IP Library Granted Patent US 8,390,306
Granted Patent B2
US 8,390,306 · App. 12/854,416 · Granted Mar 5, 2013

Corrosion sensors

Inventors: Hendrik F. Hamann (Yorktown Heights, NY); Levente Loan Klein (Tuckahoe, NY); Michael Alan Schappert (Wappingers Falls, NY); Prabjit Singh (Poughkeepsie, NY)
Assignee: International Business Machines Corporation
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Quick Facts
Patent No.
US 8,390,306
App. No.
12/854,416
Granted
Mar 5, 2013
Kind
B2
Abstract

Corrosion sensor apparatus for detection of contamination affecting metal based components and devices. For example, an apparatus includes: a set of corrosion sensor elements wherein a width of a first corrosion sensor element is different than a width of a second corrosion sensor element, wherein each corrosion sensor element is susceptible to corrosion caused by an operating environment of the corrosion sensor elements; and a set of reference elements wherein a width of a first reference sensor element is substantially equal to the width of the first corrosion sensor element and a width of a second reference sensor element is substantially equal to the width of the second corrosion sensor element, wherein each reference sensor element is not substantially susceptible to corrosion caused by the operating environment of the corrosion sensor elements.

Claims (18)

1. An apparatus, comprising:

a set of corrosion sensor elements comprising a first corrosion sensor element and at least a second corrosion element, each corrosion sensor element being coupled between a source and a monitor, wherein a width of the first corrosion sensor element is different than a width of the second corrosion sensor element, wherein each corrosion sensor element is susceptible to corrosion caused by an operating environment of the corrosion sensor elements; and

a set of reference elements comprising a first reference sensor element and at least a second reference sensor element, each reference sensor element being coupled between the source and the monitor, wherein a width of the first reference sensor element is substantially equal to the width of the first corrosion sensor element and a width of the second reference sensor element is substantially equal to the width of the second corrosion sensor element, wherein each reference sensor element is not substantially susceptible to corrosion caused by the operating environment of the corrosion sensor elements.

2. The apparatus of claim 1 , wherein a signal generated from the first corrosion sensor element in response to the source is received by the monitor and is compared to a signal generated from the first reference sensor element in response to the source and received by the monitor, wherein the result of the comparison is indicative of an amount of corrosion experienced by the first corrosion sensor element for a first period of time.

3. The apparatus of claim 2 , wherein a signal generated from the second corrosion sensor element in response to the source is received by the monitor and is compared to a signal generated from the second reference sensor element in response to the source and received by the monitor, wherein the result of the comparison is indicative of an amount of corrosion experienced by the second corrosion sensor element for a second period of time.

4. The apparatus of claim 1 , wherein the width of the second corrosion sensor element is larger than the width of the first corrosion sensor element such that the second time period is longer than the first time period.

5. The apparatus of claim 1 , wherein the set of reference sensor elements are encapsulated with a layer that protects the set of reference sensor elements from being substantially susceptible to corrosion caused by the operating environment of the corrosion sensor elements.

6. The apparatus of claim 1 , further comprising a connecting bus that electrically connects a first end of each of the corrosion sensor elements and the reference sensor elements to the source.

7. The apparatus of claim 6 , wherein the connecting bus is encapsulated with a layer that protects the connecting bus from being substantially susceptible to corrosion caused by the operating environment of the corrosion sensor elements.

8. The apparatus of claim 6 , further comprising a plurality of contact pads wherein a second end of each of the corrosion sensor elements and the reference sensor elements is electrically connected to a respective contact pad, and wherein each contact pad is electrically connected to the monitor.

9. The apparatus of claim 1 , wherein each of the corrosion sensor elements is formed such that the corrosion sensor element corrodes in a single spatial dimension.

10. The apparatus of claim 9 , wherein the single spatial dimension corrosion yields a linear response from the apparatus.

11. The apparatus of claim 9 , wherein each of the corrosion sensor elements comprises a protective layer that protects the corrosion sensor element from being substantially susceptible to corrosion in a spatial dimension other than the single spatial dimension.

12. The apparatus of claim 9 , wherein the single spatial dimension is width.

13. The apparatus of claim 1 , further comprising a substrate upon which the set of corrosion sensor elements and the set of reference sensor elements are formed.

14. The apparatus of claim 1 , wherein each of the corrosion sensor elements is a metal film.

15. The apparatus of claim 1 , wherein each of the corrosion sensor elements is a metal wire.

16. The apparatus of claim 1 , wherein a rate of corrosion associated with each of the corrosion sensor elements is inversely proportional to a resistance associated with the corrosion sensor element.

Assignments (7)
RELEASE OF SECURITY INTEREST Recorded May 12, 2021
From: WILMINGTON TRUST, NATIONAL ASSOCIATION
To: GLOBALFOUNDRIES U.S. INC.
Reel/Frame 056987/0001 →
RELEASE OF SECURITY INTEREST Recorded Nov 20, 2020
From: WILMINGTON TRUST, NATIONAL ASSOCIATION
To: GLOBALFOUNDRIES INC.
Reel/Frame 054636/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 2, 2020
From: GLOBALFOUNDRIES INC.
To: GLOBALFOUNDRIES U.S. INC.
Reel/Frame 054633/0001 →
SECURITY AGREEMENT Recorded Nov 29, 2018
From: GLOBALFOUNDRIES INC.
To: WILMINGTON TRUST, NATIONAL ASSOCIATION
Reel/Frame 049490/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 5, 2015
From: GLOBALFOUNDRIES U.S. 2 LLC; GLOBALFOUNDRIES U.S. INC.
To: GLOBALFOUNDRIES INC.
Reel/Frame 036779/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 3, 2015
From: INTERNATIONAL BUSINESS MACHINES CORPORATION
To: GLOBALFOUNDRIES U.S. 2 LLC
Reel/Frame 036550/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 11, 2010
From: HAMANN, HENDRIK F.; KLEIN, LEVENTE LOAN; SCHAPPERT, MICHAEL ALAN; SINGH, PRABJIT
To: INTERNATIONAL BUSINESS MACHINES CORPORATION
Reel/Frame 024824/0129 →
Continuity (1)
Related Publication 20120038377A1 · Feb 16, 2012