Susceptor pocket with beveled projection sidewall
View Patent ↗An apparatus for holding a semiconductor substrate comprises a plate having a pocket which holds the substrate, wherein the pocket comprises a lower surface and an inner edge. The inner edge comprises a plurality of members extending radially inward to reduce the area of contact between the inner edge and the substrate. The beveled edge is inclined so that there is an acute angle between the lower surface of the pocket and the beveled edge.
1. An apparatus for holding a substrate, said apparatus comprising:
a pocket adapted to hold said substrate, wherein said pocket comprises an inner edge and a lower surface;
a plurality of projections extending radially inward from said inner edge;
an opening in said lower surface; and
a pin disposed in said opening, said pin being configured for lifting said substrate from said pocket;
wherein said projections have a beveled edge, such that an acute angle greater than 80 degrees occurs between said lower surface and said beveled edge, and
wherein said projections reduce an area of contact between said inner edge and said substrate.
2. The apparatus of claim 1 , wherein said apparatus comprises a susceptor for holding said substrate.
3. The apparatus of claim 1 , wherein said projections have a “C” shape.
4. The apparatus of claim 1 , wherein said projections maintain a gap between a sidewall of said substrate and said inner edge.
5. The apparatus of claim 1 , wherein said acute angle comprises an angle not greater than 85 degrees.
6. The apparatus of claim 1 , wherein said projections prevent said substrate from moving within said pocket.
7. An apparatus for holding a substrate, said apparatus comprising:
a pocket adapted to hold said substrate, wherein said pocket comprises an inner edge and a lower surface;
a plurality of projections extending radially inward from said inner edge; and
an opening in said lower surface;
wherein said projections have a beveled edge, and
wherein an acute angle greater than 80 degrees occurs between said lower surface and said beveled edge.
8. The apparatus in claim 7 , wherein said projections reduce an area of contact between said inner edge and said substrate.
9. The apparatus of claim 7 , wherein said apparatus comprises a susceptor for holding said substrate.
10. The apparatus of claim 7 , wherein said projections have a “C” shape.
11. The apparatus of claim 7 , wherein said projections maintain a gap between a sidewall of said substrate and said inner edge.
12. The apparatus of claim 7 , wherein said acute angle comprises an angle not greater than 85 degrees.
13. The apparatus of claim 7 , wherein said projections prevent said substrate from moving within said packet.
14. A susceptor for holding a wafer, said susceptor comprising:
a pocket adapted to bold said wafer, wherein said pocket comprises an inner edge and a lower surface;
a plurality of projections extending radially inward from said inner edge; and
a device positioned below said pocket said device being configured for lifting said wafer from said pocket;
wherein said projections have a beveled edge, and
wherein art acute angle greater than 80 degrees occurs between said lower surface and said beveled edge.
15. The susceptor of claim 14 , wherein said acute angle is not greater than 85 degrees.
16. The susceptor of claim 15 , wherein said projections have a “C” shape.