Device having wire bond and redistribution layer
A semiconductor device comprises a copper redistribution line, a copper inductor and aluminum wire bond pads and the integration of the resulting device with an integrated circuit on a single chip, resulting in the decreased size of the chip.
1. A semiconductor device comprising:
a semiconductor substrate having a plurality of electrically connected devices provided thereon;
a plurality of layers disposed over the semiconductor substrate, including at least one insulating layer, a conducting layer and a top insulating layer provided above the conducting layer, wherein the conducting layer includes aluminum wiring that electrically interconnects at least some of the plurality of electrically connected devices, a plurality of internal wire bond pads and a plurality of external wire bond pads;
a copper redistribution line disposed within an insulating redistribution layer disposed over the top insulating layer, the copper redistribution line interconnecting at least some of the internal wire bond pads;
vertical portions extending from the plurality of external wire bond pads through one or more of the at least one insulating layer and the top insulating layer and through corresponding vertical portions of the insulating redistribution layer, wherein the vertical portions are formed by removal of material from the one or more of the at least one insulating layer, the top insulating layer and the insulating redistribution layer; and
conducting material filling each of the vertical portions, the conducting material connecting external wire bond pads to associated external connection lines.
2. The semiconductor device of claim 1 , further comprising a copper inductor formed within the insulating redistribution layer.
3. The semiconductor device of claim 1 , further comprising an ESD protection device.
4. The semiconductor device of claim 1 , further comprising a filtering device.