IP Library › Granted Patent US 7,781,781
Granted Patent B2
US 7,781,781 · App. 11/560,882 · Granted Aug 24, 2010

CMOS imager array with recessed dielectric

Assignee: International Business Machines Corporation
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Quick Facts
Patent No.
US 7,781,781
App. No.
11/560,882
Granted
Aug 24, 2010
Kind
B2
Abstract

A CMOS image sensor array and method of fabrication. The CMOS imager sensor array comprises a substrate; an array of light receiving pixel structures formed above the substrate, the array having formed therein “m” levels of conductive structures, each level formed in a corresponding interlevel dielectric material layer; a dense logic wiring region formed adjacent to the array of light receiving pixel structures having “n” levels of conductive structures, each level formed in a corresponding interlevel dielectric material layer, where n>m. A microlens array having microlenses and color filters formed above the interlevel dielectric material layer, a microlens and respective color filter in alignment with a respective light receiving structure formed at a surface of the substrate. A top surface of the interlevel dielectric material layer beneath the microlens array is recessed from a top surface of the interlevel dielectric material layers of the dense logic wiring region.

Claims (20)

1. A CMOS imager array comprising:

a substrate;

an array of light receiving pixel structures formed above said substrate, said array having formed therein “m” levels of conductive structures, each level formed in a corresponding interlevel dielectric material layer;

a dense logic wiring region formed adjacent to said array of light receiving pixel structures having “n” levels of conductive structures, each level formed in a corresponding interlevel dielectric material layer, where n>m and where m=2 and n≧4; and

a conductive element electrically connecting a final conductive structure of said dense logic wiring region to an external conductor, wherein said external conductor includes a solder element formed beneath said substrate as part of a ball grid array structure.

2. The imager array as claimed in claim 1 , wherein said array of light receiving pixel structures comprises:

a microlens array having microlenses and color filters formed above said interlevel dielectric material layer, a microlens and respective color filter in alignment with a respective light receiving structure formed at a surface of said substrate.

3. The imager array as claimed in claim 2 , wherein a top surface of said interlevel dielectric material layer beneath microlens array is recessed from a top surface of said interlevel dielectric material layers of said dense logic wiring region.

4. The imager array as claimed in claim 2 , wherein a dense logic wiring region is formed at two opposing sides adjacent said pixel array region, said dense logic wiring region including a passivation layer formed at a top surface and having a final conductive structure.

5. The imager array as claimed in claim 4 , further comprising:

a protective structure mounted to a top surface of said passivation structure at said two opposing sides, said protective structure and a top surface of said microlens array separated by a gap, wherein said gap providing additional protection of said microlens array during mounting of said protective structure.

6. The imager array as claimed in claim 5 , wherein said mounted protective structure comprises a glass plate covering said array of light receiving pixel structures.

7. The imager array as claimed in claim 5 , wherein said gap is about 10 microns or greater in thickness.

8. The imager array as claimed in claim 1 , wherein said “n” levels of conductive structures at said dense logic wiring region are interconnected by via structures.

9. The imager array as claimed in claim 1 , wherein said ball grid array structure is formed as part of a Schott integrated circuit package.

10. The imager array as claimed in claim 1 , wherein said ball grid array structure is formed as part of a Shellcase integrated circuit package.

11. A CMOS imager array comprising:

a substrate;

an array of light receiving pixel structures formed above said substrate, said array having formed therein “m” levels of conductive structures, each level formed in a corresponding interlevel dielectric material layer; and

a dense logic wiring region formed adjacent to said array of light receiving pixel structures having “n” levels of conductive structures, each level formed in a corresponding interlevel dielectric material layer, where n>m and where m=2 and n≧4.

Assignments (7)
RELEASE OF SECURITY INTEREST Recorded May 12, 2021
From: WILMINGTON TRUST, NATIONAL ASSOCIATION
To: GLOBALFOUNDRIES U.S. INC.
Reel/Frame 056987/0001 →
RELEASE OF SECURITY INTEREST Recorded Nov 20, 2020
From: WILMINGTON TRUST, NATIONAL ASSOCIATION
To: GLOBALFOUNDRIES INC.
Reel/Frame 054636/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 2, 2020
From: GLOBALFOUNDRIES INC.
To: GLOBALFOUNDRIES U.S. INC.
Reel/Frame 054633/0001 →
SECURITY AGREEMENT Recorded Nov 29, 2018
From: GLOBALFOUNDRIES INC.
To: WILMINGTON TRUST, NATIONAL ASSOCIATION
Reel/Frame 049490/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 5, 2015
From: GLOBALFOUNDRIES U.S. 2 LLC; GLOBALFOUNDRIES U.S. INC.
To: GLOBALFOUNDRIES INC.
Reel/Frame 036779/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 3, 2015
From: INTERNATIONAL BUSINESS MACHINES CORPORATION
To: GLOBALFOUNDRIES U.S. 2 LLC
Reel/Frame 036550/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 17, 2006
From: ADKISSON, JAMES W.; GAMBINO, JEFFREY P.; HE, ZHONG-XIANG; JAFFE, MARK D.; LEIDY, ROBERT K.; LUCE, STEPHEN E.; RASSEL, RICHARD J.; SPROGIS, EDMUND J.
To: INTERNATIONAL BUSINESS MACHINES CORPORATION
Reel/Frame 018530/0741 →
Continuity (1)
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