant]
US D913979S
· Babu et al.
· 2021
[cited by applicant]
US D913980S
· Lee et al.
· 2021
[cited by applicant]
US D931919S
· Karol
· 2021
[cited by examiner]
US D997111S
· Riker
· 2023
[cited by applicant]
US D998575S
· Riker
· 2023
[cited by applicant]
US 20030015421A1
· Cha
· 2003
[cited by examiner]
US 20030029715A1
· Yu et al.
· 2003
[cited by applicant]
US 20040211665A1
· Yoon et al.
· 2004
[cited by applicant]
US 20070076345A1
· Bang
· 2007
[cited by applicant]
US 20080121620A1
· Guo
· 2008
[cited by examiner]
US 20080173541A1
· Lee et al.
· 2008
[cited by applicant]
US 20090260982A1
· Riker et al.
· 2009
[cited by applicant]
US 20090308732A1
· Cao et al.
· 2009
[cited by applicant]
US 20090308739A1
· Riker
· 2009
[cited by applicant]
US 20100170786A1
· Wang et al.
· 2010
[cited by applicant]
US 20120263569A1
· Priddy et al.
· 2012
[cited by applicant]
US 20130316628A1
· Jang et al.
· 2013
[cited by applicant]
US 20150354054A1
· Fruchterman
· 2015
[cited by applicant]
US 20150357169A1
· Yuan et al.
· 2015
[cited by applicant]
US 20160002776A1
· Nal et al.
· 2016
[cited by applicant]
US 20180233335A1
· Kato
· 2018
[cited by examiner]
US 20180265964A1
· Kato
· 2018
[cited by examiner]
CN 206573738U
· 2017
[cited by applicant]
JP D1420846
· 2011
[cited by applicant]
JP D1421157
· 2011
[cited by applicant]
JP D1422692
· 2014
[cited by applicant]
KR 3010337070001
· 2019
[cited by applicant]
KR 3011384700002
· 2021
[cited by applicant]
KR 301316003
· 2025
[cited by examiner]
KR 301316004
· 2025
[cited by examiner]
TW 223429
· 1994
[cited by applicant]
TW 223430
· 1994
[cited by applicant]
TW M267462
· 2006
[cited by applicant]
TW D117576
· 2007
[cited by applicant]
TW D122892
· 2008
[cited by applicant]
TW M346018
· 2008
[cited by applicant]
TW D129207
· 2009
[cited by applicant]
TW 200938890
· 2009
[cited by applicant]
TW D137192
· 2010
[cited by applicant]
TW D146490
· 2012
[cited by applicant]
TW D153743
· 2013
[cited by applicant]
TW D159673
· 2014
[cited by applicant]
TW D159674
· 2014
[cited by applicant]
TW D159675
· 2014
[cited by applicant]
TW D159676
· 2014
[cited by applicant]
TW D166552
· 2015
[cited by applicant]
TW D169790
· 2015
[cited by applicant]
TW D174341
· 2016
[cited by applicant]
TW DI74342
· 2016
[cited by applicant]
TW D175852
· 2016
[cited by applicant]
TW D175853
· 2016
[cited by applicant]
TW D175855
· 2016
[cited by applicant]
TW D176440
· 2016
[cited by applicant]
TW D178698
· 2016
[cited by applicant]
TW D180288
· 2016
[cited by applicant]
TW D197827
· 2019
[cited by applicant]
TW 200242001
· 2019
[cited by applicant]
TW 2021020001
· 2020
[cited by applicant]
Applied Materials AMAT 0020-23811 Collimater (for Parts or Not Working),https://www.novusferro.com/shop/semicon/components/applied-materials-amat-0020-23811-collimater/,2025. (Year: 2025).
[cited by examiner]
U.S. Appl. No. 29/805,681, filed Aug. 29, 2021, Riker et al.
[cited by applicant]
Search Report for Taiwan Design Application No. 106301373 dated Jun. 20, 2017.
[cited by applicant]
Search Report for Taiwan Design Application No. 107305358 dated Feb. 21, 2019.
[cited by applicant]
Search Report for Taiwan Design Application No. 1077303086 dated Jul. 6, 2018.
[cited by applicant]
Sputtering Targets, posted at Angstrom Sciences, posting date May 5, 2016. Site visited Apr. 1, 2019. URL: <https://web.archive.org/web/20160505015447/https://www.angstromsciences.com/sputtering-targets> (Year: 2016).
[cited by applicant]
Sputtering Targets for L Sis, posted at JX Nippon Mining & Metals, posting date Mar. 22, 2016. Site visited Apr. 1, 2019. URL: <https://web .archive .org/web/20160322055046/http :1/www.nmm.jx-group.co.jp/english/product…
[cited by applicant]
Search Report for Taiwan Design Application No. 107305411, Feb. 21, 2019, p. 2.
[cited by applicant]