Microelectronic structure by selective deposition
View Patent ↗A finFET structure includes a semiconductor fin located over a substrate. A gate electrode is located traversing the semiconductor fin. The gate electrode has a spacer layer located adjoining a sidewall thereof. The spacer layer does not cover completely a sidewall of the semiconductor fin. The gate electrode and the spacer layer may be formed using a vapor deposition method that provides for selective deposition upon a sidewall of a mandrel layer but not upon an adjoining surface of the substrate so that the spacer layer does not cover completely the sidewall of the semiconductor fin. Other microelectronic structures may be fabricated using the lateral growth methodology.
1. A method for fabricating a structure comprising:
forming a mandrel layer over a substrate, where a sidewall of the mandrel layer is activated with respect to vapor deposition of a material layer upon the sidewall of the mandrel layer while a surface of the substrate is passivated with respect to vapor deposition of the material layer upon the surface of the substrate; and
vapor depositing and selectively laterally growing the material layer upon the sidewall of the mandrel layer but not upon the surface of the substrate.
2. The method of claim 1 wherein the step of forming the mandrel layer over the substrate comprises forming the mandrel layer that comprises a maleic anhydride material over the substrate.
3. The method of claim 1 wherein the step of forming the mandrel layer over the substrate, where the sidewall of the mandrel layer is activated with respect to vapor deposition of a material layer upon the sidewall of the mandrel layer comprises forming the mandrel layer over the substrate, where the sidewall of the mandrel layer is activated with respect to vapor deposition of a material layer upon the sidewall of the mandrel layer by using at least one of an organic acid, hydroxyl and amine activant.
4. The method of claim 1 wherein the step of forming the mandrel layer over the substrate comprises forming the mandrel layer over the substrate that comprises a silicon oxide surface.
5. The method of claim 1 wherein the step of forming the mandrel layer over the substrate, where the surface of the substrate is passivated with respect to vapor deposition of a material layer upon the surface of the substrate comprises forming the mandrel layer over the substrate, where the surface of the substrate is passivated with respect to vapor deposition of a material layer upon the surface of the substrate by using a substituted silane passivant.
6. The method of claim 1 wherein the step of vapor depositing and selectively laterally growing the material layer upon the sidewall of the mandrel layer but not upon the surface of the substrate comprises vapor depositing and selectively laterally growing the material layer that comprises a dielectric material upon the sidewall of the mandrel layer but not upon the surface of the substrate.
7. The method of claim 1 wherein the step of vapor depositing and selectively laterally growing the material layer upon the sidewall of the mandrel layer but not upon the surface of the substrate comprises vapor depositing and selectively laterally growing the material layer that comprises a conductor material upon the sidewall of the mandrel layer but not upon the surface of the substrate.
8. The method of claim 1 wherein the step of vapor depositing and selectively laterally growing the material layer upon the sidewall of the mandrel layer but not upon the surface of the substrate comprises vapor depositing and selectively laterally growing the material layer that comprises a lateral laminate of a dielectric material and a conductor material upon the sidewall of the mandrel layer but not upon the surface of the substrate.
9. The method of claim 1 wherein the step of vapor depositing and selectively laterally growing the material layer upon the sidewall of the mandrel layer but not upon the surface of the substrate comprises vapor depositing and selectively laterally growing the material layer that comprises a gate electrode upon the sidewall of the mandrel layer but not upon the surface of the substrate.
10. The method of claim 1 wherein the step of vapor depositing and selectively laterally growing the material layer upon the sidewall of the mandrel layer but not upon the surface of the substrate comprises vapor depositing and selectively laterally growing the material layer that comprises a gate electrode within a finFET upon the sidewall of the mandrel layer but not upon the surface of the substrate.